Abstract: Provided is a thermal flow meter including a conductive measurement tube including an inlet through which liquid enters and an outlet through which the liquid exits and including an internal flow passage extending along an axis, and a sensor substrate including a heating resistance wire and a temperature detecting resistance wire formed on a detection surface along the axis, and in the detection surface, an insulation area is formed where the heating resistance wire and the temperature detecting resistance wire are coated with a thin-film insulating material, and the insulation area is joined to the measurement tube along the axis.

Abstract: Provided is a pressure detection device comprising a pressure detection unit configured to detect pressure transmitted to a pressure detecting surface; a flow passage unit including a flow passage configured to allow fluid to flow along a flow direction from an inflow port to an outflow port, and a pressure transmitting surface configured to transmit pressure of fluid flowing through the flow passage to the pressure detecting surface; and a mounting mechanism by which the flow passage unit is removably mounted on the pressure detection unit. The pressure detecting surface includes a sliding layer having a sliding property for when the pressure detecting surface comes in contact with the pressure transmitting surface.

Abstract: A flow passage unit is detachably mounted on a pressure detection unit and detects a pressure to be transmitted to a pressure detection part. The flow passage unit includes a flexible flow passage part including a flexible flow passage which introduces liquid, flowing in the flexible flow passage part from an inflow port, to an outflow port, and which is made of a flexible material. The flow passage unit also includes a body portion configured to form a pressure transmitting space which surrounds an outer peripheral surface of the flexible flow passage part. The flow passage unit also includes a pressure transmitting part mounted on the body portion and having a thin-film shape. One surface of the pressure transmitting part faces the pressure transmitting space, and the other surface of the pressure transmitting part is capable of coming into contact with the pressure detection part.

Abstract: A thermal flowmeter including a measurement tube that has an inflow port into which a liquid flows and an outflow port that allows the liquid which flows in from the inflow port to flow out, and has an internal flow passage where the liquid flows formed to extend along an axis, and a plurality of detection sections each of which has a heating resistor and a temperature detecting resistor along the axis and is provided at the measurement tube, and a control section that calculates a flow rate of the liquid flowing through the internal flow passage based on signals from the plurality of detection sections, wherein the plurality of detection sections are respectively provided with predetermined intervals left in a circumferential direction with the axis as a center.

Abstract: Provided is a thermal flow meter including a conductive measurement tube including an inlet through which liquid enters and an outlet through which the liquid exits and including an internal flow passage extending along an axis, and a sensor substrate including a heating resistance wire and a temperature detecting resistance wire formed on a detection surface along the axis, and in the detection surface, an insulation area is formed where the heating resistance wire and the temperature detecting resistance wire are coated with a thin-film insulating material, and the insulation area is joined to the measurement tube along the axis.

Abstract: Provided is a pressure detection device comprising a pressure detection unit configured to detect pressure transmitted to a pressure detecting surface; a flow passage unit including a flow passage configured to allow fluid to flow along a flow direction from an inflow port to an outflow port, and a pressure transmitting surface configured to transmit pressure of fluid flowing through the flow passage to the pressure detecting surface; and a mounting mechanism by which the flow passage unit is removably mounted on the pressure detection unit. The pressure detecting surface includes a sliding layer having a sliding property for when the pressure detecting surface comes in contact with the pressure transmitting surface.

Abstract: To provide a flow passage unit which is detachably mounted on a pressure detection unit, the flow passage unit including: a flexible flow passage part including a flexible flow passage which introduces liquid flowing in the flexible flow passage part from an inflow port, to an outflow port, and which is made of a flexible material; a body portion configured to form a pressure transmitting space which surrounds an outer peripheral surface of the flexible flow passage part; a diaphragm mounted on the body portion and having a thin-film shape; and a pressure transmission medium filled in the pressure transmitting space, and being non-compressible, wherein the flexible flow passage is a flow passage which has a predetermined inner diameter, and which extends in a straight line along an axis.

