Abstract: A reflectance measurement part measures the reflectance of a back surface of a semiconductor wafer. An imaging parameter of a camera is adjusted based on the measured reflectance. The imaging parameter includes exposure time and sensitivity of the camera. The camera with the adjusted imaging parameter images the back surface of the semiconductor wafer to determine the presence or absence of a flaw from the obtained image data. The camera is able to perform appropriate imaging in accordance with the reflectance of the back surface of the semiconductor wafer. Thus, a flaw in the back surface of the semiconductor wafer is detected with reliability even if the reflectance of the back surface is varied due to the deposition of a thin film on the back surface.

Abstract: To secure the end part of a metallic filament taken up onto a reel, the take-up reel for metallic filament has a recessed portion (3) provided in the inside surface of a flange (2), the recessed portion (3) extending in the radial direction to the flange outer edge (2a); and a connecting portion (4) that straddles the recessed portion (3). A tabular end retaining member (5) having elasticity is fitted into the recessed portion 3. The base end portion (5b) of the end retaining member (5) is passed under the connecting portion (4) and butted up against the end surface (3a) of the recessed portion (3) on the winding drum side, and a space (A) is provided between the tip end portion (5a) of the end retaining member (5) and the flange outer edge (2a) to allow the end part of the metallic filament (W) to be caught therein. The end retaining member (5) is anchored to the connecting portion (4) through spot welding, using a welding portion (6) set in the vicinity of the base end portion.

Abstract: In a robot hand , at least one finger link thereof is configured to comprise a first member , a second member adhered to a surface of the first member and a third member covering at least the second member and a rigidity of the second member is made smaller than the rigidities of the first member and the third member. With this, the flexibility of the finger is improved by the second member, thereby increasing the contact area between the third member and a held object, so that the object can be securely held.

Abstract: To secure the end part of a metallic filament taken up onto a reel, the take-up reel for metallic filament has a recessed portion (3) provided in the inside surface of a flange (2), the recessed portion (3) extending in the radial direction to the flange outer edge (2a); and a connecting portion (4) that straddles the recessed portion (3). A tabular end retaining member (5) having elasticity is fitted into the recessed portion 3. The base end portion (5b) of the end retaining member (5) is passed under the connecting portion (4) and butted up against the end surface (3a) of the recessed portion (3) on the winding drum side, and a space (A) is provided between the tip end portion (5a) of the end retaining member (5) and the flange outer edge (2a) to allow the end part of the metallic filament (W) to be caught therein. The end retaining member (5) is anchored to the connecting portion (4) through spot welding, using a welding portion (6) set in the vicinity of the base end portion.

Abstract: In a robot hand, at least one finger link thereof is configured to comprise a first member, a second member adhered to a surface of the first member and a third member covering at least the second member and a rigidity of the second member is made smaller than the rigidities of the first member and the third member. With this, the flexibility of the finger is improved by the second member, thereby increasing the contact area between the third member and a held object, so that the object can be securely held.

Abstract: In a movable seat for a vehicle, there are provided a seat body shiftable between inside and outside the vehicle passenger compartment, a seating member attached to the seat body to be movable between a first position where a sitter such as a humanoid biped robot is seated or unseated and a second position where the sitter is maintained seated, such that a location of a center of gravity of the sitter, when seated in the first position, with respect to a position of feet of the sitter is in a predetermined relationship, and a controller controlling an actuator to move the seating member toward one of the first and second positions in response to the inputted instruction, thereby enabling reliable seating, unseating, boarding and alighting, not only of elderly persons and others requiring special care but also of the humanoid robot.

Abstract: In a movable seat for a vehicle, there are provided a seat body shiftable between inside and outside the vehicle passenger compartment, a seating member attached to the seat body to be movable between a first position where a sitter such as a humanoid biped robot is seated or unseated and a second position where the sitter is maintained seated, such that a location of a center of gravity of the sitter, when seated in the first position, with respect to a position of feet of the sitter is in a predetermined relationship, and a controller controlling an actuator to move the seating member toward one of the first and second positions in response to the inputted instruction, thereby enabling reliable seating, unseating, boarding and alighting, not only of elderly persons and others requiring special care but also of the humanoid robot.

Abstract: A mechanical paradox planetary speed reducer has an input shaft, a plurality of plantet gears, a pair of fixed internal sun gears, and a movable internal sun gear. The fixed internal sun gears are spaced from each other in the axial direction of the input shaft, and the movable internal sun gear is disposed between the fixed internal sun gears. The movable internal sun gear has outer flanges on opposite ends thereof and fitted over the ends of the fixed internal sun gears in sliding contact therewith, holding the movable internal sun gear and the fixed internal sun gears in concentric relation to each other.

