Abstract: A fluid control device in which a fluid control valve, an upstream pressure sensor, a fluid resistance element, and a downstream pressure sensor are arranged in this order from an upstream side, includes: an actual flow rate calculation unit that calculates a flow rate on basis of pressures measured by the upstream pressure sensor and the downstream pressure sensor; a delayed flow rate calculation unit that calculates a delayed flow rate by generating a response delay in the calculated flow rate calculated by the actual flow rate calculation unit; and a flow rate output unit that compares an absolute difference between a predetermined reference value and the calculated flow rate and an absolute difference between the reference value and the delayed flow rate, and outputs the calculated flow rate or the delayed flow rate having a smaller absolute difference.

Abstract: In order to prevent unnatural behavior of a calculated flow rate, provided is a fluid control device in which a fluid control valve and upstream and downstream pressure sensors are provided on a flow path. The device includes a calculation unit configured to calculate a flow rate based on measured pressures; and an output unit configured to output the calculated flow rate, and exhibit a zero output function of outputting a zero value regardless of the calculated flow rate when the valve is in a closed state. The device is further configured to switch between execution and stop of the zero output function, and when the valve is in an open state and a difference between the measured pressures of the pressure sensors is larger than a threshold, stop the zero output function and cause the flow rate output unit to output the calculated flow rate.

Abstract: In order to prevent unnatural behavior of a calculated flow rate, provided is a fluid control device in which a fluid control valve and upstream and downstream pressure sensors are provided on a flow path. The device includes a calculation unit configured to calculate a flow rate based on measured pressures; and an output unit configured to output the calculated flow rate, and exhibit a zero output function of outputting a zero value regardless of the calculated flow rate when the valve is in a closed state. The device is further configured to switch between execution and stop of the zero output function, and when the valve is in an open state and a difference between the measured pressures of the pressure sensors is larger than a threshold, stop the zero output function and cause the flow rate output unit to output the calculated flow rate.

Abstract: A substrate processing apparatus includes: a rotary holder configured to hold and rotate a substrate; a cup arranged so as to surround the substrate held by the rotary holder; a coating liquid nozzle configured to inject a coating liquid onto the substrate; a removal liquid nozzle configured to inject, onto the substrate, a removal liquid for removing a film from a peripheral portion of the substrate; a nozzle tracking camera attached to a nozzle arm that holds the coating liquid nozzle so as to track the coating liquid nozzle and configured to capture an image of the coating liquid nozzle; and a processing space camera configured to capture an image of a processing space above the rotary holder.

Abstract: A fluid control device includes a fluid resistance element provided to a channel, an upstream pressure sensor configured to detect an upstream pressure of the fluid resistance element, a downstream pressure sensor configured to detect a downstream pressure of the fluid resistance element, a flow rate calculating unit configured to calculate a flow rate flowing through the channel based on the upstream and downstream pressures, a valve provided upstream of the upstream pressure sensor or downstream of the downstream pressure sensor, and a valve control unit configured to control the valve based on the calculated flow rate. When the valve is fully closed, the flow rate calculating unit is configured to calculate the flow rate by switching a first flow rate calculation formula that is used when the valve is open, to a second flow rate calculation formula that is different from the first flow rate calculation formula.

Abstract: In order to prevent unnatural behavior of a calculated flow rate, provided is a fluid control device in which a fluid control valve and upstream and downstream pressure sensors are provided on a flow path. The device includes a calculation unit configured to calculate a flow rate based on measured pressures; and an output unit configured to output the calculated flow rate, and exhibit a zero output function of outputting a zero value regardless of the calculated flow rate when the valve is in a closed state. The device is further configured to switch between execution and stop of the zero output function, and when the valve is in an open state and a difference between the measured pressures of the pressure sensors is larger than a threshold, stop the zero output function and cause the flow rate output unit to output the calculated flow rate.

Abstract: In order to provide a fluid device that makes it possible for operation command signals other than existing operation command signals to be received without a software modification having to be implemented in an already constructed system, in a fluid device that measures or controls physical quantities of a fluid, there are provided a command signal receiving unit that receives a predetermined plurality of types of operation command signals, and also command signal modes, which are values thereof or time series variations of the values thereof, and a command signal recognition unit that, when the command signal mode of a predetermined operation command signal received by the command signal receiving unit falls outside predetermined conditions that have been set in advance, recognizes the predetermined operation command signal that contains the command signal mode as being a different type of operation command signal.

