Abstract: According to one embodiment, a generation system generates a production plan. The production plan is for producing products of product types by processes using production lines. The system includes an optimization calculation part, an input plan generator, and a verification part. The optimization calculation part generates a processing plan by an optimization calculation using first input data. The first input data includes a production plan amount of each of the product types and a processing capacity of each equipment. The input plan generator generates an input plan by using second input data. The second input data includes an input amount of workpieces to each of the production lines for each of the product types. The second input data further includes a processing route in the plurality of processes for each of the product types.

Abstract: When a boost converter has an abnormality, a battery-less traveling is executed by shutting off a gate of the boost converter and setting a voltage command VH* of a capacitor (high-voltage-system electric power line) to a predetermined voltage VHset higher than a battery voltage VB. Then, during the execution of the battery-less traveling, when it is determined that a charging current has flowed through a battery or when it is determined that the voltage (high-voltage-system voltage) VH of the capacitor has approached the battery voltage VB, it is determined that an upper arm of the boost converter has been short-circuited.

Abstract: When a boost converter has an abnormality, a battery-less traveling is executed by shutting off a gate of the boost converter and setting a voltage command VH* of a capacitor (high-voltage-system electric power line) to a predetermined voltage VHset higher than a battery voltage VB. Then, during the execution of the battery-less traveling, when it is determined that a charging current has flowed through a battery or when it is determined that the voltage (high-voltage-system voltage) VH of the capacitor has approached the battery voltage VB, it is determined that an upper arm of the boost converter has been short-circuited.

Abstract: Transforming optical images of a portion including a normal conductor pattern having a surface roughness, a portion subjected to an inspection, and a reference portion to images of electric charges and picking up these as electric signals by an image pick-up device, rendering the optical image including the normal conductor pattern having the surface roughness to a pixel signal by the image pick-up device, controlling a light volume of the optical image so that the pixel signal is saturated or immediately before the saturation, picking up a pixel signal of the portion to be inspected under this light volume, obtaining a differential signal from a pixel signal picked up from the reference portion, and judging an existence of defect from the differential signal, so as to detect defects such as a hiatus of conductor, a short circuit, and a deposition of an extraneous matter on a wafer, on which the normal conductor pattern having the roughened surface, with a high accuracy in processes of forming films and etchi

Abstract: Transforming optical images of a portion including a normal conductor pattern having a surface roughness, a portion subjected to an inspection, and a reference portion to images of electric charges and picking up these as electric signals by an image pick-up device, rendering the optical image including the normal conductor pattern having the surface roughness to a pixel signal by the image pick-up device, controlling a light volume of the optical image so that the pixel signal is saturated or immediately before the saturation, picking up a pixel signal of the portion to be inspected under this light volume, obtaining a differential signal from a pixel signal picked up from the reference portion, and judging an existence of defect from the differential signal, so as to detect defects such as a hiatus of conductor, a short circuit, and a deposition of an extraneous matter on a wafer, on which the normal conductor pattern having the roughened surface, with a high accuracy in processes of forming films and etchi

Abstract: A distributor rotor electrode comprising an electrode head having a pair of flat surfaces substantially parallel to a plane of rotation of the rotor electrode and a generally arcuated, convexed discharge surface perpendicular to the plane of rotation to define a discharge gap on it. The electrode head has an electrically high-resistance layer attached to at least the pair of substantially flat surfaces, and comprises a material including a ceramic effective to suppress noise electromagnetic wave radiation at the discharge surface. The high-resistance layer material may comprise 10% to 70% of SiC and a mixture of SiOx, Si and C and may be attached to the discharge surface as well as to the flat surfaces, or to the flat surfaces only to expose the arcuated discharge surface to the discharge gap. The arcuated discharge surface may have ridges and grooves extending generally perpendicularly to the plane of rotation, and may have a wave-shaped or comb-shaped contour.

Abstract: A thin film vacuum evaporation device having a reaction gas supplier for locally supplying a reaction gas to the evaporating point on a target. The device includes a reaction chamber that can be kept under vacuum with a light transmitting window disposed therein allowing the passage of a laser beam on the target. Also, a differential pressure chamber may be provided between the target and the light transmitting window, and a gas introducing section may be connected to the differential pressure chamber. Thus, the vapor generated by the target is prevented from adhering to the light transmitting window, and the light transmitting window can be kept clean.

Abstract: A laser vapor deposition apparatus includes a vacuum chamber which includes an exhaust port and in which a material to be vaporized and a substrate are enclosed, a laser beam source for irradiating the material to be vaporized with a laser beam so as to deposit from the material a desired compound onto the substrate, and a gas supply source which supplies to the surface of the material, a gas that can prevent changes in property of the material which could be caused by the laser beam irradiation.