Abstract: A device for joining substrates (11) is provided inside a clean booth (12). a single axis robot (46) and a five axis robot (47) convey a wafer (25) and a glass substrate (33). A transcribing station (91) obtains a transcribing film (112) on which adhesive is applied from a film supplying section (113), and presses the transcribing film (112) to the glass substrate (33) so as to transcribe the adhesive to the glass substrate (33). A peeling station (92) peels the transcribing film (112) from the glass substrate (33). A joining station (57) positions the wafer (25) and the glass substrate (33), adjusts parallelism of joining surfaces of the wafer (25) and the glass substrate (33), and joins these substrates together. Since the handling and the joining of the wafer (25), the glass substrate (33) and the transcribing film (112) are performed in the clean booth, it is prevented that a yield ratio of the product decreases because of the adhesion of foreign matters.

Abstract: The present invention provides a fluid mixing apparatus having a numbering-up mechanism that distributes plural kinds of fluids and concurrently performs multiple mixing or reactions, comprising: a rectifying section having a plurality of annular channels that rectify the plural kinds of fluids into respective concentric annular flows; a distribution section having a plurality of distribution channels that distribute the plural kinds of fluids rectified by the rectifying section into a plurality of flows; a converging section having a plurality of converging channels that converge different kinds of fluids among the plural kinds of fluids distributed by the distribution section; and a mixing/reaction section having a plurality of mixing/reaction channels that cause mixing or reaction of the plural kinds of fluids converged by the converging section, wherein a plurality of pressure loss increasing devices are provided in the distribution channels.

Abstract: A device for joining substrates (11) is provided inside a clean booth (12). a single axis robot (46) and a five axis robot (47) convey a wafer (25) and a glass substrate (33). A transcribing station (91) obtains a transcribing film (112) on which adhesive is applied from a film supplying section (113), and presses the transcribing film (112) to the glass substrate (33) so as to transcribe the adhesive to the glass substrate (33). A peeling station (92) peels the transcribing film (112) from the glass substrate (33). A joining station (57) positions the wafer (25) and the glass substrate (33), adjusts parallelism of joining surfaces of the wafer (25) and the glass substrate (33), and joins these substrates together. Since the handling and the joining of the wafer (25), the glass substrate (33) and the transcribing film (112) are performed in the clean booth, it is prevented that a yield ratio of the product decreases because of the adhesion of foreign matters.

Abstract: A device for joining substrates (11) is provided inside a clean booth (12). a single axis robot (46) and a five axis robot (47) convey a wafer (25) and a glass substrate (33). A transcribing station (91) obtains a transcribing film (112) on which adhesive is applied from a film supplying section (113), and presses the transcribing film (112) to the glass substrate (33) so as to transcribe the adhesive to the glass substrate (33). A peeling station (92) peels the transcribing film (112) from the glass substrate (33). A joining station (57) positions the wafer (25) and the glass substrate (33), adjusts parallelism of joining surfaces of the wafer (25) and the glass substrate (33), and joins these substrates together. Since the handling and the joining of the wafer (25), the glass substrate (33) and the transcribing film (112) are performed in the clean booth, it is prevented that a yield ratio of the product decreases because of the adhesion of foreign matters.

Abstract: An apparatus for processing a rolled article has a rotary supporting mechanism for rotatably supporting opposite ends of a photosensitive roll, an end drawing mechanism for drawing a sheet end of the photosensitive roll to a prescribed length, a pressing mechanism for supporting opposite surfaces of the sheet end, and an applying mechanism for applying a joint tape to the sheet end supported by the pressing mechanism in a transverse direction of the photosensitive roll.

Abstract: In monitoring a stratum disposal field for wastes, running tubes installed in the vicinity of a gallery or disposal holes, in a nearby rock bed, or within a gallery support or buffer members in the disposal holes have installed therein a movable monitoring device provided with various sensors, a water sampling device and the like. The monitoring device may be movable or fixed in a predetermined position, for measurement of the temperature, displacement, strain, stress and underground water in connection with the rock bed, the gallery support or the disposal space buffer members. Measurement of the clearances in the rock bed, the gallery support back or the disposal space buffer members is monitored. Also, sampling of underground water in the rock bed, the gallery support or the buffer members is effected, thus reducing the number of sensors, drilled holes, communication cables to facilitate the exchange or maintenance of the sensors, communication cables and the like.

