Abstract: A position detection system includes: a plurality of distance detection apparatuses that generate distance data indicating distances to a plurality of positions on the object by detecting light reflected by the object in a predetermined three-dimensional space; an object identification part that identifies the object included in one or more pieces of distance data among a plurality of pieces of the distance data generated by the plurality of distance detection apparatuses; and a position identification part that identifies a position of the object in the three-dimensional space on the basis of (i) a position in the three-dimensional space of the distance detection apparatus that generated the distance data with which the object identification part identified the object and (ii) a position of the object in the distance data.

Abstract: A coordinate measuring apparatus includes a measuring part that measures a workpiece, three or more access points that are provided at positions away from the measuring part and perform wireless communication with the measuring part using radio waves, a laser tracker that irradiates a reflection part provided in each access point with a laser beam and receives the laser beam reflected by the reflection part, and a control part that obtains a first coordinate of the each access point by the laser tracker receiving the laser beam reflected by the reflection part, obtains a second coordinate of the measuring part on the basis of the wireless communication between the access point and the measuring part, causes the measuring part to measure a third coordinate of the workpiece, and obtains a spatial coordinate of the workpiece on the basis of the first coordinate, the second coordinate, and the third coordinate.

Abstract: The present invention provides a lens substrate stacking position calculating apparatus capable of calculating a stacking position at which the number of lens sets whose optical axis deviation falls within an allowable range is maximized, when a plurality of wafer lens arrays are bonded together even if the position of each lens formed on a wafer substrate is deviated between wafer lens arrays to be stacked. The lens substrate stacking position calculating apparatus calculates the positional relationship of two or more transparent substrates to be stacked when the two or more transparent substrates on which a plurality of lenses are two-dimensionally arranged are stacked to form a plurality of lens sets each including two or more lenses. A position of each lens is specified in advance in a common coordinate system.

Abstract: A measurement apparatus includes a sensor that measures a workpiece, a multi-axis robot that moves the sensor in a three-dimensional space, a position determination part that determines i) a plurality of measurement positions that are positions along a normal direction at each of a plurality of positions to be measured on the workpiece and ii) a direction of the sensor at each of the plurality of measurement positions on the basis of at least either design data or captured image data indicating the geometry of the workpiece, a moving control part that sequentially moves the sensor to the plurality of measurement positions by controlling the robot, and a measurement control part that outputs measured data indicating a result that the sensor measured at each of the plurality of measurement positions in association with the plurality of positions to be measured.

Abstract: A measuring apparatus and a measuring method capable of measuring a surface of an object includes a movable body having a mounting portion on which the object is mounted, and first and second surfaces not coplanar with each other, a first scale portion provided to press the first surface and to measure a first scale position along a first scale axis parallel to a normal direction of the first surface, a second scale portion provided to press the second surface and to measure a second scale position along a second scale axis parallel to a normal direction of the second surface, a first probe having a reference point of position measurement set on a probe axis parallel to the second direction and at an intersection of the first scale axis and the second scale axis, and a second probe measuring a position along the probe axis.

Abstract: An inductive position detector (IPD) for stylus position measurement in a scanning probe comprises a coil board configuration located along a central axis in the probe with a motion volume extending on opposite sides of the coil board configuration. The coil board configuration includes N top rotary sensing coils (RSCs) and a top axial sensing coil configuration (ASCC), and N bottom RSCs and a bottom ASCC. A pair of stylus-coupled conductive disruptors move along Z (axial) and X-Y (rotary) directions in the motion volume. A generating coil (GC) of the coil board configuration generates a changing magnetic flux (e.g., encompassing all or at least part of the disruptors), and coil signals indicate the disruptors and/or stylus positions. Areas of the conductive disruptors may be larger than an area of the generating coil in some implementations, and the conductive disruptors may each comprise a plurality of concentric conductive loops, spirals, etc.

