Abstract: A heater is used in a CVD apparatus. In the CVD apparatus, reactive gas is supplied through a reactive gas supply plate to a substrate on a substrate holder to deposit a film on the substrate, and a purge gas supply passage is formed by placing a shield mechanism around the substrate holder, the shield mechanism including a ring plate disposed close to the outer periphery of the substrate. During film deposition, purge gas supplied through the purge gas supply passage is blown off from a clearance between the substrate and the ring plate, thereby preventing a film from being deposited on the rear surface of the substrate or the like. A heating element is arranged in a space in the purge gas supply passage close to but not contacting the substrate holder. The heating element is preferably a ceramic heater.

Abstract: An electrostatic image developing toner containing a polyester binder resin in which an oxyalkylether of a novolak phenol resin is crosslinked with polycarboxyl groups and contains 5 to 20% by weight of components having a weight-average molecular weight greater than about 1.times.10.sup.7 and is essentially free of a tetrahydrofuran-insoluble portion.

Abstract: A CVD mechanism includes a reactor, a substrate holder, a heating apparatus for heating the substrate holder, a reaction gas supply plate for supplying reaction gas into the reactor, and at least two cylinders disposed in a concentric form on the substrate-facing surface of the reaction gas supply plate so that reaction gas is supplied from an inward portion of each cylinder in the reaction gas supply plate. A power supply mechanism for supplying power to the reaction gas supply plate and the substrate holder, and ring magnets disposed in the upper and lower portions of the reactor are provided so that magnetic lines of force passing through a plasma space are generated by the facing magnetic pole parts of the respective magnets.

Abstract: A toner comprising a binder resin, a colorant, and a charge controlling agent comprising (a) a specific iron-containing azo dye and (b) a copolymer of a styrene monomer and/or an acrylic monomer with a sulfonic acid group-containing acrylamide, wherein the amount of the azo dye present on the surface of the toner is 7.times.10.sup.-3 to 20.times.10.sup.-3 g per 1 g of said toner. The toner is suitably used in conjunction with carrier particles, each having a surface layer containing a silicone resin, electroconductive particles and a silane coupling agent.

Abstract: A negatively chargeable toner for developing latent electrostatic images is composed of a coloring agent; releasing agent; a binder resin including a polyester and a styrene - acryl-based polymer component with a weight-average molecular weight of 50,000 to 150,000, a number-average molecular weight of 2,000 to 12,000, and a glass transition temperature of 55.degree. to 70.degree. C. at a mixing ratio by weight in the range of (95:5) to (50:50); and a charge controlling agent including at least one phthalic ester which is mixed with the styrene - acryl-based polymer component, and at least one fluorine-containing quaternary ammonium salt.