Patents by Inventor Kazuki Tashima

Kazuki Tashima has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Workpiece processing apparatus using workpiece having reference marks, workpiece processing method, and computer storage medium
    Patent number: 11577269
    Abstract: Disclosed is a workpiece processing apparatus that performs a predetermined processing on a workpiece. The workpiece processing apparatus includes: a workpiece table configured to place the workpiece thereon; a processor configured to process the workpiece placed on the workpiece table; a movement mechanism configured to relatively move the workpiece table and the processor; a position measuring device configured to measure a position of the movement mechanism; a detector configured to detect a position of the workpiece placed on the workpiece table; and a corrector configured to calculate a positional correction amount of the workpiece table based on a measurement result of the position measuring device and a detection result of the detector.
    Type: Grant
    Filed: February 26, 2018
    Date of Patent: February 14, 2023
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Wataru Yoshitomi, Koutarou Onoue, Yasushi Kuranaga, Kazuki Tashima
  • WORKPIECE PROCESSING APPARATUS, WORKPIECE PROCESSING METHOD, AND COMPUTER STORAGE MEDIUM
    Publication number: 20180257100
    Abstract: Disclosed is a workpiece processing apparatus that performs a predetermined processing on a workpiece. The workpiece processing apparatus includes: a workpiece table configured to place the workpiece thereon; a processor configured to process the workpiece placed on the workpiece table; a movement mechanism configured to relatively move the workpiece table and the processor; a position measuring device configured to measure a position of the movement mechanism; a detector configured to detect a position of the workpiece placed on the workpiece table; and a corrector configured to calculate a positional correction amount of the workpiece table based on a measurement result of the position measuring device and a detection result of the detector.
    Type: Application
    Filed: February 26, 2018
    Publication date: September 13, 2018
    Inventors: Wataru Yoshitomi, Koutarou Onoue, Yasushi Kuranaga, Kazuki Tashima