Patents by Inventor Kazuhiro Zama
Kazuhiro Zama has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11159718Abstract: An imaging method includes irradiating an object, from an irradiator, with mixed light of light in a first wavelength band and light in a second wavelength band having an intensity higher than an intensity of the first wavelength band, the first wavelength band being a wavelength band correlating with a first filter having a first transmission wavelength characteristic, and the second wavelength band being a wavelength band correlating with a second filter having a second transmission wavelength characteristic different from the first transmission wavelength characteristic; imaging the object irradiated with the mixed light by using the imaging element; and generating composite image data by high dynamic range synthesis of first layer image data and second layer image data, among image data of the object output by the imaging element.Type: GrantFiled: April 17, 2020Date of Patent: October 26, 2021Assignee: TOYOTA JIDOSHA KABUSHIKI KAISHAInventors: Kazuhiro Zama, Taisuke Nomiyama
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Publication number: 20200244876Abstract: An imaging method includes irradiating an object, from an irradiator, with mixed light of light in a first wavelength band and light in a second wavelength band having an intensity higher than an intensity of the first wavelength band, the first wavelength band being a wavelength band correlating with a first filter having a first transmission wavelength characteristic, and the second wavelength band being a wavelength band correlating with a second filter having a second transmission wavelength characteristic different from the first transmission wavelength characteristic; imaging the object irradiated with the mixed light by using the imaging element; and generating composite image data by high dynamic range synthesis of first layer image data and second layer image data, among image data of the object output by the imaging element.Type: ApplicationFiled: April 17, 2020Publication date: July 30, 2020Applicant: TOYOTA JIDOSHA KABUSHIKI KAISHAInventors: Kazuhiro ZAMA, Taisuke NOMIYAMA
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Patent number: 10674073Abstract: An imaging method includes irradiating an object, from an irradiator, with mixed light of light in a first wavelength band and light in a second wavelength band having an intensity higher than an intensity of the first wavelength band, the first wavelength band being a wavelength band correlating with a first filter having a first transmission wavelength characteristic, and the second wavelength band being a wavelength band correlating with a second filter having a second transmission wavelength characteristic different from the first transmission wavelength characteristic; imaging the object irradiated with the mixed light by using the imaging element; and generating composite image data by high dynamic range synthesis of first layer image data and second layer image data, among image data of the object output by the imaging element.Type: GrantFiled: October 18, 2018Date of Patent: June 2, 2020Assignee: TOYOTA JIDOSHA KABUSHIKI KAISHAInventors: Kazuhiro Zama, Taisuke Nomiyama
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Publication number: 20190124259Abstract: An imaging method includes irradiating an object, from an irradiator, with mixed light of light in a first wavelength band and light in a second wavelength band having an intensity higher than an intensity of the first wavelength band, the first wavelength band being a wavelength band correlating with a first filter having a first transmission wavelength characteristic, and the second wavelength band being a wavelength band correlating with a second filter having a second transmission wavelength characteristic different from the first transmission wavelength characteristic; imaging the object irradiated with the mixed light by using the imaging element; and generating composite image data by high dynamic range synthesis of first layer image data and second layer image data, among image data of the object output by the imaging element.Type: ApplicationFiled: October 18, 2018Publication date: April 25, 2019Applicant: TOYOTA JIDOSHA KABUSHIKI KAISHAInventors: Kazuhiro ZAMA, Taisuke NOMIYAMA
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Patent number: 8686383Abstract: In order to enable high accuracy positioning and strong pressing of a substrate, the present invention provides a substrate holding apparatus including: a rotating bed having an inclined surface supporting a lower side of an outer circumferential side surface of the substrate, which bed rotates on a normal line of the substrate as the rotation axis together with the substrate; a position restriction unit rotating together with the rotating bed and restricting the substrate in a predetermined position on the rotating bed by pressing a plurality of points on the circumference on an upper side of the outer circumferential side surface of the substrate prior to the rotation; and a pressing unit rotating together with the rotating bed and pressing the substrate against the inclined surface by pressing a plurality of points on the upper side of the outer circumferential side surface of the substrate during the rotation.Type: GrantFiled: April 24, 2012Date of Patent: April 1, 2014Assignee: Hitachi High-Technologies CorporationInventors: Kazuhiro Zama, Koichi Asami, Yusuke Miyazaki
