Abstract: An optical scanning device includes: a light projector configured to radiate light while causing the light to make angular movement at a constant speed; and a light reflector configured to reflect the light radiated from the light projector to guide the light to an intended irradiated point on a predetermined scanning line. The light reflector includes a plurality of reflecting portions and reflects, at least twice, the light radiated from the light projector to guide the light to the intended irradiated point. The reflecting portions each include a plurality of reflecting surfaces. A length of an optical path from the light projector to the irradiated point is substantially constant for all of irradiated points on the scanning line, and a scanning speed, on the scanning line, of the light radiated from the light projector is substantially constant.

Abstract: An optical scanning device includes: a projector configured to radiate laser light incident thereon while causing the laser light to make angular movement around a projection center, and a reflector with a parabolic surface, the reflector being configured to reflect the laser light from the projector. The projection center is positioned at a focal point of the parabolic surface. The projector radiates the laser light such that the greater a difference between a rotation angle of the laser light and a reference angle, the lower an angular speed of the laser light, the reference angle being the rotation angle of the laser light when the laser light reflects on a vertex of the parabolic surface. A laser machining device includes the optical scanning device, and is configured to cause the laser light from the reflector to fall on a workpiece to form a machining line.

Abstract: A beam head unit including beam heads configured to scan a single laser beam on a thin-film layer of a workpiece from an irradiation start side toward an irradiation end side in a direction crossing a feeding direction of the workpiece while the workpiece is fed by a constant-speed feeder; laser oscillator configured to emit the laser beam to irradiate each beam head; a controller configured to control scanning speed of the laser beam emitted from each beam head and feeding speed of the workpiece to control a machining line formed in the workpiece fed at the predetermined feeding speed. The controller is configured to switch a beam head to use to form the machining line between the beam heads to form the machining line alternately. This configuration makes it possible to form machining lines highly efficiently in the thin-film layer of the workpiece while feeding the workpiece.

Abstract: A holding device to hold a side portion of a conveyed workpiece; a running device to convey the holding device in a feeding direction along a rail; and a support mechanism to support the holding device at front portion and rear portions of the mechanism. Eccentric shafts are with the holding device at respective positions, at one position, one of front and rear portions is eccentric in the feeding direction by a predetermined amount relative to one drive shaft's axis included in the running device. At the other position, one of front and rear portions is eccentric crossing the workpiece feeding direction by a predetermined amount relative to one drive shaft's axis in the running device. The yawing occurring while the workpiece is conveyed, is corrected by rotating the axes of eccentric shafts axes such the holding device moves relative to the running device's position.

Abstract: The present invention provides a conveying device including a transfer mechanism including: a belt portion configured to support a non-pattern surface of a glass plate and transfer the glass plate in a conveying direction; and a pattern surface supporting water guide arranged at a position opposed to the belt portion and configured to apply predetermined water pressure to a pattern surface of the glass plate, wherein the transfer mechanism is configured such that: the glass plate is pressed against the belt portion by water pressure of the pattern surface supporting water guide; and the glass plate is sandwiched between the pattern surface supporting water guide and the belt portion in a state where the pattern surface of the glass plate is in a non-contact state, the conveying device being capable of stably transferring the glass plate without making scratches on the pattern surface of the glass plate.

Abstract: The present invention provides a plate member conveying apparatus configured such that an occupied area is small, and a plate member is unlikely to be damaged. A plate member conveying apparatus according to the present invention includes a feed device having a conveying portion and a pressurizing portion. The conveying portion includes a belt configured to contact one of surfaces of a plate member in a vertical state to feed the plate member in a conveying direction. The pressurizing portion applies pressure of a fluid to the other surface of the plate member in the vertical state in a direction perpendicular to the surface of the plate member to press the plate member toward the belt. Then, the plate member in the vertical state is conveyed while being held by sandwiching the plate member between the belt of the conveying portion and the fluid of the pressurizing portion.

