Abstract: A MEMS microphone includes a diaphragm having conductivity, first and second variable capacitors respectively including first and second fixed electrodes, a first voltage output section that outputs a first voltage changed according to a change in a capacitance of the first variable capacitor, and a second voltage output section that outputs a second voltage changed according to a change in a capacitance of the second variable capacitor. The first and second fixed electrodes face the diaphragm. The capacitances of the first and second variable capacitors are changed in accordance with a vibration of the diaphragm. A first bias voltage is applied to the first fixed electrode. A reference voltage is applied to the second fixed electrode. A second bias voltage is applied to the diaphragm. A difference between the second bias voltage and the reference voltage is half of a difference between the first bias voltage and the reference voltage.

Abstract: A pressure sensor includes a detection element that detects a change in pressure, and a cover member that accommodates the detection element and that includes a first through hole and a second through hole. Each of the first through hole and the second through hole is provided at a position that does not overlap the detection element in a front view of the respective hole.

Abstract: A pressure sensor includes a detection element that detects a change in pressure, and a cover member that accommodates the detection element and that includes a first through hole and a second through hole. Each of the first through hole and the second through hole is provided at a position that does not overlap the detection element in a front view of the respective hole.