Patents by Inventor Kazuhiko Kano

Kazuhiko Kano has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9735342
    Abstract: A piezoelectric thin film is formed through sputtering and consists essentially of scandium aluminum nitride. The carbon atomic content is 2.5 at % or less. When producing the piezoelectric thin film, scandium and aluminum are sputtered simultaneously on a substrate from a scandium aluminum alloy target material having a carbon atomic content of 5 at % or less in an atmosphere where at least nitrogen gas exists. The sputtering may be conducted also by applying an ion beam on an opposing surface of the alloy target material at an oblique angle. Moreover, aluminum and scandium may be also sputtered simultaneously on the substrate from an Sc target material and an Al target material. As a result, a piezoelectric thin film which exhibits excellent piezoelectric properties and a method for the same can be provided.
    Type: Grant
    Filed: May 22, 2014
    Date of Patent: August 15, 2017
    Assignees: DENSO CORPORATION, NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
    Inventors: Akihiko Teshigahara, Kazuhiko Kano, Morito Akiyama, Keiko Nishikubo
  • Publication number: 20160064645
    Abstract: A piezoelectric thin film is formed through sputtering and consists essentially of scandium aluminum nitride. The carbon atomic content is 2.5 at % or less. When producing the piezoelectric thin film, scandium and aluminum are sputtered simultaneously on a substrate from a scandium aluminum alloy target material having a carbon atomic content of 5 at % or less in an atmosphere where at least nitrogen gas exists. The sputtering may be conducted also by applying an ion beam on an opposing surface of the alloy target material at an oblique angle. Moreover, aluminum and scandium may be also sputtered simultaneously on the substrate from an Sc target material and an Al target material. As a result, a piezoelectric thin film which exhibits excellent piezoelectric properties and a method for the same can be provided.
    Type: Application
    Filed: May 22, 2014
    Publication date: March 3, 2016
    Inventors: Akihiko TESHIGAHARA, Kazuhiko KANO, Morito AKIYAMA, Keiko NISHIKUBO
  • Publication number: 20160025580
    Abstract: An antenna unit having an antenna coil pattern is disposed in a casing. A sensor unit has a surface acoustic wave detecting element including a first sensing electrode that generates and receives a surface acoustic wave and a first reflector that reflects the surface acoustic wave, which are provided on a substrate configured of a piezoelectric material, and a sensor coil pattern electrically connected to the first sensing electrode and coupled to the antenna coil pattern. The sensor unit is disposed in a pressure receiving portion, and a signal is transmitted between the sensor unit and the antenna unit by wireless communication resulting from a coil coupling.
    Type: Application
    Filed: February 4, 2014
    Publication date: January 28, 2016
    Inventors: Kouji OOYA, Kazuhiko KANO, Akihiko TESHIGAHARA, Shinji KASHIWADA, Takayuki SHIBATA, Inao TOYODA
  • Patent number: 9246461
    Abstract: A method for manufacturing a piezoelectric thin film including an aluminum nitride thin film containing scandium on a substrate, the method includes: sputtering step for sputtering aluminum and scandium under an atmosphere containing at least a nitrogen gas. In the sputtering step in the method according to the present invention, a scandium content rate falls within the range from 0.5% by atom to 50% by atom when a temperature of the substrate falls within the range from 5° C. to 450° C. during the sputtering step.
    Type: Grant
    Filed: June 30, 2010
    Date of Patent: January 26, 2016
    Assignees: DENSO CORPORATION, NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
    Inventors: Morito Akiyama, Kazuhiko Kano, Akihiko Teshigahara
  • Patent number: 8841817
    Abstract: In a SAW device, a first area placed at a surface of a measurement subject directly under a propagation portion is fixed to the measurement subject, and a second area placed at the surface of the measurement subject directly under both a drive electrode and a reflector is not fixed to the measurement subject. When a strain is generated in the measurement subject, a strain is generated only in the propagation portion, and a phase change is generated in a surface acoustic wave reflected by the reflector. Because the phase change is hardly affected by a temperature change, the strain of the measurement subject can be measured based on the phase change. Because a resonant frequency of the SAW device is changed by the temperature change, but is not affected by the strain of the measurement subject, a temperature can be measured based on a resonant frequency change.
