Abstract: A measuring apparatus measure the amount of a metal catalyst supported on a sample that has a membrane of a metal catalyst layer containing the metal catalyst. The measuring apparatus includes a terahertz-wave emitting part that emits a terahertz wave in the range of 0.01 to 10 THz to the sample, a transmitted-terahertz-wave detection part that detects the electric field intensity of a transmitted terahertz wave that has passed through the sample, a storage that stores correlation information acquired in advance and indicating the correlation between the amount of the metal catalyst supported and the electric field intensity of the transmitted terahertz wave, and an amount-of-catalyst-supported acquisition module that acquires the amount of the metal catalyst supported on the sample, on the basis of the correlation information and the electric field intensity of the transmitted terahertz wave detected by the transmitted-terahertz-wave detection part.

Abstract: A measuring apparatus measure the amount of a metal catalyst supported on a sample that has a membrane of a metal catalyst layer containing the metal catalyst. The measuring apparatus includes a terahertz-wave emitting part that emits a terahertz wave in the range of 0.01 to 10 THz to the sample, a transmitted-terahertz-wave detection part that detects the electric field intensity of a transmitted terahertz wave that has passed through the sample, a storage that stores correlation information acquired in advance and indicating the correlation between the amount of the metal catalyst supported and the electric field intensity of the transmitted terahertz wave, and an amount-of-catalyst-supported acquisition module that acquires the amount of the metal catalyst supported on the sample, on the basis of the correlation information and the electric field intensity of the transmitted terahertz wave detected by the transmitted-terahertz-wave detection part.

Abstract: A method is capable of easily forming a colored layer such as color filters or organic EL layers only in an active region on a transparent substrate for manufacturing a color liquid crystal display or an organic EL display unit. The method includes the steps of: forming a fine partition of a predetermined pattern using a light-blocking material in an active region on the surface of the transparent substrate, and depositing a light-blocking material into a non-active region; applying plural colors of coloring materials containing a colorant and a photosensitive resin into fine recesses separated by the fine partitions while relatively scanning a nozzle discharging a coloring material with respect to the transparent substrate; exposing the transparent substrate from back side to apply the plural colors and cure; and developing the surface side of the transparent substrate, dissolving the coloring materials applied into the non-active region and remaining not cured, and removing the materials.

Abstract: A substrate rinsing apparatus of a non-contact type having a high rinsing ability. An ultrasonic rinsing nozzle and a high-pressure rinsing nozzle are both disposed within the same rinsing apparatus. The ultrasonic rinsing nozzle ejects ultrasonic rinsing liquid as a curtain through a slit, while the high-pressure rinsing nozzle ejects a high-pressure rinsing jet toward the ultrasonic rinsing liquid which is ejected toward a substrate. Not only is foreign matter removed by ultrasonic rinsing, but foregoing matter is removed by the high-pressure rinsing jet and is carried away by a flow of the ultrasonic rinsing liquid and washed off the substrate toward a downstream side of rotation of the substrate.

Abstract: A substrate processing apparatus is provided which requires a reduced installation space and allows for ready change of a process order. A substrate processing apparatus includes: a first transportation mechanism movable along a first transportation path in a predetermined transportation direction; a cassette load portion provided on one side of the transportation path; a plurality of unit portions arranged in a direction crossing the transportation direction on the other side of the first transportation path; and a second transportation mechanism disposed between each two adjacent unit portions and movable along a second transportation path in the transportation direction. The first transportation mechanism can perform a substrate transferring operation with respect to a cassette placed on the cassette load portion and a processing unit in a unit portion disposed in closest proximity to the first transportation path among the plurality of unit portions.

Abstract: A fluid application apparatus of the present invention includes a rotatable substrate holding mechanism (4), a photoresist liquid supply portion (5) and a motor mechanism (26). The photoresist liquid supply portion (5) supplies resist fluid to a region smaller than the entire region of the substrate surface while moving in the horizontal direction relative to the substrate holding mechanism (4). The motor mechanism (26) rotates the substrate holding mechanism (4) to diffuse the resist fluid over the entire surface of the substrate and form a resist layer having a predetermined thickness.

Abstract: A roll coater for forming a film of uniform thickness on a substrate W includes a bottom plate 6 for transporting the substrate W in a predetermined direction F, a coating rubber roll 4 for transferring a coating liquid Q adhering to the outer circumferential face onto the substrate W, and an ink supplying device for supplying ink to the outer circumferential face of the roll 4. The ink supplying device includes a roll 1 for transferring the coating liquid Q adhering to the outer circumferential face thereof to the outer circumferential surface of a roll 4, metal doctor 2 for supplying a coated film of a coating liquid Q of uniform thickness, and a coating liquid reservoir 3 for storing coating liquid Q. A scraper 7 for scraping the remaining coating liquid Q on the outer circumferential face of the metal roll 1 is provided downstream of the roll 4 and upstream of the coating liquid reservoir 3.

Abstract: A method of forming a thin film on the surface of a substrate using a roll coater without forming a projection of the thin film near the rear edge of the substrate includes the steps of: loading a substrate on a stage, moving the stage in a predetermined direction up to a certain position where at least a portion of the surface of the substrate comes into contact with the applicator roll while controlling the operation of the roll coating apparatus so that the amount of coating fluid transferred per unit area from the applicator roll to the substrate surface is a predetermined value, and further moving the stage in the predetermined direction to cancel the contact between the surface of the substrate and the applicator roll while controlling the operation of the roll coating apparatus so that the amount of coating fluid transferred per unit area from the applicator roll to the substrate surface is relatively reduced.

Abstract: An improved roll coating apparatus and method includes a coating roll having a smooth surface for applying a resist, a doctor roll having grooves on its surface for supplying prescribed amount of the resist to the coating roll, and a back up roll which is in contact with the coating roll for conveying a substrate on which the resist is applied to a prescribed direction. Even if there are minute concave portions on the surface of the substrate, the resist is forced to fill the minute concave portions, since the resist is pressed and forced to be applied on the substrate by the coating roll having smooth surface and the back up roll.

Abstract: A roll coating apparatus for applying a coating liquid having a high viscosity at a normal temperature, to a surface of a substrate, including a device for feeding the substrate, a coating roll rotatably provided in contact with the fed substrate, and a doctor for regulating the coating liquid adhering to the coating roll to a prescribed amount. Respective axial lines of the coating roll and the doctor are inclined with a prescribed angle with respect to the horizontal plane and a coating liquid supply device is provided at the highest position thereof. The coating liquid supplied at the highest end of the coating roll adheres to the surface of the coating roll. The quantity thereof is controlled by the doctor. The coating liquid flows downward on the surface of the coating roll due to its weight and rotation of the coating roll. Accordingly, the coating liquid on the surface of the coating roll is constantly renewed and no irregularities occur to the density of the liquid.