Abstract: To provide a simple highly-pure Xe retrieval method and device with high retrieval efficiency by functionally removing such elements as water, CO2 and FCs from waste gases from semiconductor production processes, such as the plasma etching, that contain low-concentration Xe. For samples containing xenon and fluorocarbon, this invention is characterized by having at least first adsorption means (A1) filled with synthetic zeolite with pore size of 4A or smaller and aluminum oxide, arranged serially, gas separation means (A2) composed of silicone or polyethylene hollow fiber gas separation membrane modules 4, second adsorption means (A3) filled with either activated carbon, synthetic zeolite with pore size of 5A or larger, molecular sieving carbon with pore size of 5A or larger, or a combination of these, and reaction means (A4) filled with calcium compounds as reactant.

Abstract: To provide a simple highly-pure Xe retrieval method and device with high retrieval efficiency by functionally removing such elements as water, CO2 and FCs from waste gases from semiconductor production processes, such as the plasma etching, that contain low-concentration Xe. For samples containing xenon and fluorocarbon, this invention is characterized by having at least first adsorption means (A1) filled with synthetic zeolite with pore size of 4A or smaller and aluminum oxide, arranged serially, gas separation means (A2) composed of silicone or polyethylene hollow fiber gas separation membrane modules 4, second adsorption means (A3) filled with either activated carbon, synthetic zeolite with pore size of 5A or larger, molecular sieving carbon with pore size of 5A or larger, or a combination of these, and reaction means (A4) filled with calcium compounds as reactant.

Abstract: To provide a liquefied gas supply device and supply method that has good operability and a compact structure, and enables stable supply of large flow rates of liquefied gas while managing the consumption amount of liquefied gas promptly in real time. A liquefied gas supply device characterized by having container 1 filled with liquefied gas, load cell 2 for measuring the weight of container 1, halogen lamp unit 3 for heating container 1, and a gas transfer means to transfer gas in the gas-phase section of container1, and arranging halogen lamp unit 3, comprising halogen lamp heater 3a and space 3b for the lamp, and load cell 2 in an integrated structure at bottom section 1a of container 1.

Abstract: The present invention provides a gas leakage detecting apparatus capable of detecting a gas leak in a cylinder cabinet with accuracy. The gas leakage detecting apparatus comprises a first air take-out pipe for taking out air from the inside of an exhaust duct of a cylinder cabinet and leading the same air to a gas sensor; a second air take-out pipe for taking out air at a given position in said cylinder cabinet and leading the same air to said gas sensor; a first shut-off valve and a second shut-off valve respectively provided on the respective air take-out pipes so that air from these air take-out pipes is selectively led to said gas sensor; and a control means for controlling the opening and closing operation of these shut-off valves. Owing to this construction, one is able to monitor the location of the gas leak upon taking out air from the cylinder cabinet through the second air take-out pipe.

Abstract: The present invention provides a means for preventing, in a cylinder cabinet, the improper securing of a gas container due to human error or the like. The cylinder cabinet comprises a securing means for securing a gas container therein, a control means for managing and controlling a series of steps for carrying out a gas container-exchange operation, and a detection means for detecting whether the gas container is properly secured. When the detection means detects that the new container is improperly secured, the control means places the gas container-exchange operation on stand-by until the container is properly secured.

Abstract: The present invention provides a flow rate regulation apparatus capable of accurately measuring the flow velocity of air flowing through an exhaust duct and carrying out a flow rate regulation with high precision, though said exhaust duct may be short in length. The flow rate regulation apparatus according to the present invention comprises a means for regulating the sectional area of a passage in an exhaust duct, where the passage is formed at the center of said exhaust duct and said passage is shaped to be symmetrical with respect to the center axis AX of said exhaust duct as a basis. Since the passage formed in the exhaust duct by the passage sectional area regulation means is shaped so as to be symmetrical, no turbulence takes place in an air current flowing along the center axis AX of the exhaust duct. Flow velocity can be accurately determined and maintained by using air velocity measurements along the center axis.

Abstract: Provided are a novel system and method for delivery of a vapor phase product to a point of use, as well as a novel on-site chemical distribution system and method. The system for delivery of a vapor phase product includes a storage vessel containing a liquid chemical under its own vapor pressure, a column connected to receive the chemical in liquified state from the storage vessel, wherein the chemical is fractionated into a contaminated liquid heavy fraction and a purified light vapor fraction and a conduit connected to the column for removing the purified light vapor fraction therefrom. The system is connected to the point of use for introducing the purified vapor fraction thereto. Particular applicability is found in semiconductor manufacturing in the delivery of electronic specialty gases to one or more semiconductor processing tools.

