Patents by Inventor Kazuhiro Ueda

Kazuhiro Ueda has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7751527
    Abstract: Provided is a thin film stack inspection method capable of accurately measuring and inspecting layer thicknesses of thin film stacks. An X-ray having a long coherence length is used as an incident X-ray and the X-ray specular-reflected from a sample placed on a goniometer is partially bent by a prism. The X-ray bent by the prism and the X-ray going straight are made to interfere with each other to obtain interference patterns. Though being thin film stacks, the sample has a portion having no thin film and thus an exposed substrate. The X-ray not bent by the prism includes an X-ray specular-reflected from the exposed substrate. By changing the incident angle from 0.01° to 1°, the interference patterns of the specular-reflected X-ray are measured. Thus, layer thicknesses are measured using a change in a phase of the X-ray reflected from a film stack interface.
    Type: Grant
    Filed: November 13, 2008
    Date of Patent: July 6, 2010
    Assignee: Hitachi, Ltd.
    Inventors: Kazuhiro Ueda, Akio Yoneyama
  • Patent number: 7724872
    Abstract: An X-ray reflectivity measuring method is provided to measure and inspect, with higher accuracy, film thickness of a thin film stack as a sample where a thick film is provided on the thin film stack. This X-ray reflectivity measuring method can measure X-ray reflectivity of the thin film stack embedded within a thick film by applying the X-ray focused to ? or less the thickness of a thick film on the thin film stack to an end surface of the thick film, transmitting the X-ray through the thick film, thereafter applying the X-ray to the thin film stack, transmitting again the reflected X-ray to the thick film, and then extracting the reflection X-ray from the end surface in the opposite side of the incident surface and also can inspect film thickness of the thin film stack embedded in the thick film with the Fourier transformation method and the minimum square analysis method with the theoretical curve.
    Type: Grant
    Filed: February 14, 2008
    Date of Patent: May 25, 2010
    Assignee: Hitachi, Ltd.
    Inventor: Kazuhiro Ueda
  • Publication number: 20100062702
    Abstract: Provided is a defroster nozzle 4 which blows out air to an inner surface of a windshield 2 of a vehicle 1. The defroster nozzle 4 includes center-duct 45 forming member 41 and two end-portion-duct forming members 50. The center-duct 45 forming member 41 forms a center duct through which the air circulates, and has a center ventilation outlet 47 through which the air in the center duct is blown out to the inner surface of the windshield 2. The two end-portion-duct 54 forming members 50 are coupled respectively to two joint end portions 42, on outer sides in the vehicle width direction, of the center-duct forming member 41. Each end-portion-duct forming member 50 forms an end-portion duct which communicates with the center duct, and each end-portion-duct forming member 50 has an end-portion ventilation outlet 55 through which the air in the end-portion duct is blown out to the inner surface of the windshield 2.
    Type: Application
    Filed: February 21, 2008
    Publication date: March 11, 2010
    Inventors: Kazuhiro Ueda, Tadahiro Matsumoto, Takehiko Iwamura
  • Publication number: 20090180588
    Abstract: Provided is a thin film stack inspection method capable of accurately measuring and inspecting layer thicknesses of thin film stacks. An X-ray having a long coherence length is used as an incident X-ray and the X-ray specular-reflected from a sample placed on a goniometer is partially bent by a prism. The X-ray bent by the prism and the X-ray going straight are made to interfere with each other to obtain interference patterns. Though being thin film stacks, the sample has a portion having no thin film and thus an exposed substrate. The X-ray not bent by the prism includes an X-ray specular-reflected from the exposed substrate. By changing the incident angle from 0.01° to 1°, the interference patterns of the specular-reflected X-ray are measured. Thus, layer thicknesses are measured using a change in a phase of the X-ray reflected from a film stack interface.
    Type: Application
    Filed: November 13, 2008
    Publication date: July 16, 2009
    Inventors: Kazuhiro Ueda, Akio Yoneyama
  • Patent number: 7501853
    Abstract: A semiconductor device includes a resistive element having a resistance characteristic not influenced by fluctuations in power supply voltage and a signal output circuit having a desired output impedance characteristic not influenced by fluctuations in power supply voltage. A constant current based on a reference voltage corresponding to a ground potential point is generated, and passed to a first resistive element whose one end is connected to a power supply voltage terminal. A voltage generated by the first resistive element is supplied to a first differential amplifier, whose output voltage is supplied to the gate of a first MOSFET whose source is connected to the power supply voltage terminal. A drain voltage to the first MOSFET is fed back to the first differential amplifier. A first current source is between the drain of the first MOSFET and the ground potential point. A second MOSFET is used as a resistive element.