Abstract: A beam head unit including beam heads configured to scan a single laser beam on a thin-film layer of a workpiece from an irradiation start side toward an irradiation end side in a direction crossing a feeding direction of the workpiece while the workpiece is fed by a constant-speed feeder; laser oscillator configured to emit the laser beam to irradiate each beam head; a controller configured to control scanning speed of the laser beam emitted from each beam head and feeding speed of the workpiece to control a machining line formed in the workpiece fed at the predetermined feeding speed. The controller is configured to switch a beam head to use to form the machining line between the beam heads to form the machining line alternately. This configuration makes it possible to form machining lines highly efficiently in the thin-film layer of the workpiece while feeding the workpiece.

Abstract: An optical scanning device includes: a projector configured to radiate laser light incident thereon while causing the laser light to make angular movement around a projection center, and a reflector with a parabolic surface, the reflector being configured to reflect the laser light from the projector. The projection center is positioned at a focal point of the parabolic surface. The projector radiates the laser light such that the greater a difference between a rotation angle of the laser light and a reference angle, the lower an angular speed of the laser light, the reference angle being the rotation angle of the laser light when the laser light reflects on a vertex of the parabolic surface. A laser machining device includes the optical scanning device, and is configured to cause the laser light from the reflector to fall on a workpiece to form a machining line.

Abstract: A holding device to hold a side portion of a conveyed workpiece; a running device to convey the holding device in a feeding direction along a rail; and a support mechanism to support the holding device at front portion and rear portions of the mechanism. Eccentric shafts are with the holding device at respective positions, at one position, one of front and rear portions is eccentric in the feeding direction by a predetermined amount relative to one drive shaft's axis included in the running device. At the other position, one of front and rear portions is eccentric crossing the workpiece feeding direction by a predetermined amount relative to one drive shaft's axis in the running device. The yawing occurring while the workpiece is conveyed, is corrected by rotating the axes of eccentric shafts axes such the holding device moves relative to the running device's position.

Abstract: The present invention provides a plate member conveying apparatus configured such that an occupied area is small, and a plate member is unlikely to be damaged. A plate member conveying apparatus according to the present invention includes a feed device having a conveying portion and a pressurizing portion. The conveying portion includes a belt configured to contact one of surfaces of a plate member in a vertical state to feed the plate member in a conveying direction. The pressurizing portion applies pressure of a fluid to the other surface of the plate member in the vertical state in a direction perpendicular to the surface of the plate member to press the plate member toward the belt. Then, the plate member in the vertical state is conveyed while being held by sandwiching the plate member between the belt of the conveying portion and the fluid of the pressurizing portion.

Abstract: An optical scanning device includes: a light projector configured to radiate light while causing the light to make angular movement at a constant speed; and a light reflector configured to reflect the light radiated from the light projector to guide the light to an intended irradiated point on a predetermined scanning line. The light reflector includes a plurality of reflecting portions and reflects, at least twice, the light radiated from the light projector to guide the light to the intended irradiated point. The reflecting portions each include a plurality of reflecting surfaces. A length of an optical path from the light projector to the irradiated point is substantially constant for all of irradiated points on the scanning line, and a scanning speed, on the scanning line, of the light radiated from the light projector is substantially constant.

Abstract: The present invention provides a conveying device including a transfer mechanism including: a belt portion configured to support a non-pattern surface of a glass plate and transfer the glass plate in a conveying direction; and a pattern surface supporting water guide arranged at a position opposed to the belt portion and configured to apply predetermined water pressure to a pattern surface of the glass plate, wherein the transfer mechanism is configured such that: the glass plate is pressed against the belt portion by water pressure of the pattern surface supporting water guide; and the glass plate is sandwiched between the pattern surface supporting water guide and the belt portion in a state where the pattern surface of the glass plate is in a non-contact state, the conveying device being capable of stably transferring the glass plate without making scratches on the pattern surface of the glass plate.