    Type: Grant
    Filed: July 25, 2012
    Date of Patent: September 23, 2014
    Assignee: DENSO CORPORATION
    Inventors: Hideaki Yamada, Kazuhiko Kano
  • Publication number: 20130240479
    Abstract: To provide a method for producing a filtration filter that can simplify the process for providing clean water or freshwater. By etching silicon substrate 1 using masking film formed on a surface of substrate 1 and having numerous openings to expose portions of the surface, numerous circular holes 2 with an approximate diameter of 100 nm are formed in substrate 1. Diameter (D1) at minimum-diameter portions 4 near the openings of circular holes 2 to be reduced by silica film 3 is adjusted to be 1 nm˜100 nm by depositing silica film 3 on the inner surfaces of circular holes 2.
    Type: Application
    Filed: May 9, 2013
    Publication date: September 19, 2013
    Inventors: Tsuyoshi MORIYA, Kenichi Kataoka, Shigeru Senzaki, Youichi Shimanuki, Kazuhiko Kano, Yu Wamura, Song yun Kang, Eiichi Nishimura
  • Publication number: 20130193087
    Abstract: Provided is a water treatment device with which organic substances contained in raw water to be treated are decomposed to thereby alleviate the load to be imposed on a downstream filter and with which it is possible to avoid corrosion of the piping or the like.
    Type: Application
    Filed: October 7, 2011
    Publication date: August 1, 2013
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Tsuyoshi Moriya, Kenichi Kataoka, Shigeru Senzaki, Youichi Shimanuki, Kazuhiko Kano
  • Patent number: 8368474
    Abstract: In a SAW oscillator, each of a first SAW element and a second SAW element includes interdigital electrodes and a reflector formed on a piezoelectric material. A first oscillating circuit part forms an oscillating loop including the first SAW element. A second oscillating circuit part forms an oscillating loop including the second SAW element. The first and second oscillating circuit parts have an identical admittance property. The first and second SAW elements are configured that an electrode pitch is identical and an admittance property indicating a relation between a frequency and an admittance value is different therebetween. Further, a first intersection point between the admittance property of the first SAW element and the admittance property of the first oscillating circuit part and a second intersection point between the admittance property of the second SAW element and the admittance property of the second oscillating circuit part are at different frequencies.
    Type: Grant
    Filed: May 19, 2011
    Date of Patent: February 5, 2013
    Assignee: Denso Corporation
    Inventors: Kazuki Arakawa, Kazuhiko Kano
  • Publication number: 20130026882
    Abstract: In a SAW device, a first area placed at a surface of a measurement subject directly under a propagation portion is fixed to the measurement subject, and a second area placed at the surface of the measurement subject directly under both a drive electrode and a reflector is not fixed to the measurement subject. When a strain is generated in the measurement subject, a strain is generated only in the propagation portion, and a phase change is generated in a surface acoustic wave reflected by the reflector. Because the phase change is hardly affected by a temperature change, the strain of the measurement subject can be measured based on the phase change. Because a resonant frequency of the SAW device is changed by the temperature change, but is not affected by the strain of the measurement subject, a temperature can be measured based on a resonant frequency change.
    Type: Application
    Filed: July 25, 2012
    Publication date: January 31, 2013
    Applicant: DENSO CORPORATION
    Inventors: Hideaki YAMADA, Kazuhiko Kano
  • Patent number: 8330557
    Abstract: A surface acoustic wave device is disclosed. The surface acoustic wave device includes: a substrate having a plane surface; multiple first electrodes formed on the plane surface of the substrate; and multiple second electrodes formed on the plane surface of the substrate. Each of the first and second electrodes has a predetermined closed ring shape. The first and second electrodes are concentric. The second electrodes are located radially inside or radially outside of the first electrodes.