Abstract: A thermal flowmeter including a measurement tube that has an inflow port into which a liquid flows and an outflow port that allows the liquid which flows in from the inflow port to flow out, and has an internal flow passage where the liquid flows formed to extend along an axis, and a plurality of detection sections each of which has a heating resistor and a temperature detecting resistor along the axis and is provided at the measurement tube, and a control section that calculates a flow rate of the liquid flowing through the internal flow passage based on signals from the plurality of detection sections, wherein the plurality of detection sections are respectively provided with predetermined intervals left in a circumferential direction with the axis as a center.

Abstract: Provided is a flow meter that determines a liquid flow rate based on temperature. The flow meter has a cylindrical measurement tube having an internal flow passage, and a temperature detecting substrate including a heating resistance element a temperature detecting resistance element formed on a detection surface thereof. The measurement tube has a flat surface facing the detection surface of the temperature detecting substrate, and a pair of recesses arranged so as to sandwich the internal flow passage at a position where the heating resistance element is arranged. The flat surface and the detection surface are bonded together to form two bonding area. A width of the first bonding area is narrower than a width of the second bonding area so that heat, transmitted through the measurement tube from the heating resistance element is increased.

Abstract: Provided is a pressure detection device, wherein a pressure detection unit includes: a pressure detecting diaphragm; a second connection portion; and four strain resistance portions. One of either a first connection portion or the second connection portion is formed of a magnet, and the other of either the first connection portion or the second connection portion is formed of a magnet or a magnetic body. The first connection portion and the second connection portion are arranged such that the first connection portion and the second connection portion are attracted by a magnetic force in a state where a flow passage unit is mounted on the pressure detection unit. The four strain resistance portions are attached to a region of a second surface of a pressure detecting diaphragm other than a center portion.

Abstract: Provided is a pressure detection device including: a pressure sensor including a pressure detection surface for detecting a pressure of a fluid; and a flow channel unit having a flow channel formed therein to guide the fluid to the pressure detection surface. The flow channel unit includes a flow channel body having the flow channel 21a formed therein, and an earth ring disposed in contact with the pressure sensor. The earth ring is formed of a conductive fluororesin material including a fluororesin material and a conductive material in which the fluororesin material is dispersed, and is maintained at a ground potential.

Abstract: Provided is a pressure detection device, wherein a pressure detection unit includes: a pressure detecting diaphragm; a second connection portion; and four strain resistance portions. One of either a first connection portion or the second connection portion is formed of a magnet, and the other of either the first connection portion or the second connection portion is formed of a magnet or a magnetic body. The first connection portion and the second connection portion are arranged such that the first connection portion and the second connection portion are attracted by a magnetic force in a state where a flow passage unit is mounted on the pressure detection unit. The four strain resistance portions are attached to a region of a second surface of a pressure detecting diaphragm other than a center portion.

Abstract: Provided is a pressure detection device including: a pressure sensor including a pressure detection surface for detecting a pressure of a fluid; and a flow channel unit having a flow channel formed therein to guide the fluid to the pressure detection surface. The flow channel unit includes a flow channel body having the flow channel 21a formed therein, and an earth ring disposed in contact with the pressure sensor. The earth ring is formed of a conductive fluororesin material including a fluororesin material and a conductive material in which the fluororesin material is dispersed, and is maintained at a ground potential.

Abstract: Provided is a flow meter including a cylindrical measurement tube having an internal flow passage, and a sensor substrate including a heating resistance wire and a temperature detecting resistance wire formed on a detection surface thereof along an axis. An outer circumferential surface of the measurement tube is provided with a flat surface arranged as opposed to the detection surface, and a pair of recesses arranged so as to sandwich the internal flow passage at a position where the heating resistance element is arranged. The flat surface and the detection surface are bonded together to form a bonding area A having a width in a direction orthogonal to the axis. A width of a first portion on the axis where the pair of recesses is arranged is narrower than a width of a second portion on the axis where the pair of recesses is not arranged.