Abstract: An ion implantation apparatus includes an implantation processing chamber, a high voltage unit, and a high-voltage power supply system. In the implantation processing chamber ions are implanted into a workpiece. The high voltage unit includes an ion source unit for generating the ions, and a beam transport unit provided between the ion source unit and the implantation processing chamber. The high-voltage power supply system applies a potential to the high voltage unit under any one of a plurality of energy settings. The high-voltage power supply system includes a plurality of current paths formed such that a beam current flowing into the workpiece is returned to the ion source unit, and each of the plurality of energy settings is associated with a corresponding one of the plurality of current paths.

Abstract: An ion implantation apparatus includes an implantation processing chamber, a high voltage unit, and a high-voltage power supply system. In the implantation processing chamber ions are implanted into a workpiece. The high voltage unit includes an ion source unit for generating the ions, and a beam transport unit provided between the ion source unit and the implantation processing chamber. The high-voltage power supply system applies a potential to the high voltage unit under any one of a plurality of energy settings. The high-voltage power supply system includes a plurality of current paths formed such that a beam current flowing into the workpiece is returned to the ion source unit, and each of the plurality of energy settings is associated with a corresponding one of the plurality of current paths.

Abstract: The contents conversion system of this invention comprises a style sheet storage means for storing a plurality of style sheets and an XML document storage means for storing XML documents for which the style sheet specifications are undefined, that selects a style sheet from the style sheet storage means, based on an XML document identified from the XML document storage means as the XML document required in relation to a contents request from client system and based on circumstance information of the client system from which the contents request is received and on the identified XML document.

Abstract: A CVCF (Constant Voltage Constant Frequency) inverter includes a main circuit, a voltage control loop, and a frequency control loop. In a normal operating mode, constant voltage, constant frequency control is carried out by these loops. In a lap switching operation, if a comparator detects that the output current of the inverter exceeds a predetermined level, a switch is closed so that the effective power component computed by an effective power computing unit is inputted to the frequency control loop. The output frequency of the inverter is controlled by changing a reference frequency in response to the effective power. This reduces the phase difference between the output voltage of the inverter and an external power supply, thus decreasing a cross current. This makes it possible to protect the components of the inverter and to supply power reliably.