    Type: Grant
    Filed: March 26, 2007
    Date of Patent: March 10, 2009
    Assignee: Renesas Technology Corp.
    Inventor: Kazuhiro Ueda
  • Publication number: 20090044504
    Abstract: An ozone-decomposing agent including a first iron compound and a second iron compound is provided. The second iron compound may have a spinel type structure. The first iron compound of the ozone-decomposing agent may include an oxide selected from Fe2O3, FeO(OH) or Fe(OH)3. The second iron compound of the ozone-decomposing agent may include an oxide selected from MnFe2O4, ZnFe2O4, NiFe2O4, CuFe2O4 or CoFe2O4.
    Type: Application
    Filed: April 25, 2006
    Publication date: February 19, 2009
    Applicant: Toyo Doseki Kabushiki Kaisha
    Inventor: Kazuhiro Ueda
  • Publication number: 20090032693
    Abstract: The present invention aims to provide an axis alignment method, astigmatism correction method and SEM for implementing these methods, which can prevent an alignment or correction error attributable to conditions of a specimen. A first aspect is to obtain the difference between the optimal values acquired from an automatic axis alignment result on a standard sample and from each of automatic axis alignment results on a observation target sample, and to correct an optimal value adjusted using the standard sample by use of the difference thus obtained. A second aspect is to acquire an optimal stigmator value (astigmatism correction signal) by using the standard sample, to store the optimal stigmator value as a default value, to add the optimal stigmator value and the default value depending on the height of an observation target sample pattern, and to perform an astigmatism correction on the basis of the resultant stigmator value.
    Type: Application
    Filed: July 30, 2008
    Publication date: February 5, 2009
    Applicant: Hitachi High-Technologies Corporation
    Inventors: Junichi Kakuta, Kazuhiro Ueda, Tatsuya Maeda, Hiroyuki Saito, Katsuhiro Sasada
  • Patent number: 7451843
    Abstract: Engine noise of a construction machine is effectively reduced without reducing cooling performance and with an increase in the height of a body cover kept minimum. To achieve the above, an air-intake opening portion (10) and an air discharge opening portion (11) are arranged in a body cover (8) of an upper rotating body (1), and a cooling fan (5) in an engine room covered by the body cover (8) is driven, taking cooling air in from the air-intake opening portion (10) to cool a heat exchanger (7) in the body cover (8) and discharging the air from the air discharge opening portion (11). The air-intake opening portion (10) is laterally offset from a position facing to a ventilation surface of the heat exchanger (7). Alternatively, plural air-intake opening portions are located in a scattered manner such that the plural air-intake opening portions include the offset air-intake opening portion offset from the ventilation surface of the heat exchanger (7).
    Type: Grant
    Filed: June 15, 2004
    Date of Patent: November 18, 2008
    Assignee: Kobelco Construction Machinery Co., Ltd.
    Inventors: Hajime Nakashima, Kazuhiro Ueda, Yasumasa Kimura, Hideo Utsuno, Toshiyuki Kobayashi
  • Publication number: 20080219409
    Abstract: An X-ray reflectivity measuring method is provided to measure and inspect, with higher accuracy, film thickness of a thin film stack as a sample where a thick film is provided on the thin film stack. This X-ray reflectivity measuring method can measure X-ray reflectivity of the thin film stack embedded within a thick film by applying the X-ray focused to ? or less the thickness of a thick film on the thin film stack to an end surface of the thick film, transmitting the X-ray through the thick film, thereafter applying the X-ray to the thin film stack, transmitting again the reflected X-ray to the thick film, and then extracting the reflection X-ray from the end surface in the opposite side of the incident surface and also can inspect film thickness of the thin film stack embedded in the thick film with the Fourier transformation method and the minimum square analysis method with the theoretical curve.
    Type: Application
    Filed: February 14, 2008
    Publication date: September 11, 2008
    Inventor: Kazuhiro Ueda
  • Publication number: 20080217532
    Abstract: A method and apparatus for setting a sample observation condition and a method and apparatus for sample observation which allow sample observation by speedily and simply finding an optimum condition while suppressing damage to the sample are provided. The setting of a sample observation condition according to the present invention is realized by an electron beam apparatus acquiring a profile at a predetermined evaluation location of a sample under a reference observation condition, by a processing section judging whether or not the above described acquired profile is located within a predetermined setting range and setting an optimum observation condition to be used for sample observation based on this judgment result.
