Abstract: The object is to provide a method and device to detect internal defect in the weld overlaid portion of erosion resistant material in the border portion between the blade profile and the shroud of a turbine blade with high accuracy by a static test method for an individual turbine blade applying a resultant pressing force, corresponding to centrifugal force and untwisting force of the turbine blade 10 in operation of the turbine, to the shroud 12 with installing the blade root 18 of the turbine blade 10 to the blade root retainer 20 and applying a force in the direction of centrifugal force on the blade root 18 from outside of the blade root retainer 20 to eliminate backlash between the blade root 18 and blade root retainer 20, retaining securely the shroud 12 on the side opposite to the portion which is applied the pressing force, and implementing simulated test of centrifugal stress in the weld-overlaid portion by applying the resultant pressing force, corresponding to centrifugal force and untwisting force

Abstract: A diffraction element is disposed between a beam branching element (such as a beam splitter) and a photodetector. The diffraction element further segment an interference fringe introduced into stray light by a diffraction grating which divides a laser beam emitted from a laser beam source into a main beam and two sub-beams.

Abstract: An optical element is disposed on an optical path between a beam branching element and a photodetector. The optical element is disposed at a focal position of a stray light beam reflected by a recording layer except a target recording layer, and shields or attenuates the light beam in a region where the stray light beam converges.

Abstract: A method of manufacturing an element having a microstructure of an excellent grating groove pattern or the like is obtained. This method of manufacturing an element having a microstructure comprises steps of forming a metal layer on a substrate, forming a dot column of concave portions on the surface of the metal layer and anodically oxidizing the surface of the metal layer formed with the dot column of concave portions while opposing this surface to a cathode surface thereby forming a metal oxide film having a grating groove pattern. When the interval between the concave portions of the dot column is reduced, therefore, a linear grating groove pattern having a large depth with a uniform groove width along the depth direction is easily formed in a self-organized manner.

Abstract: A laser beam emitted from a light source is divided into a main beam and two sub-beams by a diffraction grating. A filter is arranged between a collimator lens and an objective lens. A filter unit is arranged in a predetermined pattern in the filter. The filter unit gives a maximum transmittance or a maximum reflectance at an incident angle at which the laser beam is incident in a parallel light state. The filter unit is formed in a pattern in which at least the laser beam reflected from a layer except a recording layer of an irradiation target is prevented from entering a sub-beam sensor pattern.

Abstract: In a semiconductor laser device including a package for airtight sealing, and a semiconductor laser element provided in the package, a moisture concentration inside the package is 2500 ppm or less and arithmetic mean roughness in at least one portion of an inner surface of the package is 0.3 ?m or less.

Abstract: A method of manufacturing an element having a microstructure of an excellent grating groove pattern or the like is obtained. This method of manufacturing an element having a microstructure comprises steps of forming a metal layer on a substrate, forming a dot column of concave portions on the surface of the metal layer and anodically oxidizing the surface of the metal layer formed with the dot column of concave portions while opposing this surface to a cathode surface thereby forming a metal oxide film having a grating groove pattern. When the interval between the concave portions of the dot column is reduced, therefore, a linear grating groove pattern having a large depth with a uniform groove width along the depth direction is easily formed in a self-organized manner.

Abstract: A control system comprises a control apparatus 17 that controls a process apparatus 10, which performs a predetermined process on a wafer W, based on plural pieces of process information to be detected in the process apparatus 10, and alarm generation means 21 which generates an alarm when the detected process information is off a predetermined range. The control apparatus 17 grasps the generation state of an alarm, and gives warning when the generation state reaches a predetermined threshold.

Abstract: A method of manufacturing an element having a microstructure of an excellent grating groove pattern or the like is obtained. This method of manufacturing an element having a microstructure comprises steps of forming a metal layer on a substrate, forming a dot column of concave portions on the surface of the metal layer and anodically oxidizing the surface of the metal layer formed with the dot column of concave portions while opposing this surface to a cathode surface thereby forming a metal oxide film having a grating groove pattern. When the interval between the concave portions of the dot column is reduced, therefore, a linear grating groove pattern having a large depth with a uniform groove width along the depth direction is easily formed in a self-organized manner.

Abstract: In a holographic pattern provided in a holographic optical element, a pattern 1a twists a diffracted light beam in a clockwise direction, to form a semi-circular light spot Sa on photodetection parts A and B so as to extend over a dividing line LX in a four-segment photodetection part. A pattern 1b similarly twists the diffracted light beam in a clockwise direction, to form a semi-circular light spot Sb on photodetection parts C and D so as to extend over a dividing line LX in the four-segment photodetection part.