Abstract: The present invention intends to more accurately diagnose a function of a flow rate sensor regardless of a variation in measurement ambient condition. The present invention includes: a flow rate sensor for measuring the flow rate of fluid; a correction part adapted to measure an output value of the flow rate sensor or a value related to the output value (hereinafter collectively referred to as an “output-related value”), relates the measured output-related value and a corresponding measurement ambient condition to each other, and in accordance with the measurement ambient condition in measurement data, correct the output-related value or a reference value that is predetermined in order to determine whether the output-related value is normal; and a diagnostic part adapted to compare the output-related value and the reference value on the basis of a correction result by the correction part and correct the function of the flow rate sensor.

Abstract: In order to provide a flow rate control apparatus that estimates a flow rate actually flowing at a control point without a large amount of noise, there are provided a fluid resistor that is provided on a flow path, a downstream-side valve that is provided on a downstream side of the fluid resistor, a resistance flow rate measurement mechanism that measures a resistance flow rate that flows through the fluid resistor, and flows into a volumetric space located on the flow path between this fluid resistor and the downstream-side valve, a subject flow rate estimation part that estimates a valve flow rate based on the flow rate characteristics stored in the flow rate characteristics storage part, and a flow rate control unit that controls the downstream-side valve based on a set flow rate, and on the valve flow rate estimated by the subject flow rate estimation part.

Abstract: In order to restrain generation of a peak in the measured flow rate, a fluid control unit measures a flow rate of a fluid in a channel and outputs a signal indicating a valve operation amount of a fluid control valve obtained based on a deviation between a preset flow rate and a measured flow rate and a control coefficient, and the control coefficient for a stable state and the control coefficient for a transitional state are so set to moderate fluctuation of the valve operation amount to the deviation more in the transitional state than in the stable state. At or shortly after a timing when the stable state is switched to the transitional state, a signal is output that indicates an operation amount for a switching time calculated based on each of the operation amounts output at a plurality of timings in the stable state.

Abstract: In order to provide a flow rate control apparatus that estimates a flow rate actually flowing at a control point without a large amount of noise, there are provided a fluid resistor that is provided on a flow path, a downstream-side valve that is provided on a downstream side of the fluid resistor, a resistance flow rate measurement mechanism that measures a resistance flow rate that flows through the fluid resistor, and flows into a volumetric space located on the flow path between this fluid resistor and the downstream-side valve, a subject flow rate estimation part that estimates a valve flow rate based on the flow rate characteristics stored in the flow rate characteristics storage part, and a flow rate control unit that controls the downstream-side valve based on a set flow rate, and on the valve flow rate estimated by the subject flow rate estimation part.

Abstract: In order to provide a fluid device that makes it possible for operation command signals other than existing operation command signals to be received without a software modification having to be implemented in an already constructed system, in a fluid device that measures or controls physical quantities of a fluid, there are provided a command signal receiving unit that receives a predetermined plurality of types of operation command signals, and also command signal modes, which are values thereof or time series variations of the values thereof, and a command signal recognition unit that, when the command signal mode of a predetermined operation command signal received by the command signal receiving unit falls outside predetermined conditions that have been set in advance, recognizes the predetermined operation command signal that contains the command signal mode as being a different type of operation command signal.

Abstract: The present invention intends to more accurately diagnose a function of a flow rate sensor regardless of a variation in measurement ambient condition. The present invention includes: a flow rate sensor for measuring the flow rate of fluid; a correction part adapted to measure an output value of the flow rate sensor or a value related to the output value (hereinafter collectively referred to as an “output-related value”), relates the measured output-related value and a corresponding measurement ambient condition to each other, and in accordance with the measurement ambient condition in measurement data, correct the output-related value or a reference value that is predetermined in order to determine whether the output-related value is normal; and a diagnostic part adapted to compare the output-related value and the reference value on the basis of a correction result by the correction part and correct the function of the flow rate sensor.