    Type: Application
    Filed: March 6, 2008
    Publication date: September 11, 2008
    Inventors: Kazuhiro Ueda, Tatsuya Maeda
  • Publication number: 20080109755
    Abstract: A scanning electron microscope which efficiently makes measurements for plural measurement items at a time and allows easy entry, confirmation and revision of auto measurement parameters. Parameters for creation of a line profile from an image captured by the scanning electron microscope are entered as auto measurement parameters (AMP) to be used as common conditions for all measurement items. Also, plural combinations of edge detection methods and measurement calculation methods are entered as auto measurement parameters to make measurements for plural items.
    Type: Application
    Filed: December 10, 2007
    Publication date: May 8, 2008
    Inventors: Yuuki Ojima, Katsuhiro Sasada, Kazuhiro Ueda, Tsuyoshi Morimoto
  • Patent number: 7364607
    Abstract: A wrought fiber sheet or air cleaning filter unit that exhibits high performance and is biodegradable so as to enable reducing load upon environment. The wrought fiber sheet is produced by coupling biodegradable fiber sheets having electret properties by means of a configuration reinforcing member of a biodegradable material. Further, the frame for accommodating the wrought fiber sheet is also constituted of a biodegradable member so as to obtain an air cleaning filter unit that exerts biodegradability as a whole.
    Type: Grant
    Filed: May 19, 2003
    Date of Patent: April 29, 2008
    Assignee: Toyo Boseki Kabushiki Kaisha
    Inventors: Kazuhiro Ueda, Toyota Seki
  • Publication number: 20070273407
    Abstract: The present invention provides a semiconductor device including a resistive element having a resistance characteristic which is not influenced by fluctuations in power supply voltage and a signal output circuit having a desired output impedance characteristic without being influenced by fluctuations in power supply voltage. A constant current based on a reference voltage corresponding to a ground potential point of a circuit is generated. The constant current is passed to a first resistive element whose one end is connected to a power supply voltage terminal. A voltage generated by the first resistive element is supplied to a first differential amplifier, and the output voltage is supplied to the gate of a first MOSFET of a first conduction type whose source is connected to the power supply voltage terminal. A drain voltage to the first MOSFET is fed back to the other input terminal of the first differential amplifier.
    Type: Application
    Filed: March 26, 2007
    Publication date: November 29, 2007
    Inventor: Kazuhiro Ueda
  • Publication number: 20070206333
    Abstract: Embodiments in accordance with the present invention reduce the influence of etching damage at junction edge of a magnetoresistive film in the sensor height direction, lower the deterioration of dielectric breakdown voltage between an upper magnetic shield layer and a lower magnetic shield layer and instability of reproducing property resulting from shield process, and maintain electrostatic capacity to a small value in a CPP magnetoresistive head. In an embodiment of a magnetoresistive head of the present invention, length in the sensor height direction of bottom surface of a pinning layer is longer than the length in the sensor height direction of bottom surface of a first ferromagnetic layer.
    Type: Application
    Filed: February 13, 2007
    Publication date: September 6, 2007
    Applicant: Hitachi Global Storage Technologies Netherlands B.V.
    Inventors: Katsuro Watanabe, Taku Shintani, Kazuhiro Ueda, Masahiro Osugi
  • Patent number: 7134518
    Abstract: In a construction machine comprising an engine, hydraulic device, and heat exchanger for cooling the engine and the hydraulic device, which are all disposed in an upper rotating body of the construction machine, there is formed a maintenance passage along which maintenance portions of the engine and the hydraulic device are disposed so as to cross the upper rotating body. Exhaust air from cooling fans for sending air to the heat exchanger is discharged to the exterior of the machine body through the passage. Thus, the passage is utilized as an exhaust air passage for the heat exchanger, whereby it is possible to provide a construction machine improved in cooling efficiency for the heat exchanger.
    Type: Grant
    Filed: February 2, 2004
    Date of Patent: November 14, 2006
    Assignee: Kobelco Construction Machinery Co., Ltd.