Abstract: The present invention provides a wave plate capable of obtaining preferable phase conversion characteristic over a wide wavelength range. The wave plate includes an aluminum oxide film having linear grating groove patterns. The period L (?m) and the duty ratio De of the grating groove patterns are set at values within the first range specified by the following four formulas: L?0.65 L?2×10?14e31.263De L?6.0317De2?10.352De+5.0516 (De?0.85)2/0.442+(L?0.41)2/0.

Abstract: A surface emission semiconductor laser device capable of substantially completely controlling the plane of polarization is obtained. This surface emission semiconductor laser device comprises a first multi-layer reflector, an emission layer formed on the first multi-layer reflector and a second multi-layer reflector formed on the emission layer, and at least either the first multi-layer reflector or the second multi-layer reflector includes a striped part worked in a striped manner in a prescribed period.

Abstract: A method of manufacturing an element having a microstructure of an excellent grating groove pattern or the like is obtained. This method of manufacturing an element having a microstructure comprises steps of forming a metal layer on a substrate, forming a dot column of concave portions on the surface of the metal layer and anodically oxidizing the surface of the metal layer formed with the dot column of concave portions while opposing this surface to a cathode surface thereby forming a metal oxide film having a grating groove pattern. When the interval between the concave portions of the dot column is reduced, therefore, a linear grating groove pattern having a large depth with a uniform groove width along the depth direction is easily formed in a self-organized manner.

Abstract: A method of manufacturing an element having a microstructure of an excellent grating groove pattern or the like is obtained. This method of manufacturing an element having a microstructure comprises steps of forming a metal layer on a substrate, forming a dot column of concave portions on the surface of the metal layer and anodically oxidizing the surface of the metal layer formed with the dot column of concave portions while opposing this surface to a cathode surface thereby forming a metal oxide film having a grating groove pattern. When the interval between the concave portions of the dot column is reduced, therefore, a linear grating groove pattern having a large depth with a uniform groove width along the depth direction is easily formed in a self-organized manner.

Abstract: In a holographic pattern provided in a holographic optical element, a pattern 1a twists a diffracted light beam in a clockwise direction, to form a semi-circular light spot Sa on photodetection parts A and B so as to extend over a dividing line LX in a four-segment photodetection part. A pattern 1b similarly twists the diffracted light beam in a clockwise direction, to form a semi-circular light spot Sb on photodetection parts C and D so as to extend over a dividing line LX in the four-segment photodetection part.

Abstract: In a holographic pattern provided in a holographic optical element, a pattern 1a twists a diffracted light beam in a clockwise direction, to form a semi-circular light spot Sa on photodetection parts A and B so as to extend over a dividing line LX in a four-segment photodetection part. A pattern 1b similarly twists the diffracted light beam in a clockwise direction, to form a semi-circular light spot Sb on photodetection parts C and D so as to extend over a dividing line LX in the four-segment photodetection part.

Abstract: A six-segment holographic surface is divided into regions by dividing lines. A four-segment photodetection part is divided into four photodetection parts equal in area by a section line substantially parallel to the radial direction of an optical disk and a section line orthogonal thereto. A main light beam diffracted in the regions of the six-segment holographic surface are condensed as spots at positions apart from each other on opposite sides on a section line of the four photodetection parts, and the main beam diffracted in the regions is condensed as spots in the center of the photodetection parts of the four-segment photodetection part.

Abstract: The present invention provides a wave plate capable of obtaining preferable phase conversion characteristic over a wide wavelength range. The wave plate includes an aluminum oxide film having linear grating groove patterns. The period L (?m) and the duty ratio De of the grating groove patterns are set at values within the first range specified by the following four formulas: L?0.65 L?2×10?14e31.263De L?6.0317De2?10.352De+5.0516 (De?0.85)2/0.442+(L?0.41)2/0.

Abstract: A method of manufacturing an element having a microstructure of an excellent grating groove pattern or the like is obtained. This method of manufacturing an element having a microstructure comprises steps of forming a metal layer on a substrate, forming a dot column of concave portions on the surface of the metal layer and anodically oxidizing the surface of the metal layer formed with the dot column of concave portions while opposing this surface to a cathode surface thereby forming a metal oxide film having a grating groove pattern. When the interval between the concave portions of the dot column is reduced, therefore, a linear grating groove pattern having a large depth with a uniform groove width along the depth direction is easily formed in a self-organized manner.

Abstract: A surface emission semiconductor laser device capable of substantially completely controlling the plane of polarization is obtained. This surface emission semiconductor laser device comprises a first multi-layer reflector, an emission layer formed on the first multi-layer reflector and a second multi-layer reflector formed on the emission layer, and at least either the first multi-layer reflector or the second multi-layer reflector includes a striped part worked in a striped manner in a prescribed period.