Abstract: An etching method for performing side-etching of silicon germanium layers of a substrate having alternating silicon layers and the silicon germanium layers formed thereon is provided. The method includes modifying surfaces of residuals by supplying a plasmarized gas containing hydrogen to the residuals on exposed end surfaces of the silicon germanium layers, and performing side-etching on the silicon germanium layers by supplying a fluorine-containing gas to the silicon germanium layers.

Abstract: A technique of etching Si on a substrate having Si and another material with a high selectivity using a simple gas system is provided. In an etching method, the substrate having the Si and another material is provided, and the Si is selectively etched over the above-described another material by supplying a germanium-containing gas as an etching gas to the substrate.

Abstract: An etching method for performing side-etching of silicon germanium layers of a substrate having alternating silicon layers and the silicon germanium layers formed thereon is provided. The method includes modifying surfaces of residuals by supplying a plasmarized gas containing hydrogen to the residuals on exposed end surfaces of the silicon germanium layers, and performing side-etching on the silicon germanium layers by supplying a fluorine-containing gas to the silicon germanium layers.

Abstract: A technique of etching Si on a substrate having Si and another material with a high selectivity using a simple gas system is provided. In an etching method, the substrate having the Si and another material is provided, and the Si is selectively etched over the above-described another material by supplying a germanium-containing gas as an etching gas to the substrate.

Abstract: In one embodiment, a method includes forming a structure having a first region including a ceramic material, a second region including a plurality of particles disposed in a ceramic matrix material, and a magnetic head assembly disposed in the first region. The method also includes directing a first ion beam at a side of the first and second regions of the structure, the first ion beam including an oxidizing species to oxidize one or more portions of the particles located near the side of the second region, where the one or more oxidized portions of the particles protrude from the side of the ceramic matrix material of the second region. The method further includes directing a second ion beam at the side of the first and second regions of the structure, the second ion beam including an inert species to recess the first and second regions.

Abstract: In one embodiment, a method includes forming a structure having a first region including a ceramic material, a second region including a plurality of particles disposed in a ceramic matrix material, and a magnetic head assembly disposed in the first region. The method also includes directing a first ion beam at a side of the first and second regions of the structure, the first ion beam including an oxidizing species to oxidize one or more portions of the particles located near the side of the second region, where the one or more oxidized portions of the particles protrude from the side of the ceramic matrix material of the second region. The method further includes directing a second ion beam at the side of the first and second regions of the structure, the second ion beam including an inert species to recess the first and second regions.

Abstract: In one embodiment, a method includes forming a structure having a first region including a ceramic material, a second region including a plurality of particles disposed in a ceramic matrix material, and a magnetic head assembly disposed in the first region. The method also includes directing a first ion beam at a side of the first and second regions of the structure, the first ion beam including an oxidizing species to oxidize one or more portions of the particles located near the side of the second region, where the one or more oxidized portions of the particles protrude from the side of the ceramic matrix material of the second region. The method further includes directing a second ion beam at the side of the first and second regions of the structure, the second ion beam including an inert species to recess the first and second regions.

Abstract: A heat-assisted magnetic recording (HAMR) air-bearing slider has an optically-transparent protective film over the near-field transducer (NFT) to protect the NFT from excessive heat caused by the accumulation of carbonaceous material on the slider's overcoat. The NFT is thus separated from the overcoat by the protective film. The protective film does not cover the write pole end, which is covered only by the overcoat, so there is no spacing loss between the write pole end and the recording layer on the disk. In one embodiment the protective film is coplanar with the recording-layer-facing surface of the slider and the overcoat covers both the protective film and the write pole end. In another embodiment the overcoat has a window that surrounds the protective film, with the protective film being substantially coplanar with the air-bearing surface (ABS) of the slider. In both embodiments the smooth topography of the slider's ABS is maintained.

Abstract: A Ni-based single crystal superalloy which has the following composition: Co: 0.0 wt % or more to 15.0 wt % or less, Cr: 4.1 to 8.0 wt %, Mo: 2.1 to 4.5 wt %, W: 0.0 to 3.9 wt %, Ta: 4.0 to 10.0 wt %, Al: 4.5 to 6.5 wt %, Ti: 0.0 to 1.0 wt %, Hf: 0.00 to 0.5 wt %, Nb: 0.0 to 3.0 wt %, Re: 8.1 to 9.9 wt % and Ru: 0.5 to 6.5 wt % with the remainder including Ni and unavoidable impurities. As a result, the Ni-based single crystal superalloy which includes more than 8 wt % of Re in the composition ratio and has excellent specific creep strength and the turbine blade incorporating the Ni-based single crystal superalloy may be made.

Abstract: According to one embodiment, a method for manufacturing a magnetic device includes forming a protective film above a structure, wherein at least one of hydrogen and water vapor are introduced into a formation chamber during formation of the protective film. In-another embodiment, a magnetic head includes at least one of: a read element, a write element, a heater element, and a resistance detector element above a substrate, conductive terminals for each of the at least one of: the read element, the write element, and the heater element, and a protective film above the at least one of: the read element, the write element, and the heater element, wherein the protective film comprises at least one of hydrogen and water vapor.

Abstract: A magnetic head suitable for high-density recording is provided at a high yield by a method that suppresses a reduction in reproducing output signal due to ion-beam irradiation. After an air-bearing surface of a read element, a magnetic-head element, or a row bar is mechanically polished, the air-bearing surface is irradiated with an ion beam, such that an orthographic projection of an ion-beam incidence direction onto the air-bearing surface forms an in-plane incidence angle of 30 degrees to 150 degrees or of 210 degrees to 330 degrees with respect to a track-width direction. Thereby, the formation of a short circuit due to ion-beam irradiation may be hindered.

