Abstract: An electrode to be used for an electrostatic charged particle beam lens includes at least one through hole. The at least one through hole includes a first region having a first opening contour and a second region having a second opening contour to be positioned on an upstream side of a charged particle beam with respect to the first region, The first opening contour is included in the second opening contour when viewed in an optical axis direction.

Abstract: A radiation generating unit of the present invention includes an electron beam source that emits an electron beam and can change the size of a region to be irradiated with the electron beam on a target while maintaining constant the center position of the region to be irradiated with the electron beam. Furthermore, a target is adopted where the number of types of target layers included in the region to be irradiated with the electron beam can be changed by changing the size of the region to be irradiated with the electron beam. The radiation quality can be switched without changing the radiation focus, and the radiation quality of a high energy radiation can be largely changed.

Abstract: There is provided an electron source including: an insulating substrate; a first wiring that is arranged on the insulating substrate; a second wiring that is arranged on the insulating substrate and intersects with the first wiring; and an electron-emitting device having a cathode electrode provided with an electron-emitting member and a gate electrode arranged above the cathode electrode, which is arranged on the insulating substrate and is separated from an intersecting portion of the first wiring with the second wiring; wherein the first wiring is arranged on the second wiring via an insulating layer; the gate electrode is provided with a plurality of slit-like openings that is arranged in substantially parallel at intervals; and the opening is arranged so that an extended line in a longitudinal direction thereof intersects with the first wiring.

Abstract: The present invention provides an image display apparatus which reduces electrical discharges produced by electron-emitting devices and prevents image degradation during discharge. The image display apparatus includes a rear plate equipped with information wirings, scan wirings, an insulating layer and electron-emitting devices; and a face plate placed opposite to the rear plate and equipped with an anode and light emitting members, wherein the electron-emitting devices are placed between first and second scan wirings adjacent to each other, and are electrically connected to the first scan wiring, the second scan wiring is electrically connected to a discharge induction electrode via a contact hole which penetrates the insulating layer, one end of the discharge induction electrode is covered with the insulating layer, and the other end extends out from the insulating layer in a direction toward the electron-emitting devices.

Abstract: A manufacturing method of an electron-emitting device including the steps of: preparing a base substrate provided with an insulating or semi-conducting layer in advance and exposing the layer to an atmosphere which contains neutral radical containing hydrogen. It is preferable that the insulating or semi-conducting layer contains metal particles; the insulating or semi-conducting layer is a film containing carbon as a main component; the neutral radical containing hydrogen contains any of H., CH3., C2H5., and C2H. or mixture gas thereof; compared with a density of a charged particle in the atmosphere, a density of the neutral radical containing hydrogen in the atmosphere is more than 1,000 times; and a step of exposing the insulating or semi-conducting layer to the atmosphere is a step of making a hydrogen termination by using a plasma apparatus provided with a bias grid.

Abstract: An electron-emitting device according to this invention has a cathode electrode, a first electrode, a second electrode, an insulating layer, a gate electrode, and an electron-emitting member. The gate electrode, the insulating layer, and the first electrode respectively have an opening communicating with each other. The electron-emitting member is provided on the cathode electrode, and at least a portion of the electron-emitting member is exposed in the opening. The second electrode is provided in the opening of the first electrode and electrically connected to the cathode electrode.

Abstract: There is provided an electron source including: an insulating substrate; a first wiring that is arranged on the insulating substrate; a second wiring that is arranged on the insulating substrate and intersects with the first wiring; and an electron-emitting device having a cathode electrode provided with an electron-emitting member and a gate electrode arranged above the cathode electrode, which is arranged on the insulating substrate and is separated from an intersecting portion of the first wiring with the second wiring; wherein the first wiring is arranged on the second wiring via an insulating layer; the gate electrode is provided with a plurality of slit-like openings that is arranged in substantially parallel at intervals; and the opening is arranged so that an extended line in a longitudinal direction thereof intersects with the first wiring.