Abstract: The present invention provides a heating apparatus for effectively heating a gas container, and more particularly a liquified gas filled in the gas container. The heating apparatus comprises a mounting base having a first space and a second space, each formed in its inside, and an air fan heater for supplying heated air to the first space of said mounting base. In said mounting base, a first through hole communicating with said first space and second through holes communicating with said second space are formed inside of a mounting area, and third through holes communicating with said second space are formed outside of said mounting area. When a gas container is mounted on the mounting base, the heated air is blasted from said first space onto the bottom face of said gas container through said first through hole, whereby heat is effectively transmitted from the bottom face of the gas container to the liquified gas contents of the gas container.

Abstract: The present invention is intended to provide an apparatus capable of detecting an air tube-detached state when said air tube has been detached from an air-actuated valve in order that the same air-actuated valve is caused to assume a closed state. The present invention relates to an air tube connection state detecting apparatus 10 for detecting whether the fore end of an air tube 56 for supplying compressed air to an air-actuated valve 16 for a gas container 12 is connected to said air-actuated valve 16 or not. The air tube connection state detecting apparatus comprises a to-be-contacted member 82, provided at a predetermined position separate from said air-actuated valve 16, to which the fore end of said air tube 56 is to be connected; and a detection means 86 for detecting that the fore end of said air tube 56 is connected to said to-be-connected member 82.

Abstract: A gas supply system equipped with cylinders, in which the fear of a dangerous feed gas flowing backward to a purge gas introduction line and the likes can be prevented, is provided.?Construction!A piping portion B1 which becomes a negative pressure area is demarcatedly formed in a purge gas introduction line B by arranging two valves V3 and V7 in series therein, and in the piping portion B1 demarcatedly formed by these two valves V3 and V7, a gas in the piping portion B1 is led to a vent line D through a vent line D2 having a third valve V8 provided therein, and a pressure sensor 12 is placed for detecting the gas pressure in the piping portion B1. If any trouble takes place in the valve V3 or valve V8, a raise in pressure will be generated in the piping portion B1 in which the inner volume thereof is made small. By detecting this raise in pressure by the pressure sensor 12, the fear of a feed gas flowing backward to the purge gas introduction line B can be quickly detected.

Abstract: A method of detecting a malfunction or failure of a pressure regulator in a corrosive or reactive gas distribution system while in use involves continuously measuring or monitoring the output pressure of the pressure regulator, both in the presence and the absence of gas flow. The onset of a malfunction of the pressure regulator can be predicted when the differential output pressure between flowing and non-flowing gas fluctuates highly and increases gradually. Failure of the pressure regulator or of the total system is detected when the differential output pressure in the presence and absence of flowing gas exceeds some experimentally determined value.

Abstract: An evaporated gas supply method in which the liquid seal of an evaporated gas can be effectively avoided, is provided. According to the present invention, there is provided an evaporated gas supply method in which an evaporated gas having a primary pressure filled in a cylinder is reduced in pressure to a secondary pressure through adiabatic expansion, and the evaporated gas having the secondary pressure is supplied to a predetermined consuming installation, and which comprises a step of cooling down an evaporated gas in a cylinder, whereby the enthalpy of the evaporated gas (2) filled in the said cylinder is increased over an enthalpy of the secondary pressure on the saturated vapor line in a pressure-enthalpy diagram of the same evaporated gas, and a step of adiabatically expanding the evaporated gas filled in the cylinder so that its pressure is reduced, and supplying the evaporated gas having the reduced pressure to said consuming installation.

Abstract: A pipe impurity removing apparatus and process is provided, in which moisture adhered on the inner peripheral surface of a supply line can be surely removed, regardless of the pre- or post-completion of a piping execution, and the reduction of its working time can be aimed at. The inner peripheral surface of a pipe 30 which constitutes a supply line 3 for a semiconductor manufacturing unit, is coated or surface-modified with chromium oxide 6 which is a dielectric. A purge gas is caused to flow through the pipe 30 from the upperstream side to the downstream side, and an impurity remover 7 is engaged with the pipe 30 and high-frequency induction heating is applied thereto to heat the chromium oxide 6, whereby moisture adsorbed on the chromium oxide 6 is exhausted and removed together with the purge gas indicated by an arrowmark from the inside of the pipe 30 to the atmosphere.

Abstract: The invention relates to safety device for a cylinder valve automatic switching unit, wherein said valve is automatically closed when some abnormality such as down of an air pressure takes place. A first air-operated selector valve 8 is installed which causes air flowing out of a reservoir tank 10 to flow into a second supply line 3 when air pressure is reduced, whereby a cylinder valve automatic switching unit 1 in the opening situation is caused to make a closing motion for closing a cylinder valve in the opened situation. And, a second air-operated selector valve 9 is further installed which discharges air flowing out of a first supply line 2 to the atmosphere when the air pressure is reduced.