Abstract: A cooker is equipped with a heating chamber having an open part in the front surface and holding an object to be cooked, an opening/closing door having a see-through window and opens and closes the open part, a suction intake opening opened in one of the side walls that faces the heating chamber, an air discharge outlet opened in the other side wall of the heating chamber, and a circulation duct having first and second side surface parts provided outside of the two side walls of the heating chamber and connecting the suction intake opening provided at the first side surface part and the air discharge outlet provided at the second side surface part. The cooker further includes a circulation fan provided inside the circulation duct and drawing in gas inside the heating chamber through the suction intake opening and blows it out through the air discharge outlet.

Abstract: An internal defect inspection method where an ultrasonic wave is emitted from an ultrasonic wave transmitter toward a sample, the ultrasonic wave reflected by the sample is detected by an imaging type common-path interferometer as an interference signal, an ultrasonic wave signal is obtained from the interference signal, and any defect within the sample is detected from the ultrasonic wave signal. An internal defect inspection apparatus including an ultrasonic wave transmitter, an imaging type common-path interferometer and an ultrasonic wave signal detecting device is also provided.

Abstract: It is intended to provide an internal defect inspection method and an apparatus for implementing the method by which an ultrasonic wave is excited in a sample without contact with the sample and accordingly without damaging the sample, and an ultrasonic wave from any internal defect of the sample is detected without being affected by the sample surface, in a non-contact state and with high sensitivity. By the internal defect inspection method, an ultrasonic wave is emitted from an ultrasonic wave transmitter toward a sample, an ultrasonic wave reflected by the sample is detected as an interference signal with an imaging type common-path interferometer, an ultrasonic wave signal is obtained from the interference signal, and any defect within the sample is detected from the ultrasonic wave signal.

Abstract: A cooking device is provided with a casing, a heating compartment (102) provided within the casing and having an opening on the front face side of the heating compartment, a door for opening and closing the opening of the heating compartment (102), a lamp (104) for lighting the inside of the heating compartment (102), and a steel plate (134) mounted indirectly to the heating compartment (102). The lamp (104) is mounted to the free end section of the steel plate (134).

Abstract: A region surrounded by two gate wiring and two drain wiring includes pixels and when there is a defect of short-circuit in adjacent pixel electrodes, the short-circuited portion is removed by irradiating a laser via a mask having a transmission pattern, which corresponds to a pattern of the gate wiring, drain wiring and pixel electrodes in the short-circuited portion. The above short-circuited portion is identified and removed in comparison to a normal pattern, by use of information from an inspection apparatus, and the pattern defect formed on the substrate is automatically repaired. By applying the above method to a manufacturing process of display apparatus, in particular, to a resist pattern forming process, a display apparatus having a highly qualified display property may be achieved.

Abstract: The cooker is equipped with a heating chamber (2) that has an open part (2d) in the front surface and that holds the material to be cooked, an opening/closing door (3) that has a see-through window (4) and that opens and closes the open part, a suction intake opening (2a) that is open in one of the side walls that faces the heating chamber (2), an air discharge outlet (2b) that is open in the other side wall of the heating chamber (2), and a circulation duct (20) that has first and second side surface parts (20a, 20b) that are provided outside of the two side walls of the heating chamber (2) and that connect the suction intake opening (2a) provided at the first side surface part (20a) and the air discharge outlet (2b) provided at the second side surface part (20b), and a circulation fan (21) that is provided inside the circulation duct (20) and that draws in gas inside the heating chamber (2) through the suction intake opening (2a) and blows it out through the air discharge outlet (2b).

Abstract: A circuit pattern inspection method and an apparatus therefore, in which the whole of a portion to be inspected of a sample to be inspected is made to be in a predetermined changed state, the portion to be inspected is irradiated with an image-forming high-density electron beam while scanning the electron beam, secondary charged particles are detected at a portion irradiated with the electron beam after a predetermined period of time from an instance when the electron beam is irradiated, an image is formed on the basis of the thus detected secondary charged particle signal, and the portion to be inspected is inspected by using the thus formed image.

Abstract: A Stirling engine, wherein the inner yoke of a linear motor is installed on the outer peripheral surface of a cylinder. To keep a proper pressure balance between a compression space on one end side of a displacer and a back pressure space on the outer peripheral side of the cylinder, a first flow passage is formed in the piston starting at the compression space side end face toward the outer peripheral surface and a second flow passage allowing the first flow passage to communicate with the back pressure space is formed in the cylinder. The second flow passage is composed of a through hole that penetrates the wall of the cylinder in a radial direction and a communication passage formed between the outer peripheral surface of the cylinder and the inner peripheral surface of the inner yoke to allow the through hole to communicate with the back pressure space.

Abstract: A Stirling engine A has a pressure container 1 filled with a working gas, a cylinder 2 secured inside the pressure container 1, a power piston 3 provided inside the cylinder 2, and a displacer 4a provided inside the cylinder 2 on the same axis as the power piston 3. The displacer 4 has a displacer piston 41a that slides inside the cylinder 2, and a rod 42a which is connected and fixed to the displacer piston 41a and placed through a slide hole 31 formed at the center of the power piston 3. The rod 42a is formed in the shape of a hollow pipe.