    Type: Grant
    Filed: February 26, 2010
    Date of Patent: December 11, 2012
    Assignee: DENSO CORPORATION
    Inventors: Hideaki Yamada, Kazuhiko Kano
  • Patent number: 8256289
    Abstract: An angular rate sensor comprises a piezoelectric film having a first and a second surfaces forming an x-y plane and utilizes a perturbation mass coherently vibrating elastic acoustic waves on which a Coriolis force acts when the angular rate sensor undergoes a rotary motion about an x-direction. A first elastic acoustic wave is excited in the piezoelectric film by a driving transducer and a second elastic acoustic wave generated by the Coriolis force proportional to an angular rate of the rotary motion of the angular rate sensor itself is detected by the detecting transducer. The angular rate sensor further comprises at least a first electrode disposed on the first surface of the piezoelectric film for discharging a surface charge caused due to piezoelectric effect at the lower surface of the film in which the first elastic acoustic wave is excited.
    Type: Grant
    Filed: October 19, 2010
    Date of Patent: September 4, 2012
    Assignee: DENSO CORPORATION
    Inventors: Kazuhiko Kano, Akihiko Teshigahara, Kazuki Arakawa, Kazushi Asami
  • Patent number: 8253302
    Abstract: A surface acoustic wave element includes a piezoelectric member, a comb-teeth electrode, and a reflector. The comb-teeth electrode is arranged on the piezoelectric member. The reflector is arranged on the piezoelectric member. The reflector reflects a surface acoustic wave transmitted from the comb-teeth electrode. The reflector has a plurality of areas, and each of the areas has a frequency to make a reflection efficiency the largest. At least two of the frequencies of the areas are made different from each other.
    Type: Grant
    Filed: February 2, 2010
    Date of Patent: August 28, 2012
    Assignee: DENSO CORPORATION
    Inventors: Kazuki Arakawa, Kazuhiko Kano, Shingo Jinno
  • Patent number: 8181521
    Abstract: A yaw rate sensor has two sets of exciting electrodes, perturbative weights and two sets of detecting electrodes on a surface of a piezoelectric substrate. The exciting electrodes excite first surface acoustic waves transmitted through the surface of the substrate in a propagation direction. The weights are oscillated by the waves and excite a second surface acoustic wave, transmitted through the surface of the substrate in a detection direction orthogonal to the propagation direction, in response to a yaw applied to the weights. The detecting electrodes measure an intensity of the second surface acoustic wave to detect the yaw rate. The sets of exciting electrodes are symmetrically placed with respect to a driving axis extending straight along the propagation direction. The group of weights is symmetric with respect to the driving axis.
    Type: Grant
    Filed: November 25, 2008
    Date of Patent: May 22, 2012
    Assignee: DENSO CORPORATION
    Inventors: Kazuki Arakawa, Kazuhiko Kano, Akihiko Teshigahara
  • Publication number: 20120107557
    Abstract: A method for manufacturing a piezoelectric thin film including an aluminum nitride thin film containing scandium on a substrate, the method includes: sputtering step for sputtering aluminum and scandium under an atmosphere containing at least a nitrogen gas. In the sputtering step in the method according to the present invention, a scandium content rate falls within the range from 0.5% by atom to 50% by atom when a temperature of the substrate falls within the range from 5° C. to 450° C. during the sputtering step.
    Type: Application
    Filed: June 30, 2010
    Publication date: May 3, 2012
    Applicants: DENSO CORPORATION, NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
    Inventors: Morito Akiyama, Kazuhiko Kano, Akihiko Teshigahara
  • Publication number: 20120000766
    Abstract: A method for manufacturing a scandium aluminum nitride film includes: sputtering a scandium aluminum alloy target under atmosphere including nitrogen gas so that a thin film is deposited on a substrate. Since the scandium aluminum nitride film is manufactured with using one alloy target, a composition of the film is maintained even when the sputtering time is long. Further, the above method is capable of being performed by a mass production sputtering apparatus.
    Type: Application
    Filed: June 29, 2011
    Publication date: January 5, 2012
    Applicant: DENSO CORPORATION
    Inventors: Akihiko Teshigahara, Kazuhiko Kano, Morito Akiyama, Tatsuo Tabaru, Keiko Nishikubo
  • Publication number: 20110285470
    Abstract: In a SAW oscillator, each of a first SAW element and a second SAW element includes interdigital electrodes and a reflector formed on a piezoelectric material. A first oscillating circuit part forms an oscillating loop including the first SAW element. A second oscillating circuit part forms an oscillating loop including the second SAW element. The first and second oscillating circuit parts have an identical admittance property. The first and second SAW elements are configured that an electrode pitch is identical and an admittance property indicating a relation between a frequency and an admittance value is different therebetween. Further, a first intersection point between the admittance property of the first SAW element and the admittance property of the first oscillating circuit part and a second intersection point between the admittance property of the second SAW element and the admittance property of the second oscillating circuit part are at different frequencies.
