Patents by Inventor Kazuhiro Takabe

Kazuhiro Takabe has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Probe apparatus and method for measuring electrical characteristics of chips and storage medium therefor
    Patent number: 7719297
    Abstract: A probe apparatus for sequentially testing electrical characteristics of chips includes an imaging unit for capturing images of the electrode pads of the inspection substrate, and a unit for calculating contact positions at which the probes are expected to contact with the electrode pads. The probe apparatus further includes a storage unit for storing correction data in which reference points on a reference substrate are associated with correction amounts corresponding to differences between actual and calculated contact positions of the reference points, and a unit for obtaining actual contact positions for the electrode pads by measuring relative positions of the electrode pads with respect to the reference points and correcting the calculated contact positions of the electrode pads based on the relative positions and the correction data.
    Type: Grant
    Filed: March 28, 2008
    Date of Patent: May 18, 2010
    Assignee: Tokyo Electron Limited
    Inventors: Kazuhiro Takabe, Masaru Suzuki
  • PROBE APPARATUS, PROBING METHOD AND STORAGE MEDIUM
    Publication number: 20080238463
    Abstract: A probe apparatus for sequentially testing electrical characteristics of chips includes an imaging unit for capturing images of the electrode pads of the inspection substrate, and a unit for calculating contact positions at which the probes are expected to contact with the electrode pads. The probe apparatus further includes a storage unit for storing correction data in which reference points on a reference substrate are associated with correction amounts corresponding to differences between actual and calculated contact positions of the reference points, and a unit for obtaining actual contact positions for the electrode pads by measuring relative positions of the electrode pads with respect to the reference points and correcting the calculated contact positions of the electrode pads based on the relative positions and the correction data.
    Type: Application
    Filed: March 28, 2008
    Publication date: October 2, 2008
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Kazuhiro TAKABE, Masaru Suzuki