Abstract: An evacuation method which can reduce evacuation time without causing moisture-related problems. In a vacuum processing apparatus including a vacuum processing chamber, during the evacuation for the vacuum processing chamber, the pressure in the vacuum processing chamber is maintained at a pressure lower than or equal to the atmospheric pressure but higher than or equal to 6.7×102 Pa (5 Torr).

Abstract: A radius end mill includes an end mill body, peripheral cutting edges, bottom cutting edges and corner cutting edges. Each of the corner cutting edge is formed so as to curve toward the terminal end of the end mill body after the corner cutting edge has reached the distal end of the end mill body. A rake surface of the corner cutting edge is formed so as to be flush with the rake surface of the bottom cutting edge. When an external diameter of the end mill body is D, a value of a radius of curvature R of the corner cutting edge is greater than or equal to 0.1×D and is less than or equal to 0.3×D.

Abstract: An end mill body rotatable around an axis; peripheral cutting edges formed at a periphery of the end mill body located close to a distal end thereof; bottom cutting edges formed at a distal end of the end mill body; and corner cutting edges formed between the peripheral cutting edge and the bottom cutting edge. The corner cutting edges are formed to curve inwardly in a radial direction of the end mill body as they approach the distal end of the end mill body from the terminal end thereof and curve toward the terminal end of the end mill body after reaching the distal end of the end mill body. The bottom cutting edges are formed to communicate with the corner cutting edges and are close to the terminal end of the end mill body as the bottom cutting edge approaches inwardly in the radial direction. A value of a rake angle ? of the corner cutting edge with respect to the axis ?10°???10°.

Abstract: An evacuation method which can reduce evacuation time without causing moisture-related problems. In a vacuum processing apparatus including a vacuum processing chamber, during the evacuation for the vacuum processing chamber, the pressure in the vacuum processing chamber is maintained at a pressure lower than or equal to the atmospheric pressure but higher than or equal to 6.7×102 Pa (5 Torr).