Abstract: In order to restrain generation of a peak in the measured flow rate, a fluid control unit measures a flow rate of a fluid in a channel and outputs a signal indicating a valve operation amount of a fluid control valve obtained based on a deviation between a preset flow rate and a measured flow rate and a control coefficient, and the control coefficient for a stable state and the control coefficient for a transitional state are so set to moderate fluctuation of the valve operation amount to the deviation more in the transitional state than in the stable state. At or shortly after a timing when the stable state is switched to the transitional state, a signal is output that indicates an operation amount for a switching time calculated based on each of the operation amounts output at a plurality of timings in the stable state.

Abstract: This invention is to improve procedures of maintenance of a fluid measurement system having a fluid measurement device and a control device. The fluid measurement system has a fluid measurement device and a control device to control the fluid measurement device, and the fluid measurement device comprises a fluid sensor and a related data store part configured to store fluid calculation related data for calculation of one or more fluid parameters with measurement data obtained by the fluid sensor, and the control device obtains the fluid calculation related data from the related data store part and calculates the one or more fluid parameters with the measurement data of the fluid sensor and the fluid calculation related data.

Abstract: An object of the present invention is to provide a pharmaceutical composition containing compound I or a pharmacologically acceptable salt thereof, or a solvate thereof as an active ingredient, which is favorably dissolved in the neutral region. The present invention relates to a pharmaceutical composition containing (A) N1-(5-chloropyridin-2-yl)-N2-((1S,2R,4S)-4-[(dimethylamino)carbonyl]-2-{[(5-methyl-4,5,6,7-tetrahydrothiazolo[5,4-c]pyridin-2-yl)carbonyl]amino}cyclohexyl)ethanediamide or a pharmacologically acceptable salt thereof, or a solvate thereof, and (B) an acid or a salt thereof.

Abstract: A digital content display system includes a content acquisition unit which acquires a plurality of digital content belonging to the category of the received category identification number through a network, and an information transmission unit which transmits summary information of the plurality of acquired digital content and information for causing the software to display the summary information in a predetermined order to the display apparatus, and causes the display apparatus to display detailed information of a selected digital content according to selection information of digital content selected by the user from the summary information of the plurality of digital content

Abstract: An electronic magazine generation system includes an original information division recording unit which records a plurality of sorting information pieces into which each piece of original information for generating a plurality of magazines is divided in the unit of themes, a main page creation unit which controls display sizes of the main image and the related image and font sizes of text information and text string as size information in accordance with a display region of a display apparatus, and creates a main page in which the main image and the text string are arranged on a background image on the basis of controlled correspondence information, and a detailed information page creation unit which creates a detailed information page for displaying a related image of a selected main image and text information having correspondence information with the related image when the main image is selected by the user on the main page.

Abstract: An object of the present invention is to provide a pharmaceutical composition containing compound I or a pharmacologically acceptable salt thereof, or a solvate thereof as an active ingredient, which is favorably dissolved in the neutral region. The present invention relates to a pharmaceutical composition containing (A) N1-(5-chloropyridin-2-yl)-N2-((1S,2R,4S)-4-[(dimethylamino)carbonyl]-2-{[(5-methyl-4,5,6,7-tetrahydrothiazolo[5,4-c]pyridin-2-yl)carbonyl]amino}cyclohexyl)ethanediamide or a pharmacologically acceptable salt thereof, or a solvate thereof, and (B) an acid or a salt thereof.

Abstract: This invention provides a diagnostic mechanism of a differential pressure type mass flow controller comprising a diagnostic parameter calculating section that obtains a mass flow rate integrated value by means of an integrating calculation from the lowering pressure value of an inlet side sensor among the inlet side sensor and an outlet side sensor arranged in communication respectively at the inlet side and the outlet side of a differential pressure generating resistive element that generates a differential pressure between the inlet and the outlet by changing a flow rate control valve arranged on the channel where a fluid flows from a flow rate control state to a closed state, and further obtains a diagnostic volume value from the obtained mass flow rate integrated value, and a comparing section that compares the diagnostic volume value obtained at the diagnostic parameter calculating section with a specified volume value.