Abstract: The present invention provides a transmission guided-mode resonant grating integrated spectroscopy device (transmission GMRG integrated spectroscopy device) characterized by comprising, disposed in this order on an optical detector array in which a plurality of diodes are mounted on a substrate made of a semiconductor: a transparent spacer layer; a waveguide layer; a transparent buffer layer provided as desired; a transmission metallic grating layer having a thickness causing surface plasmon; and a transparent protection film layer which is provided as desired.

Abstract: A mirror device includes a frame body, a shaft member provided inside the frame body and connected to the frame body at both end portions, and a reflection member fixed to the shaft member and provided so as to be capable of swinging around an axis of the shaft member. The reflection member has a base portion provided along an axial direction of the shaft member and a reflection portion provided on the base portion. The base portion has a three-dimensional uneven structure including a bottom wall portion having a main surface provided along the axial direction of the shaft member and a plurality of side wall portions extending from the bottom wall portion on the side opposite to the reflection portion.

Abstract: A mirror device includes a frame body, a shaft member provided inside the frame body and connected to the frame body, and a reflection member fixed to the shaft member and provided so as to be capable of swinging around an axis of the shaft member. The reflection member has a base portion provided along an axial direction of the shaft member and a reflection portion provided on the base portion. The base portion has a three-dimensional uneven structure including a bottom wall portion having a main surface provided along the axial direction of the shaft member and a plurality of side wall portions extending from the bottom wall portion opposite to the reflection portion.

Abstract: A three-dimensional isotropic metamaterial including an aggregate of SRR-buried block pieces obtained by burying SRRs in a transparent resin cube, at random in a transparent resin member; a method of producing the same; and a terahertz region optical element.

Abstract: A scanning mirror can prevent the oxidation or hydroxylation of a torsion bar, thereby suppressing deterioration of the torsion bar and a manufacturing method for the scanning mirror. A scanning mirror has a torsion bar which is provided so as to support a mirror portion and of which the surface is covered with an ALD layer. The scanning mirror is configured such that the mirror portion can be rotated around an axis that extends along the torsion bar when torsional force is applied to the torsion bar. The scanning mirror is manufactured by forming the mirror portion and the torsion bar and then forming an ALD layer on at least the surface of the torsion bar using an atomic layer deposition method.

Abstract: A mirror device includes a frame body, a shaft member provided inside the frame body and connected to the frame body at both end portions, and a reflection member fixed to the shaft member and provided so as to be capable of swinging around an axis of the shaft member. The reflection member has a base portion provided along an axial direction of the shaft member and a reflection portion provided on the base portion. The base portion has a three-dimensional uneven structure including a bottom wall portion having a main surface provided along the axial direction of the shaft member and a plurality of side wall portions extending from the bottom wall portion on the side opposite to the reflection portion.

Abstract: A mirror device includes a frame body, a shaft member provided inside the frame body and connected to the frame body, and a reflection member fixed to the shaft member and provided so as to be capable of swinging around an axis of the shaft member. The reflection member has a base portion provided along an axial direction of the shaft member and a reflection portion provided on the base portion. The base portion has a three-dimensional uneven structure including a bottom wall portion having a main surface provided along the axial direction of the shaft member and a plurality of side wall portions extending from the bottom wall portion opposite to the reflection portion.

Abstract: A mirror device includes a frame body, a shaft member provided inside the frame body and connected to the frame body, and a reflection member fixed to the shaft member and provided so as to be capable of swinging around an axis of the shaft member. The reflection member has a base portion provided along an axial direction of the shaft member and a reflection portion provided on the base portion. The base portion has a three-dimensional uneven structure including a bottom wall portion having a main surface provided along the axial direction of the shaft member and a plurality of side wall portions extending from the bottom wall portion opposite to the reflection portion.

Abstract: The present invention provides a transmission guided-mode resonant grating integrated spectroscopy device (transmission GMRG integrated spectroscopy device) characterized by comprising, disposed in this order on an optical detector array in which a plurality of diodes are mounted on a substrate made of a semiconductor: a transparent spacer layer; a waveguide layer; a transparent buffer layer provided as desired; a transmission metallic grating layer having a thickness causing surface plasmon; and a transparent protection film layer which is provided as desired.

Abstract: An image display apparatus includes: a light source part generating a plurality of light rays corresponding to respective pixels in an image that changes over time; a projecting part defining an optical path from the light source part to an eye, and forming the image on a retina of the eye by projecting the generated light rays directly on the retina through the optical path; a splitting part splitting a plurality of reflection light rays from positions in a certain site of the eye on the optical path, the positions corresponding to the respective pixels; a detecting part detecting intensities of the reflection light rays that have been split; and a processing part obtaining parameters indicative of conditions of the site at the positions corresponding to the respective pixels, based on intensities of the generated light rays and the intensities of the reflection light rays, for the respective pixels.