Abstract: A form measuring apparatus includes a base; an arm capable of swinging relative to the base; a coupler coupling the base and the arm, and having a deformation region that is capable of elastic deformation between the base and the arm; and a distortion detector installed in the deformation region. In the form measuring apparatus, a stylus is mounted to the arm and can slide along a surface of a work piece.

Abstract: A coordinate measuring unit includes a measuring probe and a processing device configured to compute the shape coordinates of an object to be measured on the basis of an output of the measuring probe. The measuring probe has a first identification code. The processing device includes a first determination portion configured to determine whether the first identification code outputted from the measuring probe is matched with a matching code, and a downstream determination portion configured to identify a second identification code outputted from the measuring probe to thereby recognize the measuring probe when the first identification code is matched with the matching code in the first determination portion and the measuring probe further has the second identification code. The coordinate measuring unit with the aforementioned configuration can efficiently recognize a number of measuring probes.

Abstract: The present invention provides a lens substrate stacking position calculating apparatus capable of calculating a stacking position at which the number of lens sets whose optical axis deviation falls within an allowable range is maximized, when a plurality of wafer lens arrays are bonded together even if the position of each lens formed on a wafer substrate is deviated between wafer lens arrays to be stacked. The lens substrate stacking position calculating apparatus calculates the positional relationship of two or more transparent substrates to be stacked when the two or more transparent substrates on which a plurality of lenses are two-dimensionally arranged are stacked to form a plurality of lens sets each including two or more lenses. A position of each lens is specified in advance in a common coordinate system.

Abstract: An inductive position detector (IPD) for stylus position measurement in a scanning probe comprises a coil board configuration located along a central axis in the probe with a motion volume extending on opposite sides of the coil board configuration. The coil board configuration includes N top rotary sensing coils (RSCs) and a top axial sensing coil configuration (ASCC), and N bottom RSCs and a bottom ASCC. A pair of stylus-coupled conductive disruptors move along Z (axial) and X-Y (rotary) directions in the motion volume. A generating coil (GC) of the coil board configuration generates a changing magnetic flux (e.g., encompassing all or at least part of the disruptors), and coil signals indicate the disruptors and/or stylus positions. Areas of the conductive disruptors may be larger than an area of the generating coil in some implementations, and the conductive disruptors may each comprise a plurality of concentric conductive loops, spirals, etc.

Abstract: A measuring apparatus and a measuring method capable of measuring a surface of an object includes a movable body having a mounting portion on which the object is mounted, and first and second surfaces not coplanar with each other, a first scale portion provided to press the first surface and to measure a first scale position along a first scale axis parallel to a normal direction of the first surface, a second scale portion provided to press the second surface and to measure a second scale position along a second scale axis parallel to a normal direction of the second surface, a first probe having a reference point of position measurement set on a probe axis parallel to the second direction and at an intersection of the first scale axis and the second scale axis, and a second probe measuring a position along the probe axis.

Abstract: A measuring probe includes a stylus having a contact part, an axial motion mechanism, and a rotary motion mechanism. The axial motion mechanism includes first diaphragm structures and a moving member that allows the contact part to move in an axial direction. The rotary motion mechanism includes a second diaphragm structure and a rotating member that allows the contact part to move along a plane perpendicular to the axial direction. The first diaphragm structures are disposed at a symmetric distance with respect to the second diaphragm structure, and the second diaphragm structure is disposed between the first diaphragm structures in the axial direction. The axial motion mechanism supports the rotary motion mechanism, or the rotary motion mechanism supports the axial motion mechanism.

Abstract: A probe includes a movable plate to which a stylus capable of contacting a measurable object is mounted, the movable plate displaceable in an X direction; a static plate arranged to overlap with the movable plate; a counter plate facing the movable plate and the static plate; an elastic movable side connection plate, the movable side connection plate connecting the counter plate at at least three places with each of a first end connector positioned toward a first end of the movable plate in the X direction and second end connectors positioned toward a second end in the X direction; and a static side connection plate which connects the static plate and the counter plate. An entire length of the first end connector in a Y direction orthogonal to the X direction is the same size as the entire length of the second end connectors in the Y direction.

