Patents by Inventor Kazuhiro Karumo

Kazuhiro Karumo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230221640
    Abstract: The present invention provides an actinic ray-sensitive or radiation-sensitive resin composition having excellent defect suppressing properties, a resist film, a pattern forming method, and a method for manufacturing an electronic device. The actinic ray-sensitive or radiation-sensitive resin composition according to an embodiment of the present invention is an actinic ray-sensitive or radiation-sensitive resin composition including a resin A having a repeating unit a1 having a group represented by any one of General Formula (1), . . . , or (6), which is a nonionic group that decomposes upon irradiation with actinic rays or radiation, and an additive B that is at least any one of an acid having an acid group having a pKa of ?3.60 or more, or a salt having a structure in which a hydrogen atom of an acid group having a pKa of ?3.60 or more is substituted with a cation.
    Type: Application
    Filed: February 24, 2023
    Publication date: July 13, 2023
    Applicant: FUJIFILM Corporation
    Inventors: Tsutomu YOSHIMURA, Akiyoshi Goto, Kyohei Sakita, Kazuhiro Karumo