Patents by Inventor Kazuhiro Morimasa

Kazuhiro Morimasa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Cylinder for metal organic chemical vapor deposition
    Patent number: 4734999
    Abstract: A cylinder for metal organic chemical vapor deposition is disclosed, characterized in that, in the cylinder for metal organic chemical vapor deposition, wherein a throwing port for organometallic compound and an introducing port for inert gas are provided at the upper portion of cylinder, the inert gas being made to be charged into cylinder through a tube inserted into the cylinder and a distributor fitted at the lower end thereof, and an exhaust port for gas of organometallic compound and inert gas is provided at the upper portion of cylinder, the lower portion of the cylinder is made a narrow-diameter portion of reduced inside diameter compared with the upper portion of cylinder, the inside diameter of this narrow-diameter portion lying within a range from 1.1 times the diameter of distributor to 3/4 of the inside diameter of upper portion of cylinder and the length of this narrow-diameter portion being 1.
    Type: Grant
    Filed: June 25, 1987
    Date of Patent: April 5, 1988
    Assignee: Toyo Stauffer Chemical Co., Ltd.
    Inventors: Masao Fujisawa, Kazuhiro Morimasa