    Type: Application
    Filed: May 19, 2011
    Publication date: November 24, 2011
    Applicant: DENSO CORPORATION
    Inventors: Kazuki ARAKAWA, Kazuhiko KANO
  • Patent number: 7900512
    Abstract: An angular rate sensor comprises a piezoelectric film having a first and a second surfaces forming an x-y plane and utilizes a perturbation mass coherently vibrating elastic acoustic waves on which a Coriolis force acts when the angular rate sensor undergoes a rotary motion about an x-direction. A first elastic acoustic wave is excited in the piezoelectric film by a driving transducer and a second elastic acoustic wave generated by the Coriolis force proportional to an angular rate of the rotary motion of the angular rate sensor itself is detected by the detecting transducer. The angular rate sensor further comprises at least a first electrode disposed on the first surface of the piezoelectric film for discharging a surface charge caused due to piezoelectric effect at the lower surface of the film in which the first elastic acoustic wave is excited.
    Type: Grant
    Filed: July 24, 2007
    Date of Patent: March 8, 2011
    Assignee: DENSO CORPORATION
    Inventors: Kazuhiko Kano, Akihiko Teshigahara, Kazuki Arakawa, Kazushi Asami
  • Publication number: 20110041604
    Abstract: An angular rate sensor comprises a piezoelectric film having a first and a second surfaces forming an x-y plane and utilizes a perturbation mass coherently vibrating elastic acoustic waves on which a Coriolis force acts when the angular rate sensor undergoes a rotary motion about an x-direction. A first elastic acoustic wave is excited in the piezoelectric film by a driving transducer and a second elastic acoustic wave generated by the Coriolis force proportional to an angular rate of the rotary motion of the angular rate sensor itself is detected by the detecting transducer. The angular rate sensor further comprises at least a first electrode disposed on the first surface of the piezoelectric film for discharging a surface charge caused due to piezoelectric effect at the lower surface of the film in which the first elastic acoustic wave is excited.
    Type: Application
    Filed: October 19, 2010
    Publication date: February 24, 2011
    Applicant: DENSO CORPORATION
    Inventors: Kazuhiko Kano, Akihiko Teshigahara, Kazuki Arakawa, Kazushi Asami
  • Publication number: 20110041605
    Abstract: An angular rate sensor comprises a piezoelectric film having a first and a second surfaces forming an x-y plane and utilizes a perturbation mass coherently vibrating elastic acoustic waves on which a Coriolis force acts when the angular rate sensor undergoes a rotary motion about an x-direction. A first elastic acoustic wave is excited in the piezoelectric film by a driving transducer and a second elastic acoustic wave generated by the Coriolis force proportional to an angular rate of the rotary motion of the angular rate sensor itself is detected by the detecting transducer. The angular rate sensor further comprises at least a first electrode disposed on the first surface of the piezoelectric film for discharging a surface charge caused due to piezoelectric effect at the lower surface of the film in which the first elastic acoustic wave is excited.
    Type: Application
    Filed: October 19, 2010
    Publication date: February 24, 2011
    Applicant: DENSO CORPORATION
    Inventors: Kazuhiko Kano, Akihiko Teshigahara, Kazuki Arakawa, Kazushi Asami
  • Publication number: 20100219910
    Abstract: A surface acoustic wave device is disclosed. The surface acoustic wave device includes: a substrate having a plane surface; multiple first electrodes formed on the plane surface of the substrate; and multiple second electrodes formed on the plane surface of the substrate. Each of the first and second electrodes has a predetermined closed ring shape. The first and second electrodes are concentric. The second electrodes are located radially inside or radially outside of the first electrodes.
    Type: Application
    Filed: February 26, 2010
    Publication date: September 2, 2010
    Applicant: DENSO CORPORATION
    Inventors: Hideaki Yamada, Kazuhiko Kano