    Inventors: Seigo Arai, Takashi Tsukiana, Koichi Yamashita, Kazuhiro Ueda, Hiroaki Iwamitsu
  • Patent number: 7131422
    Abstract: A construction machine includes an engine guard, an engine, a cooling fan, and a device for being cooled by the cooling fan, and an exhaust duct. The engine guard accommodates the engine and has intake and exhaust openings. The intake opening and the exhaust opening are disposed in different side covers. The side covers correspond to the left and right side walls of the engine guard. The engine, the cooling fan, and the device are accommodated in the engine guard. The exhaust duct is disposed above and behind the engine, parallel with the flow of a fan air which has been used for cooling the engine, and substantially horizontally. The exhaust duct has an exit connected to the exhaust opening. The fan air introduced from the intake opening flows substantially linearly along the cooling fan, the engine, and the exhaust duct and is discharged from the exhaust opening.
    Type: Grant
    Filed: February 28, 2005
    Date of Patent: November 7, 2006
    Assignee: Kobelco Construction Machinery Co., Ltd.
    Inventors: Yasumasa Kimura, Hajime Nakashima, Kazuhiro Ueda
  • Publication number: 20060219917
    Abstract: A scanning electron microscope which efficiently makes measurements for plural measurement items at a time and allows easy entry, confirmation and revision of auto measurement parameters. Parameters for creation of a line profile from an image captured by the scanning electron microscope are entered as auto measurement parameters (AMP) to be used as common conditions for all measurement items. Also, plural combinations of edge detection methods and measurement calculation methods are entered as auto measurement parameters to make measurements for plural items.
    Type: Application
    Filed: April 6, 2006
    Publication date: October 5, 2006
    Inventors: Yuuki Ojima, Katsuhiro Sasada, Kazuhiro Ueda, Tsuyoshi Morimoto
  • Publication number: 20060144350
    Abstract: Engine noise of a construction machine is effectively reduced without reducing cooling performance and with an increase in the height of a body cover kept minimum. To achieve the above, an air-intake opening portion (10) and an air discharge opening portion (11) are arranged in a body cover (8) of an upper rotating body (1), and a cooling fan (5) in an engine room covered by the body cover (8) is driven, taking cooling air in from the air-intake opening portion (10) to cool a heat exchanger (7) in the body cover (8) and discharging the air from the air discharge opening portion (11). The air-intake opening portion (10) is laterally offset from a position facing to a ventilation surface of the heat exchanger (7). Alternatively, plural air-intake opening portions are located in a scattered manner such that the plural air-intake opening portions include the offset air-intake opening portion offset from the ventilation surface of the heat exchanger (7).
    Type: Application
    Filed: June 15, 2004
    Publication date: July 6, 2006
    Applicant: Kobelco Construction Machinery Co., LTD.
    Inventors: Hajime Nakashima, Kazuhiro Ueda, Yasumasa Kimura, Hideo Utsuno, Toshiyuki Kobayashi
  • Patent number: 7053371
    Abstract: A scanning electron microscope which efficiently makes measurements for plural measurement items at a time and allows easy entry, confirmation and revision of auto measurement parameters. Parameters for creation of a line profile from an image captured by the scanning electron microscope are entered as auto measurement parameters (AMP) to be used as common conditions for all measurement items. Also, plural combinations of edge detection methods and measurement calculation methods are entered as auto measurement parameters to make measurements for plural items.
    Type: Grant
    Filed: February 18, 2004
    Date of Patent: May 30, 2006
    Assignees: Hitachi High-Technologies Corporation, Hitachi Science Systems, Ltd.
    Inventors: Yuuki Ojima, Katsuhiro Sasada, Kazuhiro Ueda, Tsuyoshi Morimoto
  • Patent number: 6998943
    Abstract: A second strip conductor is located, in a lamination direction of a multilayer substrate, at a is different position from that of a first strip conductor. A first grounding conductor and a second grounding conductor are disposed sequentially in the lamination direction of the multilayer substrate and sandwich the first strip conductor and the second strip conductor. The first grounding conductor includes a first grounding conductor portion for a wiring prohibited area in which no wiring may be placed, and a second grounding conductor portion for an area other than the wiring prohibited area. The second grounding conductor portion is positioned, in the lamination direction of the multilayer substrate, at a location is different from that of the first grounding conductor portion.
    Type: Grant
    Filed: January 14, 2004
    Date of Patent: February 14, 2006
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventors: Akira Ohta, Akira Inoue, Kazuhiro Ueda