Abstract: There is provided a tube pump including: a first roller unit and a second roller unit that rotate around an axis while being in contact with a tube; a drive shaft coupled to the first roller unit; a drive cylinder arranged on an outer peripheral side of the drive shaft and coupled to the second roller unit; a first drive unit that rotates a first drive shaft around a first axis; a second drive unit that rotates a second drive shaft around a second axis; and a transmission mechanism that transmits a drive force of the second drive shaft to an outer peripheral surface of the drive cylinder, in which the first drive unit and the second drive unit are arranged so that a first arrangement position of the first drive unit and a second arrangement position of the second drive unit in a first axis direction overlap with each other.

Abstract: There is provided a Karman vortex flowmeter including: a body inside which a flow passage and a Karman vortex generation column are formed; and a flow rate measurement unit that measures Karman vortexes generated by the Karman vortex generation column to thereby obtain a flow rate of a fluid, in which the flow rate measurement unit includes: a piezoelectric element; a piezoelectric element holder that is attached to the body so that the piezoelectric element is arranged in a flow passage; and a thin film part that is formed of a material with higher corrosion resistance than an electrode of the piezoelectric element, the piezoelectric element holder houses the piezoelectric element in a state where the piezoelectric element is sandwiched by a pair of plate-shaped parts integrally formed by a resin material, and in which the thin film part is arranged between the plate-shaped parts and the electrode.

Abstract: A flow regulating device 1 is provided which includes: a housing 10c including a pressure chamber 12 formed therein; a second housing 10b including a first space 22 formed therein; a valve element 31 which forms a closed state in which communication is shut off between an upstream flow channel 15 and a downstream flow channel 16, or an open state in which communication is provided between the upstream flow channel 15 and a downstream flow channel 16; a diaphragm 35 connected to the valve element 31; a guide member 42 connected to the diaphragm 35 which is movable in an axial direction of the valve element 31 with the movement of the valve element 31 while being in a state in which the guide member 42 is in contact with an inner circumferential surface of the pressure chamber 12.

Abstract: A flow control device is capable of performing accurate flow control over a wide range of temperatures by using a housing made of resin with superior chemical resistance. The flow control device includes: a housing made of resin; a diaphragm which is supported in the housing so as to split the housing into a gas chamber side to which gas is introduced and a fluid chamber side through which fluid passes, and is activated by the differential pressure between the gas chamber side and the fluid chamber side; and a valve body which operates in integration with the diaphragm to regulate the flow of the fluid introduced into the fluid chamber side. The gas chamber side includes a holding member which holds the diaphragm between itself and an opposing surface of the fluid chamber side opposite to the diaphragm, the holding member being screwed to the inner peripheral wall of the gas chamber side through a screw part.

Abstract: A flow regulating device 1 is provided which includes: a valve element 19 which is movable into contact with or away from a valve seat 18; a spring 21 for exerting an urging force on the valve element 19; a diaphragm 20 fixed to an end of the valve element 19, the diaphragm having a fluid contact surface 20a and a back surface 20b; a pressure chamber 24 into which compressed air is externally introduced; and a piston 25 for transmitting the pressure of the compressed air that is introduced into the pressure chamber 24 to the back surface 20b of the diaphragm 20, wherein a portion of the piston 25 which portion receives the pressure of the compressed air has an area equal to or more than twice the area of the fluid contact surface 20a of the diaphragm 20.

Abstract: A flow control device is capable of performing accurate flow control over a wide pressure range. The flow control device includes: a housing; a diaphragm splitting the housing into a gas chamber side to which gas is introduced and a fluid chamber side through which fluid passes, and being activated by the differential pressure generated between the gas chamber side and the fluid chamber side; and a valve body which operates in integration with the diaphragm to regulate the flow of the fluid introduced to the fluid chamber side. The diaphragm includes: a base part provided in a substantially central part of the diaphragm; and a thin film part provided on the outer rim of the base part. An opposing surface which is provided on the fluid chamber side to oppose the diaphragm includes a retaining form which retains the shape of the thin film part deformed by the differential pressure.

Abstract: In the relief valve, an annular convex portion 16a that is convexed in a direction in which a valve element 5a moves away from a valve hole 17 along a center axis of the valve hole 17 and that is arranged around the valve hole 17 is formed in a valve chamber 16, an annular concave portion 5d that is concaved in the direction in which the valve element 5a moves away from the valve hole 17 is formed in the valve element 5a, and in a shut-off state, the annular convex portion 16a is accommodated in the annular concave portion 5d, and an annular channel 19 that extends in a direction of the center axis is formed between an outer peripheral surface 16b of the annular convex portion 16a and an inner peripheral surface 5e of the annular concave portion 5d.

Abstract: A flow regulating device 1 is provided which includes: a housing 10c including a pressure chamber 12 formed therein; a second housing 10b including a first space 22 formed therein; a valve element 31 which forms a closed state in which communication is shut off between an upstream flow channel 15 and a downstream flow channel 16, or an open state in which communication is provided between the upstream flow channel 15 and a downstream flow channel 16; a diaphragm 35 connected to the valve element 31; a guide member 42 connected to the diaphragm 35 which is movable in an axial direction of the valve element 31 with the movement of the valve element 31 while being in a state in which the guide member 42 is in contact with an inner circumferential surface of the pressure chamber 12.

Abstract: A flow regulating device 1 is provided which includes: a valve element 19 which is movable into contact with or away from a valve seat 18; a spring 21 for exerting an urging force on the valve element 19; a diaphragm 20 fixed to an end of the valve element 19, the diaphragm having a fluid contact surface 20a and a back surface 20b; a pressure chamber 24 into which compressed air is externally introduced; and a piston 25 for transmitting the pressure of the compressed air that is introduced into the pressure chamber 24 to the back surface 20b of the diaphragm 20, wherein a portion of the piston 25 which portion receives the pressure of the compressed air has an area equal to or more than twice the area of the fluid contact surface 20a of the diaphragm 20.