Abstract: An image display apparatus includes: a light source part generating a plurality of light rays corresponding to respective pixels in an image that changes over time; a projecting part defining an optical path from the light source part to an eye, and forming the image on a retina of the eye by projecting the generated light rays directly on the retina through the optical path; a splitting part splitting a plurality of reflection light rays from positions in a certain site of the eye on the optical path, the positions corresponding to the respective pixels; a detecting part detecting intensities of the reflection light rays that have been split; and a processing part obtaining parameters indicative of conditions of the site at the positions corresponding to the respective pixels, based on intensities of the generated light rays and the intensities of the reflection light rays, for the respective pixels.

Abstract: The hinge (13) should preferably be formed to have a higher resistance than ever against the pivoting of the mirror body (12) to effectively prevent the hinge (13) from being damaged. By adopting a suitable one of a variety of production steps as necessary, the hinge (13) can be formed more finely and with a higher precision and thus the micro mirror unit can be produced more easily in a shorter time. To this end, the hinge (13) is formed from a different material, such as SiNx, from the mirror substrate material from which the frame (11) and mirror body (12) are formed.

Abstract: A micro-mirror for deflecting an incident light is disclosed, wherein the micro-mirror comprises: a mirror section for reflecting an incident light issued from a laser diode; a hinge section including a fixed section and a movable section each having a flat surface; and a drive section having a bi-morph structure made of two or more of materials having different heat expansion coefficient for deflecting said mirror section to change relative angle to said incident light.

Abstract: A projection linear encoder has an SOQ substrate formed with transmission gratings and grid-like photodiode groups, and a reflecting grating plate with reflecting gratings that are formed facing thereto. A light-blocking film composed of a metal thin film or the like is formed on a surface of a glass substrate of the SOQ substrate, and the transmission gratings are formed by patterning the light-blocking film. The photodiodes are integrally formed by epitaxial growth on the silicon layer of the SOQ substrate. Transmission gratings with high mechanical strength can be formed inexpensively in comparison with cases in which through holes are formed by etching a silicon substrate to manufacture transmission gratings.

Abstract: A micro-mirror for deflecting an incident light is disclosed, wherein the micro-mirror comprises: a mirror section for reflecting an incident light issued from a laser diode; a hinge section including a fixed section and a movable section each having a flat surface; and a drive section having a bi-morph structure made of two or more of materials having different heat expansion coefficient for deflecting said mirror section to change relative angle to said incident light.

Abstract: A micro-mirror for deflecting an incident light is disclosed, wherein the micro-mirror comprises: a mirror section for reflecting an incident light issued from a laser diode; a hinge section including a fixed section and a movable section each having a flat surface; and a drive section having a bi-morph structure made of two or more of materials having different heat expansion coefficient for deflecting said mirror section to change relative angle to said incident light.

Abstract: The hinge (13) should preferably be formed to have a higher resistance than ever against the pivoting of the mirror body (12) to effectively prevent the hinge (13) from being damaged. By adopting a suitable one of a variety of production steps as necessary, the hinge (13) can be formed more finely and with a higher precision and thus the micro mirror unit can be produced more easily in a shorter time. To this end, the hinge (13) is formed from a different material, such as SiNX, from the mirror substrate material from which the frame (11) and mirror body (12) are formed.

Abstract: The hinge (13) should preferably be formed to have a higher resistance than ever against the pivoting of the mirror body (12) to effectively prevent the hinge (13) from being damaged. By adopting a suitable one of a variety of production steps as necessary, the hinge (13) can be formed more finely and with a higher precision and thus the micro mirror unit can be produced more easily in a shorter time. To this end, the hinge (13) is formed from a different material, such as SiNx, from the mirror substrate material from which the frame (11) and mirror body (12) are formed.

Abstract: A projection linear encoder has an SOQ substrate formed with transmission gratings and grid-like photodiode groups, and a reflecting grating plate with reflecting gratings that are formed facing thereto. A light-blocking film composed of a metal thin film or the like is formed on a surface of a glass substrate of the SOQ substrate, and the transmission gratings are formed by patterning the light-blocking film. The photodiodes are integrally formed by epitaxial growth on the silicon layer of the SOQ substrate. Transmission gratings with high mechanical strength can be formed inexpensively in comparison with cases in which through holes are formed by etching a silicon substrate to manufacture transmission gratings.

Abstract: In a projection encoder based on a triple-grating concept, a light-transmitting grating group 3 for detecting A- and B-phase signals, a photodiode group 4 for detecting A- and B-phase signals, and a photodiode group 5 for detecting a home position are formed on a movable grating plate 6 of a projection linear encoder 1; and a reflecting grating group 7 for detecting A- and B-phase signals, and a reflecting grating group 8 for detecting the home position are formed on a reflecting grating plate 9.