Abstract: A rotary connector device includes a fixed body, a rotation body, and an inhibiting structure. The fixed body includes a first fixed body portion and a second fixed body portion disposed facing each other with a space being defined between the first fixed body portion and the second fixed body portion. The first fixed body portion and the second fixed body portion are coupled at a coupling portion. The rotation body rotatably is assembled to the fixed body. The inhibiting structure is configured to inhibit foreign matter from entering the space through the coupling portion. The coupling portion is exposed to an outer surface of the fixed body.

Abstract: A rotary connector device includes a fixed body, a rotation body, and an inhibiting structure. The fixed body includes a first fixed body portion and a second fixed body portion disposed facing each other with a space being defined between the first fixed body portion and the second fixed body portion. The first fixed body portion and the second fixed body portion are coupled at a coupling portion. The rotation body rotatably is assembled to the fixed body. The inhibiting structure is configured to inhibit foreign matter from entering the space through the coupling portion. The coupling portion is exposed to an outer surface of the fixed body.

Abstract: An electric motor includes a stator around which an aluminum wire having a resin coating layer formed on a surface of the aluminum wire is wound; and a rotator arranged on an inner side of the stator to be rotatable, the aluminum wire comprising a terminal wire including an aluminum exposed portion, from which the resin coating layer is peeled off to expose an aluminum core wire, the stator comprising a terminal with which the aluminum exposed portion and a power supply wire for use in supplying electric power for rotating the rotator are connected, the terminal electrically conducting the aluminum exposed portion and the power supply wire, and a first solder layer formed on the terminal, covering an entire surface of the aluminum exposed portion, and joining the aluminum exposed portion and the terminal to each other.

Abstract: An electric motor includes a stator around which an aluminum wire having a resin coating layer formed on a surface of the aluminum wire is wound; and a rotator arranged on an inner side of the stator to be rotatable, the aluminum wire comprising a terminal wire including an aluminum exposed portion, from which the resin coating layer is peeled off to expose an aluminum core wire, the stator comprising a terminal with which the aluminum exposed portion and a power supply wire for use in supplying electric power for rotating the rotator are connected, the terminal electrically conducting the aluminum exposed portion and the power supply wire, and a first solder layer formed on the terminal, covering an entire surface of the aluminum exposed portion, and joining the aluminum exposed portion and the terminal to each other.

Abstract: Problem To provide a process for producing single-walled carbon nanotubes with which highly pure, high-quality single-walled carbon nanotubes can be produced with high efficiency, and to provide a transparent conductive film using the single-walled carbon nanotubes obtained by that production method. Solution A process for producing single-walled carbon nanotubes by chemical vapor deposition (CVD), wherein particles of a nonmetallic material containing 500 ppm or lower of metallic impurities including metals and compounds thereof are used as growth nuclei; and after a growth gas is introduced into a furnace used for growing carbon nanotubes, the growth gas used in an initial stage of growth of carbon nanotubes and the growth gas used in a stage of growth of regular carbon nanotubes (stationary growth stage) thereafter are prepared to different compositions and different partial pressures.

Abstract: Problem To provide a process for producing single-walled carbon nanotubes with which highly pure, high-quality single-walled carbon nanotubes can be produced with high efficiency, and to provide a transparent conductive film using the single-walled carbon nanotubes obtained by that production method. Solution A process for producing single-walled carbon nanotubes by chemical vapor deposition (CVD), wherein particles of a nonmetallic material containing 500 ppm or lower of metallic impurities including metals and compounds thereof are used as growth nuclei; and after a growth gas is introduced into a furnace used for growing carbon nanotubes, the growth gas used in an initial stage of growth of carbon nanotubes and the growth gas used in a stage of growth of regular carbon nanotubes (stationary growth stage) thereafter are prepared to different compositions and different partial pressures.

Abstract: An exposure apparatus for exposing a substrate to light via a reticle includes a first plurality of optical elements configured to direct the light; a first vacuum chamber configured to accommodate said first plurality of optical elements; a first support configured to support said first vacuum chamber; and a second support configured to support at least one of said first plurality of optical elements substantially independently of said first support.