Abstract: An electron-emitting device according to the present invention is an electron-emitting device having a cathode electrode, an insulating film provided on the cathode electrode, and a dipole layer provided on the insulating film, wherein the dipole layer is formed by terminating the insulating film with an NH group. An electron source according to the present invention has a plurality of the electron-emitting devices. An image display apparatus according to the present invention has the electron source and a light emitting member that emits light by irradiation with electrons.

Abstract: A method for manufacturing an electron-emitting device according to the present invention includes a step of preparing a carbon layer containing conductive metallic particles, a step of oxidizing a portion the conductive metallic particles, and a step of forming a dipole layer on a surface of the carbon layer. An electron-emitting device according to the present invention is manufactured by the manufacturing method for the electron-emitting device. An electron source according to the present invention includes a plurality of the electron-emitting devices. An image display apparatus according to the present invention includes the electron source and a image forming member which forms an image by an electron emitted from the electron source.

Abstract: An electron-emitting device according to this invention has a cathode electrode, a first electrode, a second electrode, an insulating layer, a gate electrode, and an electron-emitting member. The gate electrode, the insulating layer, and the first electrode respectively have an opening communicating with each other. The electron-emitting member is provided on the cathode electrode, and at least a portion of the electron-emitting member is exposed in the opening. The second electrode is provided in the opening of the first electrode and electrically connected to the cathode electrode.

Abstract: A manufacturing method of an electron-emitting device according to a present invention including the steps of: preparing a substrate having a carbon film, and a terminating a surface of the carbon film with hydrogen by irradiating a light or particle beam locally to a part of the carbon film in an atmosphere including hydrocarbon or hydrogen or in an atmosphere including both hydrocarbon and hydrogen.

Abstract: An electron-emitting device according to the present invention is characterized by that a gate electrode is located above a cathode electrode; a insulating member is located between the gate electrode and the cathode electrode; and the gate electrode and the insulating member are provided with openings, respectively, the openings being communicated with each other, wherein the insulating member is formed by layering three or more insulating layers including a first insulating layer, which is brought in contact with the gate electrode and has an opening, of which size is approximately the same as the size of the opening of the gate electrode; and a second insulating layer, which is located nearer to the side of the cathode electrode than the first insulating layer and has a larger opening than the opening of the gate electrode.

Abstract: A manufacturing method of an electron-emitting device including the steps of: preparing a base substrate provided with an insulating or semi-conducting layer in advance and exposing the layer to an atmosphere which contains neutral radical containing hydrogen. It is preferable that the insulating or semi-conducting layer contains metal particles; the insulating or semi-conducting layer is a film containing carbon as a main component; the neutral radical containing hydrogen contains any of H., CH3., C2H5., and C2H. or mixture gas thereof; compared with a density of a charged particle in the atmosphere, a density of the neutral radical containing hydrogen in the atmosphere is more than 1,000 times; and a step of exposing the insulating or semi-conducting layer to the atmosphere is a step of making a hydrogen termination by using a plasma apparatus provided with a bias grid.

Abstract: To provide an electron-emitting device having an electron-emitting film containing a metal and a carbon, wherein a density of the electron-emitting film other than the metal is determined to be not less than 1.2 g/cm3 and not more than 1.8 g/cm3, and a hydrogen content in the electron-emitting film is determined to be not less than 15 atm % and not more than 40 atm % with respect to the all atoms composing the electron-emitting film. Further, a concentration of the metal in the range of a depth from a surface of this electron-emitting film up to 10 nm is determined to be not less than 0.1 atm % and not more than 40 atm % with respect to number of carbon atoms contained in the electron-emitting film.

