Abstract: Provided is a vacuum processing method capable of preventing particles from adhering to a wafer due to a titanium (Ti)-based reaction product. The vacuum processing method is applicable to a plasma processing apparatus including: a sample stage disposed in a processing chamber inside a vacuum container, on which a wafer having a titanium (Ti)-containing film is placed; a coil supplied with a radio frequency power for forming plasma in the processing chamber; and a heating device that emits an electromagnetic wave for heating the wafer placed on an upper surface of the sample stage. The vacuum processing method includes a step of etching the titanium (Ti)-containing film, and a step of cleaning an inside of the processing chamber by using a mixed gas of nitrogen trifluoride (NF3) gas, argon gas, and a chlorine gas.

Abstract: An optical heating apparatus includes: a plurality of heating sources to optically heat a substrate; a plurality of light transmissive containers in which the heating sources are inserted and which transmit light from the heating sources; and a vacuum chamber including a housing having an inside in which the substrate can be placed, the housing having a hole to insert the plurality of light transmissive containers at a position opposed to the substrate placed in the inside, wherein each of the plurality of heating sources has at least one light emitting element, and the plurality of heating sources emit light toward the substrate placed in the vacuum chamber through the plurality of light transmissive containers inserted in the hole and protruding from the housing toward the inside.

Abstract: A CD containing case has a function of ornament and/or fragrance as well as a function of a distinction between one's own product and other's product and an ornamental effect by means of a photograph, a picture, characters or the like on a jacket. It is possible to present an ornamental effect and a fragrant effect to the CD containing case by disposing filling members for use of ornament and fragrance in a space for a hinge portion of a main portion of the CD containing case. The filling members may be disposed in an ornamental case arranged in the space for the hinge portion or disposed in a case portion formed in the hinge portion of the main body. The ornamental case or the case portion may be provided with at least a partition for dividing its interior or with a pivotable lid.