Abstract: A form measuring apparatus includes a base; an arm capable of swinging relative to the base; a coupler coupling the base and the arm, and having a deformation region that is capable of elastic deformation between the base and the arm; and a distortion detector installed in the deformation region. In the form measuring apparatus, a stylus is mounted to the arm and can slide along a surface of a work piece.

Abstract: A coordinate measuring unit includes a measuring probe and a processing device configured to compute the shape coordinates of an object to be measured on the basis of an output of the measuring probe. The measuring probe has a first identification code. The processing device includes a first determination portion configured to determine whether the first identification code outputted from the measuring probe is matched with a matching code, and a downstream determination portion configured to identify a second identification code outputted from the measuring probe to thereby recognize the measuring probe when the first identification code is matched with the matching code in the first determination portion and the measuring probe further has the second identification code. The coordinate measuring unit with the aforementioned configuration can efficiently recognize a number of measuring probes.

Abstract: A measuring probe for measuring a screw groove of a relatively movable ball screw includes a light source, an objective lens formed to correspond to the screw groove of the ball screw, arranged to be opposed to the screw groove of the ball screw in a non-contact manner, and configured to emit light from the light source to the screw groove of the ball screw, and a line sensor configured to detect an interference pattern generated by reflected light from the screw groove of the ball screw and reflected light on a surface of the objective lens. This enables high-accuracy measurement of a specified area of a shape of a side surface of a relatively movable work in a non-contact manner.

Abstract: A stylus support portion moveable in an X direction is arranged separate from a fixed portion. A plate spring has a first end fixated to an end portion of the stylus support portion in an X (+) direction, a second end fixated to the fixed portion, and a principal surface facing the X direction. A plate spring has a first end fixated to an end portion of the stylus support portion in an X (?) direction, a second end fixated to the fixed portion, and a principal surface facing the X direction. A first permanent magnet is provided on the end portion of the stylus support portion in the X (+) direction. A second permanent magnet is provided on the end portion of the stylus support portion in the X (?) direction. A third permanent magnet is provided to the fixed portion so that a magnetic force in the X direction acts on an area between the first permanent magnet and the third permanent magnet.

Abstract: A measuring probe for measuring a screw groove of a relatively rotatable ball screw includes a stylus having a tip end portion configured to contact the screw groove, a radial-direction displacement mechanism configured to support the stylus so as for the stylus to be displaceable in an X direction toward an axial center of the ball screw, an axial-direction displacement mechanism configured to support the stylus so as for the stylus to be displaceable in an axial direction (Z direction) of the axial center, and sensors configured to detect displacement of the stylus produced by the radial-direction displacement mechanism and the axial-direction displacement mechanism. This enables high-accuracy measurement of a predetermined position of a side surface of a relatively rotatable work.

Abstract: A probe includes a movable plate to which a stylus capable of contacting a measurable object is mounted, the movable plate displaceable in an X direction; a static plate arranged to overlap with the movable plate; a counter plate facing the movable plate and the static plate; an elastic movable side connection plate, the movable side connection plate connecting the counter plate at at least three places with each of a first end connector positioned toward a first end of the movable plate in the X direction and second end connectors positioned toward a second end in the X direction; and a static side connection plate which connects the static plate and the counter plate. An entire length of the first end connector in a Y direction orthogonal to the X direction is the same size as the entire length of the second end connectors in the Y direction.

Abstract: A contact probe includes a stylus, a spring, a magnetic body, and a permanent magnet. The stylus is displaceable in an X direction and a tip of the stylus makes contact with a measured object. A first end of the spring is fixated and a second end provides spring force along the X direction. A position of the magnetic body is fixated with respect to the stylus. The permanent magnet is arranged separated from the magnetic body so as to generate a magnetic force along the X direction between the magnetic body and the permanent magnet.