Abstract: An electron emitting device comprising on a substrate: an electrode extracting electrons from the electron emitting portion, the electrode applied with a voltage higher then the cathode electrode; and an deflecting electrode deflecting the electrons extracted from the electron emitting portion by the extraction electrode, the deflecting electrode applied with the voltage lower than the voltage of the extraction electrode; wherein the electron emitting device is disposed so as to be opposed to an anode electrode, and the extraction electrode is disposed between the cathode electrode and the deflecting electrode, and wherein the deflecting electrode comprises a portion opposed to the electron emitting portion, and other portions disposed to nip a region between the electron emitting portion and said portion in a direction crossing the direction along which the portion and the electron emitting portion are opposed.

Abstract: The present invention provide a lateral type electron-emitting device in which abnormal discharge near an electron-emitting region is suppressed, electron emission characteristics are stable, and electron emission efficiency is high. A method of manufacturing an electron-emitting device of the invention includes: a first step of preparing an electron-emitting electrode and a control electrode that are arranged on a surface of an insulating substrate; and a second step of covering the surface of the insulating substrate, which is located between the electron-emitting electrode and the control electrode, with a resistive film to connect the electron-emitting electrode and the control electrode. In the method of manufacturing an electron-emitting device, the resistive film is arranged to cover an end of a surface of the electron-emitting electrode opposed to the control electrode.

Abstract: A cylinder chamber 17 at the front of a direct-acting type actuator section 10 is connected to a cylinder chamber 37 at the front of an oscillating type actuator section 30 through a sequence valve with check valve 40. Further, a cylinder chamber 18 in the rear of the direct-acting type actuator section 10 is connected to a cylinder chamber 38 in the rear of the oscillating type actuator 30 through a stop valve 50. Ports 61 and 62 are provided for connecting passages between the cylinder chamber 37 and the sequence valve with check valve 40 and between the cylinder chamber 18 and the stop valve 50, respectively, for distribution control of a working fluid. According to the setting conditions of the respective valves 40 and 50, the piston rod 11 can perform an ordinary reciprocating motion and a motion that combines rotation and advancement.

Abstract: A cylinder chamber 17 at the front of a direct-acting type actuator section 10 is connected to a cylinder chamber 37 at the front of an oscillating type actuator section 30 through a sequence valve with check valve 40. Further, a cylinder chamber 18 in the rear of the direct-acting type actuator section 10 is connected to a cylinder chamber 38 in the rear of the oscillating type actuator 30 through a stop valve 50. Ports 61 and 62 are provided for connecting passages between the cylinder chamber 37 and the sequence valve with check valve 40 and between the cylinder chamber 18 and the stop valve 50, respectively, for distribution control of a working fluid. According to the setting conditions of the respective valves 40 and 50, the piston rod 11 can perform an ordinary reciprocating motion and a motion that combines rotation and advancement.

Abstract: An electron emitting device comprising on a substrate: an electrode extracting electrons from the electron emitting portion, the electrode applied with a voltage higher then the cathode electrode; and an deflecting electrode deflecting the electrons extracted from the electron emitting portion by the extraction electrode, the deflecting electrode applied with the voltage lower than the voltage of the extraction electrode; wherein the electron emitting device is disposed so as to be opposed to an anode electrode, and the extraction electrode is disposed between the cathode electrode and the deflecting electrode, and wherein the deflecting electrode comprises a portion opposed to the electron emitting portion, and other portions disposed to nip a region between the electron emitting portion and said portion in a direction crossing the direction along which the portion and the electron emitting portion are opposed.

Abstract: Disclosed is an electron-emitting device, an electron source, and an image-forming apparatus that have uniform electron-emitting characteristics, emit electron beams whose diameters are small, have simple constructions, and are easy to be manufactured. The electron-emitting device comprising: a first electrode arranged on a surface of a substrate; an insulating layer arranged on the first electrode; a second electrode arranged on the insulating layer; and an electron-emitting film arranged on the second electrode, where the second electrode has two side surfaces that oppose each other in a direction parallel to the surface of the substrate, and the electron-emitting film is arranged so as to be shifted toward one of the two side surfaces.