Abstract: A multifinger hand device has a plurality of finger mechanisms extending from a palm unit. The finger mechanisms include a finger mechanism corresponding to a thumb and other finger mechanisms. Joints of the finger mechanism corresponding to the thumb include a joint closest to the palm unit and having a rotational axis about which the joint is rotatable, the rotational axis extending substantially perpendicularly to the rotational axis of a joint, closest to the palm unit, of one of the other finger mechanisms. The joints, closest to the palm unit, of the other finger mechanisms have respective rotational axes about which the joints are rotatable and which are slightly inclined to each other and extend substantially perpendicularly to a main palm plate of the palm unit. The other finger mechanisms have link mechanisms closest to the palm unit which are fixed to the palm unit with their respective rotational axes being inclined to each other.

Abstract: A multifinger hand device has a plurality of finger mechanisms extending from a palm unit. The finger mechanisms include a finger mechanism corresponding to a thumb and other finger mechanisms. Joints of the finger mechanism corresponding to the thumb include a joint closest to the palm unit and having a rotational axis about which the joint is rotatable, the rotational axis extending substantially perpendicularly to the rotational axis of a joint, closest to the palm unit, of one of the other finger mechanisms. The joints, closest to the palm unit, of the other finger mechanisms have respective rotational axes about which the joints are rotatable and which are slightly inclined to each other and extend substantially perpendicularly to a main palm plate of the palm unit. The other finger mechanisms have link mechanisms closest to the palm unit which are fixed to the palm unit with their respective rotational axes being inclined to each other.

Abstract: A mechanical paradox planetary speed reducer has an input shaft, a plurality of plantet gears, a pair of fixed internal sun gears, and a movable internal sun gear. The fixed internal sun gears are spaced from each other in the axial direction of the input shaft, and the movable internal sun gear is disposed between the fixed internal sun gears. The movable internal sun gear has outer flanges on opposite ends thereof and fitted over the ends of the fixed internal sun gears in sliding contact therewith, holding the movable internal sun gear and the fixed internal sun gears in concentric relation to each other.

Abstract: A system provides service information through a restricted broadcasting using an FM teletext multiplex broadcasting. When providing a reception authorization code that enables each receiver terminal to receive the service information, terminal unique information such as a production number is stored in a user file at the provider's end, such as an FM broadcast station. Further, a processing circuit encodes reception authorization information showing an expiration date of a reception authorization period or contract contents after appending an error detection sign using the terminal unique information, which is notified to the user via mail of the like. Upon input of the notified reception authorization code through an input device, a processing circuit at the receiver terminal's end decodes the reception authorization code using the terminal unique information stored in its memory and corrects an error.

Abstract: In an electric steering actuator comprising an electric motor having a hollow output shaft, a steering shaft passed through the hollow center of the output shaft of the electric motor, and a ball-screw mechanism provided between the output shaft and the steering shaft for converting the rotary movement of the output shaft into a longitudinal movement of the steering shaft. The ball-screw mechanism comprises a threaded section of the steering shaft, and a nut member which threadably engages with the threaded section of the steering shaft via steel balls, and is secured to the output shaft of the electric motor via a serration coupling or the like which achieves an axially free but rotatively fast coupling between the two parts. Thus, the overall axial dimension of the actuator can be reduced, and the step of joining these two parts is significantly simplified in terms of both effort and time while the number of component parts is also reduced.

Abstract: In an electric steering actuator comprising an electric motor having a hollow output shaft, a steering shaft passed through the hollow center of the output shaft of the electric motor, and a ball-screw mechanism provided between the output shaft and the steering shaft for converting the rotary movement of the output shaft into a longitudinal movement of the steering shaft, a rotation preventing mechanism is provided for preventing the rotation of the steering shaft around its axial line. The rotation preventing mechanism comprises a guide pin extending in the casing in parallel with the axial line of the steering shaft, and a fork member engaging the guide pin between two prongs thereof. Because the rotation preventing mechanism can be formed by using a guide pin made of a stock steel or other metallic member, such as a cold finished steel bar, the manufacturing cost can be reduced.

Abstract: Digital data extracted from an FM multiplex broadcasting wave is decoded by an FM multiplex decoder. The decoder FM multiplex data is applied to a CPU. According to a logic of a switch, the CPU selects display of one page or a plurality of pages to read out predetermined data from memory according to the selected result. Display data is produced on the basis of the decoded FM multiplex data and each readout data. The produced display data is provided to a display unit. The display unit selectively displays data of one page or data of a plurality of pages simultaneously on one screen according to the input display data. The data of each page is identified and displayed corresponding to each data using an identifier.

Abstract: A deceleration sensor, comprising a pair of U-shaped pendulums pivotally suspended from upper parts of a casing at their upper ends by way of pivot shafts extending in parallel with each other, one of the pendulums being received by the other in such a manner that they are permitted to pivot around their respective pivot shafts without interfering with each other, a pair of biasing springs for opposing movement of the pendulums against their inertia forces, a firing pin slidably received in the guide bore, a drive spring urging the firing pin toward a fuse which is intended to be activated by the deceleration sensor, a swing arm which is pivotally attached to the sensor casing at its one end and engaged by one of the pendulums at its other end; and a trigger arm which is pivotally attached to a middle part of the swing arm so as to be able to swing in a same plane as the swing arm, and is engaged by the other of the pendulumns at its one end and engages the firing pin against the spring force of the drive spr