Abstract: The present invention provides a fluid mixing apparatus having a numbering-up mechanism that distributes plural kinds of fluids and concurrently performs multiple mixing or reactions, comprising: a rectifying section having a plurality of annular channels that rectify the plural kinds of fluids into respective concentric annular flows; a distribution section having a plurality of distribution channels that distribute the plural kinds of fluids rectified by the rectifying section into a plurality of flows; a converging section having a plurality of converging channels that converge different kinds of fluids among the plural kinds of fluids distributed by the distribution section; and a mixing/reaction section having a plurality of mixing/reaction channels that cause mixing or reaction of the plural kinds of fluids converged by the converging section, wherein a plurality of pressure loss increasing devices are provided in the distribution channels.

Abstract: A device for joining substrates (11) is provided inside a clean booth (12). a single axis robot (46) and a five axis robot (47) convey a wafer (25) and a glass substrate (33). A transcribing station (91) obtains a transcribing film (112) on which adhesive is applied from a film supplying section (113), and presses the transcribing film (112) to the glass substrate (33) so as to transcribe the adhesive to the glass substrate (33). A peeling station (92) peels the transcribing film (112) from the glass substrate (33). A joining station (57) positions the wafer (25) and the glass substrate (33), adjusts parallelism of joining surfaces of the wafer (25) and the glass substrate (33), and joins these substrates together. Since the handling and the joining of the wafer (25), the glass substrate (33) and the transcribing film (112) are performed in the clean booth, it is prevented that a yield ratio of the product decreases because of the adhesion of foreign matters.

Abstract: An apparatus for processing a rolled article has a rotary supporting mechanism for rotatably supporting opposite ends of a photosensitive roll, an end drawing mechanism for drawing a sheet end of the photosensitive roll to a prescribed length, a pressing mechanism for supporting opposite surfaces of the sheet end, and an applying mechanism for applying a joint tape to the sheet end supported by the pressing mechanism in a transverse direction of the photosensitive roll.

Abstract: A method of constructing underground galleries using a pneumatic transfer system and a stratum disposal method are provided, wherein in constructing a disposal gallery of a stratum disposal site and tunnels such as mountain tunnels or in performing stratum disposal of waste matter, the carrying-out of excavation chips or the like, the carrying-in of materials and equipment or the like and the carrying-in and positioning of waste matter may be effected safely, quickly and reliably at low cost, and the buffer material quality for waste matter may be secured. In construction, an air carrying pipeline (10) is used while extending the air carrying pipeline (10) downward as desired during excavation of a vertical shaft (2) so as to carry out vertical shaft excavation chips (a) to the ground and carry in materials and equipment including vertical shaft spray concrete (b) to the underground site.

Abstract: A system for automatically packaging photosensitive rolls includes a flanged member installing device for selecting flanged members corresponding to a photosensitive roll and automatically installing the flanged members respectively on opposite ends of the photosensitive roll, a tape member applying device for automatically applying a joint tape to an end of the photosensitive roll, a packaging sheet working device for automatically processing light-shielding leaders to dimensions corresponding to the photosensitive roll, an applying mechanism for automatically applying the processed light-shielding leaders to the photosensitive roll, and a packaging sheet takeup device for automatically winding the light-shielding leaders around the photosensitive roll.

Abstract: The present invention provides a method of manufacturing solid-state imaging devices comprising the steps of: forming a large number of solid-state image sensing devices over a wafer; forming, in positions matching said solid-state image sensing devices on the under face of a transparent flat plate to be joined to said wafer, frame-shaped spacers of a prescribed thickness each in a shape of surrounding an individual solid imaging element; aligning said wafer and said transparent flat plate opposite each other; supporting with a fixed table substantially the whole of one of the under face of said wafer and the upper face of said transparent flat plate, supporting substantially the other face with a pressing member via an elastic member, and thereby joining said wafer and said transparent flat plate via said spacers by the pressing member; and splitting said wafer and said transparent flat plate individual solid-state image sensing devices.

Abstract: An apparatus for processing a rolled article has a rotary supporting mechanism for rotatably supporting opposite ends of a photosensitive roll, an end drawing mechanism for drawing a sheet end of the photosensitive roll to a prescribed length, a pressing mechanism for supporting opposite surfaces of the sheet end, and an applying mechanism for applying a joint tape to the sheet end supported by the pressing mechanism in a transverse direction of the photosensitive roll.