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Patent number: 8537351Abstract: An object mounting mechanism includes: a plate member on which an object is mounted. Bumps are arranged on an upper surface of the plate member which faces a reverse face of the object. In addition, the bumps are arranged sparsely in an area of a surrounding part of the plate member and densely toward an area of a center part of the plate member.Type: GrantFiled: May 16, 2012Date of Patent: September 17, 2013Assignee: Hitachi-High Technologies CorporationInventors: Masami Ooyama, Kazuhiro Zama, Keiichi Nagasaki, Rieko Hachiya, Kimiko Hachiya
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Patent number: 8472016Abstract: A laser beam oscillated from a laser source is folded in its path by first and second plane mirrors and enters a beam expander. The surface of each plane mirror is deteriorated with illumination by the laser beam and the reflectance is reduced. To avoid a light quantity of the laser beam entering the beam expander from being reduced below a reference value, when the laser beam is illuminated over a certain time, a position on each of the first and second plane mirrors at which the laser beam is illuminated is changed by a structure for rotating and/or translating a reflecting surface of each plane mirror on a plane, which includes the plane mirror, while an optical axis is kept same. Thus, the useful life of each plane mirror can be prolonged without displacing the optical axis.Type: GrantFiled: March 28, 2012Date of Patent: June 25, 2013Assignee: Hitachi High-Technologies CorporationInventors: Yuuichiro Iijima, Koichi Asami, Yusuke Miyazaki, Kazuhiro Zama, Rieko Hachiya
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Publication number: 20120287425Abstract: An object mounting mechanism includes: a plate member on which an object is mounted. Bumps are arranged on an upper surface of the plate member which faces a reverse face of the object. In addition, the bumps are arranged sparsely in an area of a surrounding part of the plate member and densely toward an area of a center part of the plate member.Type: ApplicationFiled: May 16, 2012Publication date: November 15, 2012Applicant: Hitachi High-Technologies CorporationInventors: Masami OOYAMA, Masayuki HACHIYA, Rieko HACHIYA, Kimiko HACHIYA, Kazuhiro ZAMA, Keiichi NAGASAKI
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Patent number: 8310667Abstract: A wafer surface inspection method and apparatus of high sensitivity, and free from performance degradation in terms of cleanliness, coordinate repeatability of foreign particles and the like. Gas for cooling is sprayed onto a laser irradiation position on the wafer surface to prevent an increase in temperature of the foreign particles and to suppress break-down of the foreign particles.Type: GrantFiled: August 6, 2008Date of Patent: November 13, 2012Assignee: Hitachi High-Technologies CorporationInventors: Kazuhiro Zama, Masayuki Hachiya
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Publication number: 20120205850Abstract: In order to enable high accuracy positioning and strong pressing of a substrate, the present invention provides a substrate holding apparatus including: a rotating bed having an inclined surface supporting a lower side of an outer circumferential side surface of the substrate, which bed rotates on a normal line of the substrate as the rotation axis together with the substrate; a position restriction unit rotating together with the rotating bed and restricting the substrate in a predetermined position on the rotating bed by pressing a plurality of points on the circumference on an upper side of the outer circumferential side surface of the substrate prior to the rotation; and a pressing unit rotating together with the rotating bed and pressing the substrate against the inclined surface by pressing a plurality of points on the upper side of the outer circumferential side surface of the substrate during the rotation.Type: ApplicationFiled: April 24, 2012Publication date: August 16, 2012Applicant: Hitachi High-Technologies CorporationInventors: Kazuhiro ZAMA, Koichi Asami, Yusuke Miyazaki
