Patents by Inventor Kazuhiro Yonekura

Kazuhiro Yonekura has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate support device
    Patent number: 10276410
    Abstract: A substrate support device formed of a metal and having a high withstand voltage and a high thermal resistance is provided. A substrate support device according to the present invention includes a plate section formed of a metal; a shaft section connected to the plate section and formed of a metal; a heating element provided in the plate section; and an insulating film formed on a first surface of the plate section, the first surface opposite to the shaft section, by ceramic thermal spraying. The substrate support device may further include an insulating film formed on a second surface of the plate section which intersects the first surface of the plate section approximately perpendicularly.
    Type: Grant
    Filed: November 2, 2012
    Date of Patent: April 30, 2019
    Assignee: NHK SPRING CO., LTD.
    Inventors: Toshihiro Tachikawa, Junichi Miyahara, Kazuhiro Yonekura, Toshihiko Hanamachi, Go Takahara, Jun Futakuchiya, Daisuke Hashimoto