Abstract: A Ni-based single crystal superalloy which has the following composition: Co: 0.0 wt % or more to 15.0 wt % or less, Cr: 4.1 to 8.0 wt %, Mo: 2.1 to 4.5 wt %, W: 0.0 to 3.9 wt %, Ta: 4.0 to 10.0 wt %, Al: 4.5 to 6.5 wt %, Ti: 0.0 to 1.0 wt %, Hf: 0.00 to 0.5 wt %, Nb: 0.0 to 3.0 wt %, Re: 8.1 to 9.9 wt % and Ru: 0.5 to 6.5 wt % with the remainder including Ni and unavoidable impurities. As a result, the Ni-based single crystal superalloy which includes more than 8 wt % of Re in the composition ratio and has excellent specific creep strength and the turbine blade incorporating the Ni-based single crystal superalloy may be made.

Abstract: In one embodiment of the present invention, a method of producing a magnetic head slider comprises the steps of forming, on the air bearing surface of the slider, an air bearing surface overcoat, removing the surface region from a hard amorphous carbon film by the irradiation with an ion beam which is tilted with respect to a normal to the air bearing surface, and forming a rail in the air bearing surface on which the air bearing surface overcoat has been formed. A high density and covering performance are obtained when the angle of irradiating the ion beam is not smaller than about 60 degrees from a normal to the air bearing surface of the magnetic head slider and when the acceleration voltage for the ion beam is not higher than about 300 V in the step of removing part of the air bearing surface overcoat.

Abstract: Embodiments of the present invention provide a method of fabricating a magnetic head slider realizing high-recording density at high-yields by preventing formation of a short circuit on the air-bearing surface of a magnetic head slider and preventing formation of an oxidized layer with significant film thickness which increases the effective magnetic spacing, on the air-bearing surface of the magnetic head slider. According to one embodiment, after air-bearing surface mechanical lapping of a row bar or a magnetic head slider, cleaning is performed by ion beam bombardment to remove a conductive smear. Oxygen exposure is performed to recover a damaged region which was formed by ion beam bombardment at the end face of an intermediate layer of a magnetoresistive film 5. Thereafter, air-bearing surface protection films are formed and followed by rail formation. If the processes are performed on the row bar, the row bar is cut into individual separated magnetic head sliders.

Abstract: A magnetic head suitable for high-density recording is provided at a high yield by a method that suppresses a reduction in reproducing output signal due to ion-beam irradiation. After an air-bearing surface of a read element, a magnetic-head element, or a row bar is mechanically polished, the air-bearing surface is irradiated with an ion beam, such that an orthographic projection of an ion-beam incidence direction onto the air-bearing surface forms an in-plane incidence angle of 30 degrees to 150 degrees or of 210 degrees to 330 degrees with respect to a track-width direction. Thereby, the formation of a short circuit due to ion-beam irradiation may be hindered.

Abstract: Embodiments of the present invention provide a magnetic head suitable for high density recording at a high yield by reducing the thickness of an air-bearing surface protection layer of a magnetic head and suppressing reduction in the signal-to-noise (S/N) ratio of a read element. According to one embodiment, a read element of a magnetic head has a magnetoresistive effect film (TMR film) between a lower magnetic shield layer and an upper magnetic shield layer, and has a refill film and a magnetic domain control film in both sides of the TMR film. The TMR film is configured by a lower metal layer, an antiferromagnetic layer, a ferromagnetic pinned layer, an intermediate layer, a ferromagnetic free layer, and an upper metal layer. An air-bearing surface protection layer, including a silicon nitride film about 2.0 nm in thickness, is formed on a recording medium facing surface of the TMR film. Since silicon in the silicon nitride film is inactivated by nitrogen, the silicon does not damage the TMR film.

Abstract: Embodiments of the present invention provide a method of fabricating a magnetic head slider realizing high-recording density at high-yields by preventing formation of a short circuit on the air-bearing surface of a magnetic head slider and preventing formation of an oxidized layer with significant film thickness which increases the effective magnetic spacing, on the air-bearing surface of the magnetic head slider. According to one embodiment, after air-bearing surface mechanical lapping of a row bar or a magnetic head slider, cleaning is performed by ion beam bombardment to remove a conductive smear. Oxygen exposure is performed to recover a damaged region which was formed by ion beam bombardment at the end face of an intermediate layer of a magnetoresistive film 5. Thereafter, air-bearing surface protection films are formed and followed by rail formation. If the processes are performed on the row bar, the row bar is cut into individual separated magnetic head sliders.

Abstract: A magnetic head slider having an air bearing surface overcoat that has excellent corrosion resistance and wear resistance despite its very small thickness is provided. In one embodiment, a method of producing a magnetic head slider comprises the steps of forming, on the air bearing surface of the slider, an air bearing surface overcoat which is a film stack of an amorphous silicon film and a hard amorphous carbon film, removing the surface region from the hard amorphous carbon film by the irradiation with an ion beam which is tilted with respect to a normal to the air bearing surface, and forming a rail in the air bearing surface on which the air bearing surface overcoat has been formed. The amount of the diamond component in the hard amorphous carbon film must not be smaller than about 45% and, desirably, in a range of about 60% to 85%.