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Publication number: 20120182547Abstract: A laser beam oscillated from a laser source is folded in its path by first and second plane mirrors and enters a beam expander. The surface of each plane mirror is deteriorated with illumination by the laser beam and the reflectance is reduced. To avoid a light quantity of the laser beam entering the beam expander from being reduced below a reference value, when the laser beam is illuminated over a certain time, a position on each of the first and second plane mirrors at which the laser beam is illuminated is changed by a structure for rotating and/or translating a reflecting surface of each plane mirror on a plane, which includes the plane mirror, while an optical axis is kept same. Thus, the useful life of each plane mirror can be prolonged without displacing the optical axis.Type: ApplicationFiled: March 28, 2012Publication date: July 19, 2012Applicant: Hitachi High-Technologies CorporationInventors: Noriyuki Aizawa, Hiroyuki Kawakami, Kazuhiro Zama, Kazuo Takashi, Yusuke Miyazaki, Shingo Tanaka, Yuuichiro Iijima, Masayuki Hachiya, Rieko Hachiya, Koichi Asami
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Patent number: 8203705Abstract: The invention is directed to detect a warp amount in a real-time manner in a wafer rotating at high speed under inspection.Type: GrantFiled: January 8, 2009Date of Patent: June 19, 2012Assignee: Hitachi-High Technologies CorporationInventors: Masami Ooyama, Masayuki Hachiya, Rieko Hachiya, legal representative, Kimiko Hachiya, legal representative, Kazuhiro Zama, Keiichi Nagasaki
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Patent number: 8183549Abstract: In order to enable high accuracy positioning and strong pressing of a substrate, the present invention provides a substrate holding apparatus including: a rotating bed having an inclined surface supporting a lower side of an outer circumferential side surface of the substrate, which bed rotates on a normal line of the substrate as the rotation axis together with the substrate; a position restriction unit rotating together with the rotating bed and restricting the substrate in a predetermined position on the rotating bed by pressing a plurality of points on the circumference on an upper side of the outer circumferential side surface of the substrate prior to the rotation; and a pressing unit rotating together with the rotating bed and pressing the substrate against the inclined surface by pressing a plurality of points on the upper side of the outer circumferential side surface of the substrate during the rotation.Type: GrantFiled: July 1, 2011Date of Patent: May 22, 2012Assignee: Hitachi High-Technologies CorporationInventors: Kazuhiro Zama, Koichi Asami, Yusuke Miyazaki
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Patent number: 8184283Abstract: A laser beam oscillated from a laser source is folded in its path by first and second plane mirrors and enters a beam expander. The surface of each plane mirror is deteriorated with illumination by the laser beam and the reflectance is reduced. To avoid a light quantity of the laser beam entering the beam expander from being reduced below a reference value, when the laser beam is illuminated over a certain time, a position on each of the first and second plane mirrors at which the laser beam is illuminated is changed by a structure for rotating and/or translating a reflecting surface of each plane mirror on a plane, which includes the plane mirror, while an optical axis is kept same. Thus, the useful life of each plane mirror can be prolonged without displacing the optical axis.Type: GrantFiled: May 21, 2010Date of Patent: May 22, 2012Assignee: Hitachi High-Technologies CorporationInventors: Yuuichiro Iijima, Masayuki Hachiya, Rieko Hachiya, legal representative, Koichi Asami, Yusuke Miyazaki, Kazuhiro Zama
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Publication number: 20110260080Abstract: In order to enable high accuracy positioning and strong pressing of a substrate, the present invention provides a substrate holding apparatus including: a rotating bed having an inclined surface supporting a lower side of an outer circumferential side surface of the substrate, which bed rotates on a normal line of the substrate as the rotation axis together with the substrate; a position restriction unit rotating together with the rotating bed and restricting the substrate in a predetermined position on the rotating bed by pressing a plurality of points on the circumference on an upper side of the outer circumferential side surface of the substrate prior to the rotation; and a pressing unit rotating together with the rotating bed and pressing the substrate against the inclined surface by pressing a plurality of points on the upper side of the outer circumferential side surface of the substrate during the rotation.Type: ApplicationFiled: July 1, 2011Publication date: October 27, 2011Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATIONInventors: Kazuhiro ZAMA, Koichi Asami, Yusuke Miyazaki
