Abstract: A three-dimensional shape measuring apparatus includes a fixer that fixes an illuminator and a photoreceptor to produce a measurement area to be illuminated with measuring light above a stage and to incline their optical axes with respect to a placement surface of the stage in an orientation in which the illuminator and the photoreceptor face the measurement area obliquely downward; a point cloud data generator that generates point cloud data as a set of points including three-dimensional position information representing a three-dimensional shape of a measurement object placed on the stage based on light-reception signals provided by the photoreceptor; a top view map image generator that generates a top view map image representing a plan view of the measurement object as viewed downward from a position right above the measurement object based on the point cloud data; and a display that displays the top view map image.

Abstract: A three-dimensional shape measuring apparatus includes a photoreceptor that receives measuring light which is reflected by a workpiece illuminated by an illuminator, and provides light-reception signals representing a light reception amount; and a processor that generates a set of shape data representing three-dimensional shape of a part of the workpiece which is included in the field of view at a particular position of the stage based on the signals, repeats movement of the stage by using a movement controller based on the generated data corresponding to the part of the workpiece to obtain a set of data corresponding to other part of the workpiece which is located in proximity to the part of the workpiece and the generation of a set of data of the workpiece at the position where the stage is moved, and generates combined data including the entire shape of the workpiece by combining the repeatedly obtained sets of data.

Abstract: A control section 200 executes photographing processing for controlling the light projecting section and the light receiving section to photograph a measurement object placed on a stage, contour extracting processing for extracting a contour of the measurement object from an image of the measurement object, storing processing for determining whether the measurement object is present in rectangular regions adjacent to a photographing visual field and causing a storing section to store coordinate positions of one or more of the rectangular regions where it is determined that the measurement object is present, driving processing for driving the stage-plane-direction driving section to move the photographing visual field to any one of the coordinate positions stored in the storing section by the storing processing, and coupled-image generation processing for generating a coupled image by coupling images of the rectangular regions adjacent to one another obtained by repeatedly executing the photographing processin

Abstract: A shape measuring device 100 includes a control section 200 for executing determination processing for determining an unmeasured region having height information is present outside a depth measurement range, which is a height range in which pattern light can be irradiated from a light projecting section, focal-position changing processing for controlling an optical-axis-direction driving section to change a focal position of a light receiving section when it is determined by the determination processing that the unmeasured region is present, and synthesis processing for generating synthesized stereoscopic shape data obtained by combining a plurality of stereoscopic shape data generated by automatically repeating the stereoscopic-shape-data acquisition processing, the determination processing, and the focal-position-changing processing until it is determined by the determination processing that the unmeasured region is absent or a predetermined end condition is satisfied.

Abstract: A three-dimensional shape measuring apparatus includes a fixer that fixes an illuminator and a photoreceptor to produce a measurement area to be illuminated with measuring light above a stage and to incline their optical axes with respect to a placement surface of the stage in an orientation in which the illuminator and the photoreceptor face the measurement area obliquely downward; a point cloud data generator that generates point cloud data as a set of points including three-dimensional position information representing a three-dimensional shape of a measurement object placed on the stage based on light-reception signals provided by the photoreceptor; a top view map image generator that generates a top view map image representing a plan view of the measurement object as viewed downward from a position right above the measurement object based on the point cloud data; and a display that displays the top view map image.

Abstract: A three-dimensional shape measuring apparatus includes a photoreceptor that receives measuring light which is reflected by a workpiece illuminated by an illuminator, and provides light-reception signals representing a light reception amount; and a processor that generates a set of shape data representing three-dimensional shape of a part of the workpiece which is included in the field of view at a particular position of the stage based on the signals, repeats movement of the stage by using a movement controller based on the generated data corresponding to the part of the workpiece to obtain a set of data corresponding to other part of the workpiece which is located in proximity to the part of the workpiece and the generation of a set of data of the workpiece at the position where the stage is moved, and generates combined data including the entire shape of the workpiece by combining the repeatedly obtained sets of data.

Abstract: A control section 200 executes photographing processing for controlling the light projecting section and the light receiving section to photograph a measurement object placed on a stage, contour extracting processing for extracting a contour of the measurement object from an image of the measurement object, storing processing for determining whether the measurement object is present in rectangular regions adjacent to a photographing visual field and causing a storing section to store coordinate positions of one or more of the rectangular regions where it is determined that the measurement object is present, driving processing for driving the stage-plane-direction driving section to move the photographing visual field to any one of the coordinate positions stored in the storing section by the storing processing, and coupled-image generation processing for generating a coupled image by coupling images of the rectangular regions adjacent to one another obtained by repeatedly executing the photographing processin

Abstract: A shape measuring device 100 includes a control section 200 for executing determination processing for determining an unmeasured region having height information is present outside a depth measurement range, which is a height range in which pattern light can be irradiated from a light projecting section, focal-position changing processing for controlling an optical-axis-direction driving section to change a focal position of a light receiving section when it is determined by the determination processing that the unmeasured region is present, and synthesis processing for generating synthesized stereoscopic shape data obtained by combining a plurality of stereoscopic shape data generated by automatically repeating the stereoscopic-shape-data acquisition processing, the determination processing, and the focal-position-changing processing until it is determined by the determination processing that the unmeasured region is absent or a predetermined end condition is satisfied.

Abstract: Provided are a measurement target measuring method, and a magnifying observation device which make it possible to readily and intuitively recognize a deviation between actual height image data and CAD data concerning a specific portion of a measurement target. A CAD height data generation unit generates a plurality of pieces of CAD height data based on basic CAD data. A reference height data selection unit selects reference height data from the plurality of pieces of CAD height data. A reference appearance image data acquisition unit acquires a reference appearance image corresponding to the reference height data. A target image display unit displays a target image based on texture image data or actual height image data, and a reference image display unit displays a reference image based on the reference appearance image data or the reference height data.

Abstract: Provided are a measurement target measuring method, and a magnifying observation device which make it possible to readily and intuitively recognize a deviation between actual height image data and CAD data concerning a specific portion of a measurement target. A CAD height data generation unit generates a plurality of pieces of CAD height data based on basic CAD data. A reference height data selection unit selects reference height data from the plurality of pieces of CAD height data. A reference appearance image data acquisition unit acquires a reference appearance image corresponding to the reference height data. A target image display unit displays a target image based on texture image data or actual height image data, and a reference image display unit displays a reference image based on the reference appearance image data or the reference height data.