Patents by Inventor Kazunori Furukawara

Kazunori Furukawara has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Wafer transfer mechanism
    Patent number: 6305898
    Abstract: A transfer mechanism is provided for placing a wafer at a prescribed position on an arm without any additional step. The transfer mechanism for transferring a workpiece into and from a storage section comprises an arm member for holding a workpiece having a projection which can be contacted with an edge of the workpiece at the tip end portion thereof, a movement mechanism for reciprocating the arm member between a retracted and an extended positions while holding the workpiece thereon to transfer the workpiece to and from the storage section, and a positioning member which is positioned in the vicinity of the arm member and can be contacted with the edge of the workpiece for positioning the held workpiece in a prescribed position on the arm member.
    Type: Grant
    Filed: July 16, 1999
    Date of Patent: October 23, 2001
    Assignee: ASM Japan K.K.
    Inventors: Takayuki Yamagishi, Masaei Suwada, Kazunori Furukawara