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Patent number: 7999242Abstract: In order to enable high accuracy positioning and strong pressing of a substrate, the present invention provides a substrate holding apparatus including: a rotating bed having an inclined surface supporting a lower side of an outer circumferential side surface of the substrate, which bed rotates on a normal line of the substrate as the rotation axis together with the substrate; a position restriction unit rotating together with the rotating bed and restricting the substrate in a predetermined position on the rotating bed by pressing a plurality of points on the circumference on an upper side of the outer circumferential side surface of the substrate prior to the rotation; and a pressing unit rotating together with the rotating bed and pressing the substrate against the inclined surface by pressing a plurality of points on the upper side of the outer circumferential side surface of the substrate during the rotation.Type: GrantFiled: April 6, 2010Date of Patent: August 16, 2011Assignee: Hitachi High-Technologies CorporationInventors: Kazuhiro Zama, Koichi Asami, Yusuke Miyazaki
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Publication number: 20110153114Abstract: An outer dust collecting filter covers a casing an intake port and an outer fan flows air from an external environment into the casing via the outer dust collecting filter. A clean chamber has an intake port within the casing, an inner dust collecting filter for covering the intake port, and an inner fan for flowing the air within the casing. A control unit controls fan rotating speeds so that a measured pressure within the casing becomes higher at a set value than a measured pressure in the external environment, and a measured pressure within the clean chamber becomes higher at a set value than the measured pressure within the casing.Type: ApplicationFiled: March 4, 2011Publication date: June 23, 2011Applicant: Hitachi High-Technologies CorporationInventors: Takahiro JINGU, Yusuke Miyazaki, Kazuhiro Zama
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Publication number: 20110102781Abstract: A laser beam oscillated from a laser source is folded in its path by first and second plane mirrors and enters a beam expander. The surface of each plane mirror is deteriorated with illumination by the laser beam and the reflectance is reduced. To avoid a light quantity of the laser beam entering the beam expander from being reduced below a reference value, when the laser beam is illuminated over a certain time, a position on each of the first and second plane mirrors at which the laser beam is illuminated is changed by a structure for rotating and/or translating a reflecting surface of each plane mirror on a plane, which includes the plane mirror, while an optical axis is kept same. Thus, the useful life of each plane mirror can be prolonged without displacing the optical axis.Type: ApplicationFiled: January 5, 2011Publication date: May 5, 2011Applicant: Hitachi High-Technologies, Corp.Inventors: Noriyuki AIZAWA, Hiroyuki Kawakami, Kazuhiro Zama, Kazuo Takahashi, Yusuke Miyazaki, Shingo Tanaka
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Patent number: 7925390Abstract: An outer dust collecting filter covers a casing an intake port and an outer fan flows air from an external environment into the casing via the outer dust collecting filter. A clean chamber has an intake port within the casing, an inner dust collecting filter for covering the intake port, and an inner fan for flowing the air within the casing. A control unit controls fan rotating speeds so that a measured pressure within the casing becomes higher at a set value than a measured pressure in the external environment, and a measured pressure within the clean chamber becomes higher at a set value than the measured pressure within the casing.Type: GrantFiled: July 30, 2007Date of Patent: April 12, 2011Assignee: Hitachi High-Technologies CorporationInventors: Takahiro Jingu, Yusuke Miyazaki, Kazuhiro Zama
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Patent number: 7894052Abstract: A laser beam oscillated from a laser source is folded in its path by first and second plane mirrors and enters a beam expander. The surface of each plane mirror is deteriorated with illumination by the laser beam and the reflectance is reduced. To avoid a light quantity of the laser beam entering the beam expander from being reduced below a reference value, when the laser beam is illuminated over a certain time, a position on each of the first and second plane mirrors at which the laser beam is illuminated is changed by a structure for rotating and/or translating a reflecting surface of each plane mirror on a plane, which includes the plane mirror, while an optical axis is kept same. Thus, the useful life of each plane mirror can be prolonged without displacing the optical axis.Type: GrantFiled: February 12, 2010Date of Patent: February 22, 2011Assignee: Hitachi High-Technologies CorporationInventors: Noriyuki Aizawa, Hiroyuki Kawakami, Kazuhiro Zama, Kazuo Takahashi, Yusuke Miyazaki, Shingo Tanaka