Abstract: A shovel includes a turning drive unit. The turning drive unit includes a turning electric motor, a turning speed reducer configured to transmit the rotational driving force of the turning electric motor to a turnable body, a brake unit configured to maintain the turnable body in a state where the turning of the turnable body is stopped, a case forming a space in which the turning speed reducer and the brake unit are lubricated with lubricant oil and accommodated, a collar fixed around an output shaft of the turning speed reducer so as to rotate with the output shaft and covering at least a part of a relief part formed at a time of forming splines on the output shaft, and a sealing member provided between the collar and the case and hermetically sealing the lubricant oil inside the space.

Abstract: A shovel includes: a speed reducer configured by stacking a plurality of gear speed reducers each having a sun gear, a planetary gear, an internal gear, and a carrier member supporting the planetary gear provided in a case, in a direction of an axis of rotation of an upper turning body; and a movement restriction section which is provided between the sun gear of one gear speed reducer among the gear speed reducers stacked in a plurality and another gear speed reducer stacked so as to face the sun gear and restricts movement of the sun gear of the one gear speed reducer toward the other gear speed reducer, wherein the movement restriction section is provided at the case.

Abstract: A shovel includes a turning drive unit. The turning drive unit includes a turning electric motor, a turning speed reducer configured to transmit the rotational driving force of the turning electric motor to a turnable body, a brake unit configured to maintain the turnable body in a state where the turning of the turnable body is stopped, and a case forming a space in which the turning speed reducer and the brake unit are lubricated with lubricant oil and accommodated. A recess is formed in part of the case that forms a bottom surface of the space.

Abstract: Provided is a shovel including a swiveling motor, and a swiveling speed reducer that reduces the rotational speed of an output shaft of the swiveling motor. The swiveling speed reducer includes a first gear mechanism; a first gear case that houses the first gear mechanism; a first oil check pipe that is disposed in the first gear case; a first communication portion that allows an inside of the first gear case and the first oil check pipe to communicate with each other; and a second communication portion that connects a position of the first gear case higher than a position where the first communication portion is connected, and a high position of the first oil check pipe.

Abstract: A simple planetary reduction gear includes a sun gear, a planetary gear which revolves around the sun gear and is supported by a carrier, and an internal gear with which the planetary gear internally meshes, and is used in a vertically installed state. The sun gear includes a shaft portion protruding to a load side (lower side) coaxially with a shaft center O1 of the sun gear, and the shaft portion is supported by a ball bearing which is disposed between the outer circumference of the shaft portion and the inner circumference of the carrier. Accordingly, high maintainability is secured and a problem of generation of heat is prevented.

Abstract: A shovel includes a turning drive unit. The turning drive unit includes a turning electric motor, a turning speed reducer configured to transmit the rotational driving force of the turning electric motor to a turnable body, and a brake unit configured to maintain the turnable body in a state where the turning of the turnable body is stopped. The turning speed reducer includes a planetary speed reducer including a planetary carrier. The planetary carrier includes an output shaft part that forms an output shaft and a carrier part that holds a planetary gear in such a manner as to allow the rotation of the planetary gear. The output shaft part and the carrier part are fastened by a fastening member.

Abstract: A shovel includes a turning drive unit. The turning drive unit includes a turning electric motor, a turning speed reducer configured to transmit the rotational driving force of the turning electric motor to a turnable body, and a brake unit configured to maintain the turnable body in a state where the turning of the turnable body is stopped. The turning speed reducer includes a planetary speed reducer including a planetary carrier. The planetary carrier includes an output shaft part that forms an output shaft and a carrier part that holds a planetary gear in such a manner as to allow the rotation of the planetary gear. The output shaft part and the carrier part are fastened by a fastening member.

Abstract: A shovel includes a turning drive unit. The turning drive unit includes a turning electric motor, a turning speed reducer configured to transmit the rotational driving force of the turning electric motor to a turnable body, a brake unit configured to maintain the turnable body in a state where the turning of the turnable body is stopped, and a case forming a space in which the turning speed reducer and the brake unit are lubricated with lubricant oil and accommodated. A recess is formed in part of the case that forms a bottom surface of the space.

Abstract: A shovel includes a turning drive unit. The turning drive unit includes a turning electric motor, a turning speed reducer configured to transmit the rotational driving force of the turning electric motor to a turnable body, a brake unit configured to maintain the turnable body in a state where the turning of the turnable body is stopped, a case forming a space in which the turning speed reducer and the brake unit are lubricated with lubricant oil and accommodated, a collar fixed around an output shaft of the turning speed reducer so as to rotate with the output shaft and covering at least a part of a relief part formed at a time of forming splines on the output shaft, and a sealing member provided between the collar and the case and hermetically sealing the lubricant oil inside the space.

Abstract: An apparatus for manufacturing or inspecting semiconductors comprising a main body, an opening arranged in the main body, and a safety door. The safety door includes a first door element for covering a first portion of the opening and a second door element for covering a second portion of the opening, the first door element having a movement direction along which the first door element is driven by a driving device, the second door element being urged toward the first door element along the movement direction of the first door element by an external force. If a part of a person's body should be caught between the first and second door elements, the second door element is urged against the external force by the force generated by the part of the person's body to protect the part of the person's body.

Abstract: A mechanism for tilting a microscope in which a tilting base 5 is supported by a tilting sub-base 4 at three points, and is urged toward the tilting sub-base at all times by the resilient force of initially coned disc springs 23 fitted to support bolts 20. Adjusting bolts 30 are used for the support at three points, and steel balls 34 are interposed between the lower parts of the bolts and the tilting sub-base, so that the tilting base is supported by the tilting sub-base.

Abstract: In a robot hand of an automatic handling robot for holding and carrying a semiconductor wafer or the like, the robot hand 10 itself is made of a porous material, for example, porous ceramic, and the surface portion thereof other than portions corresponding to a wafer suction portion 13 and a suction air intake 14 is coated with a film which does not permit the passage of air, for example, fluorocarbon resin or the like. Air can pass through the porous portion.