Abstract: The adhesive sheet includes an adhesive layer (A1L) in solid form at 18° C., wherein the adhesive layer (A1L) contains an epoxy resin, at least one surface of the adhesive layer (A1L) has a tackiness agent region (A2R) formed by partially providing a tackiness agent (A2), and a region where the tackiness agent region (A2R) is not formed on the surface is an adhesive-layer-exposed region (A1LR) where a surface of the adhesive layer (A1L) is exposed. This adhesive sheet has excellent temporary fixability at the time of sticking (a characteristic that exhibits the tackiness force necessary for temporary fixation) and adhesive force after heat curing.

Abstract: The chamber is internally provided with a stage on which a substrate is disposed, and an exhaust port connected to an exhaust system around the stage. The baffle is provided around the stage, and divides a space in the chamber into a processing space where plasma processing is performed on the substrate, and an exhaust space connected to the exhaust port. The switching mechanism switches the baffle between a shield state in which the baffle shields a plasma and a transmissive state in which the baffle allows a plasma to pass therethrough. The controller controls the switching mechanism to switch the baffle from the shield state to the transmissive state or from the transmissive state to the shield state.

Abstract: A cable 20 is provided with a cable body 24a, a metal fitting 22a fixed to at least one end of the cable body, and a covering coat 32a covering at least a portion not covered by a metal fitting on a surface of the cable body. The cable body 24a includes a swelling part 30a on an end at a side on which the metal fitting is fixed, and the swelling part 30a swells in a direction orthogonal to an axis of the cable. The metal fitting 22a surrounds a periphery of the swelling part of the cable body. A tip of the covering coat at the side on which the metal fitting is fixed is located in the metal fitting. The space “a” is formed between the swelling part of the cable body and the tip of the covering coat.

Abstract: A cable-operated device may comprise a moving member, a cable, a supporting member, and a coil spring. One end of the cable may be connected to the moving member. The cable may be arranged so as to advance and retreat with respect to the moving member. The moving member may move as the cable is caused to advance and retreat. The supporting member may support the cable along a pathway on which the cable is arranged. One end of the coil spring may be fixed to the moving member, and the other end thereof may be fixed to the supporting member. The cable may be inserted into the inner hole of the coil spring. At least one of the moving member and the supporting member may comprise a guide surface that makes contact with the coil spring from a lateral direction with respect to the coil spring. At least one portion of the guide surface may comprise an alumite film.