Abstract: At least one exemplary embodiment is directed to a light source which includes a plasma generator configured to generate plasma, a mirror configured to reflect light that is produced by the plasma, a plurality of plates provided between the plasma and the mirror and arranged radially around an axis passing through a light emission center, and a magnetic-field generator for generating a magnetic line of force between the plasma and the mirror so that trajectories of charged particles scattering from the plasma are curved toward the plates.

Abstract: A light source apparatus for generating a plasma and supplying a light irradiated from the plasma to an optical system, said light source apparatus includes a chamber for accommodating a region that generates the plasma, wherein a density of a hydrocarbon compound included in a gas in the chamber is 300 ppb or less.

Abstract: At least one exemplary embodiment is directed to a light source which includes a plasma generator configured to generate plasma, a mirror configured to reflect light that is produced by the plasma, a plurality of plates provided between the plasma and the mirror and arranged radially around an axis passing through a light emission center, and a magnetic-field generator for generating a magnetic line of force between the plasma and the mirror so that trajectories of charged particles scattering from the plasma are curved toward the plates.

Abstract: A light source apparatus for generating a plasma and supplying a light irradiated from the plasma to an optical system, said light source apparatus includes a chamber for accommodating a region that generates the plasma, wherein a density of a hydrocarbon compound included in a gas in the chamber is 300 ppb or less.

Abstract: A light source unit including a condensing mirror for collecting EUV light emitted from a light emission point, a debris reducing member for reducing debris, produced from the light emission point or from a portion around the light emission point, and to be deposited on the condensing mirror, and a base member arranged so that the condensing mirror and the debris reducing member are mounted thereon.

Abstract: An exposure apparatus for exposing a substrate to light via a reticle includes a first plurality of optical elements configured to direct the light; a first vacuum chamber configured to accommodate said first plurality of optical elements; a first support configured to support said first vacuum chamber; and a second support configured to support at least one of said first plurality of optical elements substantially independently of said first support.

Abstract: A gas flow measurement apparatus measures flow of gas emitted from an EUV light source in a light source chamber that accommodates the EUV light source, and includes an absorber that receives light emitted from the EUV light source and introduced into the gas flow measurement apparatus.

Abstract: Disclosed is a light source unit for use in an exposure apparatus and an exposure apparatus having the same, wherein the light source unit includes a condensing mirror for collecting EUV light emitted from a light emission point, a debris reducing member for reducing debris produced or to be produced from the light emission point or from a portion around the light emission point, and a base member being arranged so that the condensing mirror and the debris reducing member can be mounted thereon.

Abstract: A gas flow measurement apparatus measures flow of gas emitted from an EUV light source in a light source chamber that accommodates the EUV light source, and includes an absorber that receives light emitted from the EUV light source and introduced into the gas flow measurement apparatus.

Abstract: A vibration actuator has a vibration member for generating a vibration, and a contact member which contacts the vibration member and moves relative thereto when the vibration member vibrates. A portion of the vibration member, which is in sliding-contact with the contact member, is formed as a separate first member which is coupled to rest of the vibration member.

Abstract: A vibration wave driving device comprises a vibration member in which a vibration is generated, and a contact member contactable with the vibration member and movable relative to the vibration member by the vibration generated in the vibration member, wherein a material having resin as a chief component is used for one of a first contact portion of the vibration member, which contacts the contact member, and a second contact portion of the contact member, which contacts the vibration member, and wherein a ceramic of carbide origin is used for the other one of the first contact portion and the second contact portion.

Abstract: A vibration wave driving apparatus relatively moves a contact member and a vibration member by a vibration generated in the vibration member. The vibration member has a plurality of projections for magnifying the vibration displacement. At least the projections are formed on the vibration member by a press work.

Abstract: A vibration wave actuator having a vibrating member for generating a vibration wave therein and a contact member contacting the vibrating member so as to be movable relative to the vibrating member by a friction force caused by the vibration wave, as well as to a system using the actuator. Contact portions of the vibrating member and the contact member are made of iron or iron alloy.