Abstract: Provided is a substrate grinding device including: a work table rotatable with the work table sucking and holding a substrate; a cup wheel-type first grinding wheel configured to grind the rotating substrate while rotating, the substrate being held by the work table; and a cup wheel-type second grinding wheel configured to grind the substrate along with grinding by the first grinding wheel while rotating in a close vicinity of the substrate.

Abstract: A conveyance device for accumulating and aligning a plurality of articles and conveying a batch of the articles includes a conveyance unit, first, second and third support members, and a drive unit. The conveyance unit is configured to convey the batch of the articles in a conveying direction. The first and second support members are configured to move along the conveyance unit so as to support an article disposed at a front end or a back end among the articles constituting the batch of the articles. The third support member is arranged on the conveyance unit and configured to move with respect to the conveyance unit so as to sandwich the batch of the articles between the third support member and at least one of the first support member and the second support member. The drive unit is configured to independently drive the first, second and third support members.

Abstract: A conveyance device for accumulating and aligning a plurality of articles and conveying a batch of the articles includes a conveyance unit, first, second and third support members, and a drive unit. The conveyance unit is configured to convey the batch of the articles in a conveying direction. The first and second support members are configured to move along the conveyance unit so as to support an article disposed at a front end or a back end among the articles constituting the batch of the articles. The third support member is arranged on the conveyance unit and configured to move with respect to the conveyance unit so as to sandwich the batch of the articles between the third support member and at least one of the first support member and the second support member. The drive unit is configured to independently drive the first, second and third support members.

Abstract: An accumulation device is adapted to accumulate a plurality of products according to at least one prescribed accumulation pattern. The accumulation device includes a receiving unit, a first accumulation processing unit, a second accumulation processing unit and a discharge unit. The first accumulation processing unit is configured and arranged to perform a first accumulation processing to a first group of the products received in the receiving unit. The second accumulation processing unit is disposed parallel to the first accumulation processing unit with respect to the receiving unit, and configured and arranged to perform a second accumulation processing to a second group of the products received in the receiving unit. The second accumulation processing is different from the first accumulation processing. The discharge unit is configured and arranged to transfer the products processed in the first and second accumulation processing units toward a downstream portion.

Abstract: An accumulation device is adapted to accumulate a plurality of products according to at least one prescribed accumulation pattern. The accumulation device includes a receiving unit, a first accumulation processing unit, a second accumulation processing unit and a discharge unit. The first accumulation processing unit is configured and arranged to perform a first accumulation processing to a first group of the products received in the receiving unit. The second accumulation processing unit is disposed parallel to the first accumulation processing unit with respect to the receiving unit, and configured and arranged to perform a second accumulation processing to a second group of the products received in the receiving unit. The second accumulation processing is different from the first accumulation processing. The discharge unit is configured and arranged to transfer the products processed in the first and second accumulation processing units toward a downstream portion.

Abstract: A seal inspecting machine for inspecting bagged products to determine the presence or absence of a seal abnormality in each bagged product being transported by a transport conveyor 2 includes a presser unit 3 and a servo motor 32 for driving the presser unit 3 to sandwich the bagged product G between the presser unit 3 transport conveyor 2. The servo motor 32 itself has a capability of detecting a reactive force acting on the presser unit 3 or a displacement of the presser unit 3 that occurs as a result of contact with the bagged product, where any failure of the bagged product to exert a sufficient reactive force or displacement resistance is considered evidence of a seal abnormality being present in such bagged product. With this seal inspecting machine, seal check of the bagged products can be efficiently and inexpensively carried out.

Abstract: A case packer has an inspection unit, a packing unit and a sorting unit. The inspection unit is disposed on the upstream side of a path of transportation for transporting packaged products and inspects conditions of the products being transported on the path and thereby distinguishes defective products from normal products. The packing unit is disposed on the downstream side and packs a container simultaneously with products delivered to it in a plurality of rows. The sorting unit is disposed between the inspection unit and the packing unit and discharges the defective products away from the normal path of transportation but arranges the normal products in the plurality of rows. The sorting unit uses quasi-circular members with a straight edge. They are rotatable in a plane perpendicular to the path in both directions from a retracted position at which they do not protrude into the transportation path of the products and serve to discharge each of defective products by rotating in one direction.

Abstract: A pattern position measuring method of measuring two-dimensional positions of a hyperfine pattern formed on the surface of a substrate.

Abstract: A pattern position measuring method measures two-dimensional positions of a hyperfine pattern formed on the surface of a substrate.

Abstract: An apparatus for measuring the thickness of a plate-shaped article with a substantially rectangular lateral face, comprises a measuring optical system including a light-emitting unit for emitting a measuring light beam along an optical axis in a predetermined plane, and a light-receiving unit provided on said optical axis and adapted to generate an output signal corresponding to the amount of detected measuring light, support system for supporting the article in such a manner that the article is substantially parallel to the predetermined plane and the measuring light enters obliquely the lateral face of the article, relative movement unit for moving, in a direction crossing said predetermined plane, either of said article and the measuring light relative to the other, and determination unit for determining the thickness of the article, based on the output signal of the measuring optical system and the amount of movement by the relative movement unit.