Patents by Inventor Kazuma Kubota

Kazuma Kubota has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Turbomolecular pump, and particle trap for turbomolecular pump
    Patent number: 8894355
    Abstract: A turbomolecular pump includes: a rotor (30) formed with rotating blades (32) in a plurality of stages, and rotating at high speed; a plurality of fixed blades (33) arranged along axial direction of the pump so as to alternate with respect to the rotating blades (32); a pump housing (34) containing the rotating blades (32) and the fixed blades (33), and formed with an inlet opening (21a); a circular disk (150), provided close to the inlet opening of the rotor (30), and arranged so as to oppose a surface of the rotor (30) radially inward than a root portion of the rotating blades; and a cylindrical mesh structure (153a, 153b), disposed between the inlet opening (21a) and the rotor (30), and made by interlacing fine wires. Particles that strike the rotor and bounce off are captured internally in the mesh structure (153a, 153b).
    Type: Grant
    Filed: February 5, 2010
    Date of Patent: November 25, 2014
    Assignees: Shimadzu Corporation, Tokyo Electron Limited
    Inventors: Yukiteru Sekita, Kazuma Kubota, Tsuyoshi Moriya, Eiichi Sugawara
  • TURBOMOLECULAR PUMP, AND PARTICLE TRAP FOR TURBOMOLECULAR PUMP
    Publication number: 20110293401
    Abstract: A turbomolecular pump includes: a rotor (30) formed with rotating blades (32) in a plurality of stages, and rotating at high speed; a plurality of fixed blades (33) arranged along axial direction of the pump so as to alternate with respect to the rotating blades (32); a pump housing (34) containing the rotating blades (32) and the fixed blades (33), and formed with an inlet opening (21a); a circular disk (150), provided close to the inlet opening of the rotor (30), and arranged so as to oppose a surface of the rotor (30) radially inward than a root portion of the rotating blades; and a cylindrical mesh structure (153a, 153b), disposed between the inlet opening (21a) and the rotor (30), and made by interlacing fine wires. Particles that strike the rotor and bounce off are captured internally in the mesh structure (153a, 153b).
    Type: Application
    Filed: February 5, 2010
    Publication date: December 1, 2011
    Applicants: TOKYO ELECTRON LIMITED, SHIMADZU CORPORATION
    Inventors: Yukiteru Sekita, Kazuma Kubota, Tsuyoshi Moriya, Eiichi Sugawara