Patents by Inventor Kazunari Sekiya

Kazunari Sekiya has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • POWER SUPPLY APPARATUS AND DEPOSITION METHOD USING THE POWER SUPPLY APPARATUS
    Publication number: 20080258411
    Abstract: A power supply apparatus includes a power supply mechanism which supplies, from an external power supply, electric power to be supplied to an electrostatic chuck. The power supply mechanism includes a first conductive annular member fixed to the end portion of a strut, and capable of rotating together with the strut, a second conductive annular member fixed to a housing, and brought into surface contact with the first conductive annular member, and a first power supply member which supplies a supplied first voltage to an electrode of the electrostatic chuck via the second conductive annular member and the first conductive annular member.
    Type: Application
    Filed: November 26, 2007
    Publication date: October 23, 2008
    Applicant: CANON ANELVA CORPORATION
    Inventors: Yasushi Miura, Kazunari Sekiya