Abstract: A method of constructing underground galleries using a pneumatic transfer system and a stratum disposal method are provided, wherein in constructing a disposal gallery of a stratum disposal site and tunnels such as mountain tunnels or in performing stratum disposal of waste matter, the carrying-out of excavation chips or the like, the carrying-in of materials and equipment or the like and the carrying-in and positioning of waste matter may be effected safely, quickly and reliably at low cost, and the buffer material quality for waste matter may be secured. In construction, an air carrying pipeline (10) is used while extending the air carrying pipeline (10) downward as desired during excavation of a vertical shaft (2) so as to carry out vertical shaft excavation chips (a) to the ground and carry in materials and equipment including vertical shaft spray concrete (b) to the underground site.

Abstract: In monitoring a stratum disposal field for wastes, running tubes installed in the vicinity of a gallery or disposal holes, in a nearby rock bed, or within a gallery support or buffer members in the disposal holes have installed therein a movable monitoring device provided with various sensors, a water sampling device and the like. The monitoring device may be movable or fixed in a predetermined position, for measurement of the temperature, displacement, strain, stress and underground water in connection with the rock bed, the gallery support or the disposal space buffer members. Measurement of the clearances in the rock bed, the gallery support back or the disposal space buffer members is monitored. Also, sampling of underground water in the rock bed, the gallery support or the buffer members is effected, thus reducing the number of sensors, drilled holes, communication cables to facilitate the exchange or maintenance of the sensors, communication cables and the like.

Abstract: A system for automatically packaging photosensitive rolls includes a flanged member installing device for selecting flanged members corresponding to a photosensitive roll and automatically installing the flanged members respectively on opposite ends of the photosensitive roll, a tape member applying device for automatically applying a joint tape to an end of the photosensitive roll, a packaging sheet working device for automatically processing light-shielding leaders to dimensions corresponding to the photosensitive roll, an applying mechanism for automatically applying the processed light-shielding leaders to the photosensitive roll, and a packaging sheet takeup device for automatically winding the light-shielding leaders around the photosensitive roll.

Abstract: An apparatus for processing a rolled article has a rotary supporting mechanism for rotatably supporting opposite ends of a photosensitive roll, an end drawing mechanism for drawing a sheet end of the photosensitive roll to a prescribed length, a pressing mechanism for supporting opposite surfaces of the sheet end, and an applying mechanism for applying a joint tape to the sheet end supported by the pressing mechanism in a transverse direction of the photosensitive roll.

Abstract: A pillow type packaging apparatus has a suction belt for conveying flexible continuous sheet material. A guide unit guides the continuous sheet material being conveyed, and forms the continuous sheet material into a quadrangular tube in which a pair of its longitudinal edges are confronted with each other. A center sealer thermally seals up the longitudinal edges. An inserter inserts an article into the tube through the guide unit. The tube is formed into a packaging bag by cutting and sealing. In the guide unit, an inner guide frame is inside an outer guide frame. The outer guide frame includes first to fourth corner portions, which are disposed in a quadrangular shape, have inside edges in contact with the continuous sheet material, and shape the continuous sheet material into the tube. The first to fourth corner portions are movable in directions of width and height of the continuous sheet material. The tube is changeable in a size.

Abstract: A pillow type packaging apparatus has a suction belt for conveying flexible continuous sheet material. A guide unit guides the continuous sheet material being conveyed, and forms the continuous sheet material into a quadrangular tube in which a pair of its longitudinal edges are confronted with each other. A center sealer thermally seals up the longitudinal edges. An inserter inserts an article into the tube through the guide unit. The tube is formed into a packaging bag by cutting and sealing. In the guide unit, an inner guide frame is inside an outer guide frame. The outer guide frame includes first to fourth corner portions, which are disposed in a quadrangular shape, have inside edges in contact with the continuous sheet material, and shape the continuous sheet material into the tube. The first to fourth corner portions are movable in directions of width and height of the continuous sheet material. The tube is changeable in size.

Abstract: A pillow type packaging apparatus has a suction belt for conveying flexible continuous sheet material. A guide unit guides the continuous sheet material being conveyed, and forms the continuous sheet material into a quadrangular tube in which a pair of its longitudinal edges are confronted with each other. A center sealer thermally seals up the longitudinal edges. An inserter inserts an article into the tube through the guide unit. The tube is formed into a packaging bag by cutting and sealing. In the guide unit, an inner guide frame is inside an outer guide frame. The outer guide frame includes first to fourth corner portions, which are disposed in a quadrangular shape, having inside edges in contact with the continuous sheet material, and shape the continuous sheet material into the tube. The first to fourth corner portions are movable in directions of width and height of the continuous sheet material. The tube is changeable in size.