Abstract: A joint includes a first block, a second block, and a single pipe section connecting the first block and the second block. The first block, the second block, and the single pipe have a first gas passage and a second gas passage inside therein. The first gas passage is formed so that a first port which opens at an outer surface of the first block, the single pipe section, and a second port which opens at an outer surface of the second block communicate with each other. The second gas passage is formed so that a third port and a fourth port which open at the outer surface of the second block communicate with each other. The second port is disposed between the third port and the fourth port.

Abstract: A fluid control device is provided in which a temperature sensor is firmly fixed and the thermal contact of the temperature sensor with the inner circumferential surface of a leak port is reliably maintained. A fluid control device 3 holding a temperature sensor 7 has the temperature sensor 7 inserted into a leak port LP and a sensor holding member 8 provided directly above the leak port LP and holding the temperature sensor 7 in a state in which the temperature sensor 7 is inserted into the inside of the leak port LP. The sensor holding member 8 is formed of a base body part 81 disposed directly above the leak port LP and a through hole 8a provided on the base body part 81, the temperature sensor 7 being inserted into the through hole 8a, the through hole 8a communicating with the leak port LP. The base body part 81 has a length that fits in the width of the fluid control device 3 in the short-side direction. The through hole 8a of the sensor holding member 8 and the leak port LP form a predetermined angle.

Abstract: A joint includes a first block, a second block, and a single pipe section connecting the first block and the second block. The first block, the second block, and the single pipe have a first gas passage and a second gas passage inside therein. The first gas passage is formed so that a first port which opens at an outer surface of the first block, the single pipe section, and a second port which opens at an outer surface of the second block communicate with each other. The second gas passage is formed so that a third port and a fourth port which open at the outer surface of the second block communicate with each other. The second port is disposed between the third port and the fourth port.

Abstract: Provided is a fluid control apparatus in which a pipe heating member may be mounted or removed with flexibility (i.e., without affecting other components) while one line, composed of the plurality of fluid control devices arranged in series, as a unit may be added or modified readily. The apparatus includes: a plate-shaped support member 5 to which a plurality of passage blocks 22 are detachably mounted; a hollow metal mounting member 6 having an upper surface to which the support member 5 is secured and being detachably mounted to a base member; and a pipe heating member 7 fitted into the mounting member 6. The pipe heating member 7, including a bottom wall 29 and a pair of side walls 30, accommodates a pipe 24 between the side walls 30 and is fitted into the mounting member 6 with the pipe heating member 7 abutting the mounting member 6.

Abstract: Provided is a fluid control apparatus in which a pipe heating member may be mounted or removed with flexibility (i.e., without affecting other components) while one line, composed of the plurality of fluid control devices arranged in series, as a unit may be added or modified readily. The apparatus includes: a plate-shaped support member 5 to which a plurality of passage blocks 22 are detachably mounted; a hollow metal mounting member 6 having an upper surface to which the support member 5 is secured and being detachably mounted to a base member; and a pipe heating member 7 fitted into the mounting member 6. The pipe heating member 7, including a bottom wall 29 and a pair of side walls 30, accommodates a pipe 24 between the side walls 30 and is fitted into the mounting member 6 with the pipe heating member 7 abutting the mounting member 6.