Abstract: A circuit pattern inspection method and an apparatus therefor, in which the whole of a portion to be inspected of a sample to be inspected is made to be in a predetermined changed state, the portion to be inspected is irradiated with an image-forming high-density electron beam while scanning the electron beam, secondary charged particles are detected at a portion irradiated with the electron beam after a predetermined period of time from an instance when the electron beam is irradiated, an image is formed on the basis of the thus detected secondary charged particle signal, and the portion to be inspected is inspected by using the thus formed image.

Abstract: A Stirling engine, wherein the inner yoke of a linear motor is installed on the outer peripheral surface of a cylinder. To keep a proper pressure balance between a compression space on one end side of a displacer and a back pressure space on the outer peripheral side of the cylinder, a first flow passage is formed in the piston starting at the compression space side end face toward the outer peripheral surface and a second flow passage allowing the first flow passage to communicate with the back pressure space is formed in the cylinder. The second flow passage is composed of a through hole that penetrates the wall of the cylinder in a radial direction and a communication passage formed between the outer peripheral surface of the cylinder and the inner peripheral surface of the inner yoke to allow the through hole to communicate with the back pressure space.

Abstract: A circuit pattern inspection method and an apparatus therefor, in which the whole of a portion to be inspected of a sample to be inspected is made to be in a predetermined charged state, the portion to be inspected is irradiated with an image-forming high-density electron beam while scanning the electron beam, secondary charged particles are detected at a portion irradiated with the electron beam after a predetermined period of time from an instance when the electron beam is irradiated, an image is formed on the basis of the thus detected secondary charged particle signal, and the portion to be inspected is inspected by using the thus formed image.

Abstract: A Stirling engine A has a pressure container 1 filled with a working gas, a cylinder 2 secured inside the pressure container 1, a power piston 3 provided inside the cylinder 2, and a displacer 4a provided inside the cylinder 2 on the same axis as the power piston 3. The displacer 4 has a displacer piston 41a that slides inside the cylinder 2, and a rod 42a which is connected and fixed to the displacer piston 41a and placed through a slide hole 31 formed at the center of the power piston 3. The rod 42a is formed in the shape of a hollow pipe.

Abstract: In a Stirling engine, a hollow cylinder-like pressure vessel covers a cylinder, a piston, and a linear motor. The pressure vessel is divided into a ring-like portion and a dome-like portion at a position closer to the displacer installation side than a piston support-side end of the linear motor. At the divided portion, an outward-facing flange-shaped portion is formed for each of the ring-like portion and the dome-like portion. For temporary sealing of the pressure vessel, both flange-shaped portions are joined together and tightened by tightening rings and bolts. A performance check is performed in this state, and then outer peripheral portions of the flange-shaped portions are welded together for final sealing.

Abstract: A Stirling engine, wherein when a linear motor reciprocatingly move a piston in a cylinder, a displacer also reciprocatingly moves in the cylinder storing the displacer. By this, working mixture moves between a compression space and an expansion space. Though a spring for generating resonance is combined with the displacer, a spring for generating resonance for the piston is eliminated. Gas bearings are installed for the piston at two or more positions at specified intervals in the axial direction. An inside flange formed at the end of the cylinder and a stopper plate fixed to the linear motor determine the moving limit of the piston. Since a pin projected from the stopper plate is received by a through hole in a magnet holder, the piston can be prevented from being rotated.

Abstract: A Stirling engine, wherein when a linear motor reciprocatingly move a piston in a cylinder, a displacer also reciprocatingly moves in the cylinder storing the displacer. By this, working mixture moves between a compression space and an expansion space. Though a spring for generating resonance is combined with the displacer, a spring for generating resonance for the piston is eliminated. Gas bearings are installed for the piston at two or more positions at specified intervals in the axial direction. An inside flange formed at the end of the cylinder and a stopper plate fixed to the linear motor determine the moving limit of the piston. Since a pin projected from the stopper plate is received by a through hole in a magnet holder, the piston can be prevented from being rotated.

Abstract: The laser beam machine of the present invention includes: an XY stage on which to rest a workpiece with multiple machining objects arrayed on it, and which moves the workpiece in an XY direction on the basis of NC data; an image acquisition head which is provided in an image acquisition station and has oblique illumination optical system and detection optical system; and a laser machining head which is provided in a laser machining station and has a laser light source, an XY optical beam deflector for deflecting a laser beam in the XY direction on the basis of the deflection control data obtained in accordance with the image signals from each machining object that have been acquired by the image acquisition head, and an irradiation lens for admitting the above-deflected laser beam into each machining object from a substantially perpendicular direction.

Abstract: To make possible the in-line inspection of a pattern of an insulating material. A patterned wafer 40 formed with a pattern by a resist film is placed on a specimen table 21 of a patterned wafer inspection apparatus 1 in opposed relation to a SEM 3. An electron beam 10 of a large current is emitted from an electron gun 11 and the pattern of the patterned wafer is scanned only once at a high scanning rate. The secondary electrons generated by this scanning from the patterned wafer are detected by a secondary electron detector 16 thereby to acquire an electron beam image. Using this electron beam image, the comparative inspection is conducted on the patterned wafer through an arithmetic operation unit 32 and a defect determining unit 33. Since an electron beam image of high contrast can be obtained by scanning an electron beam only once, a patterned wafer inspection method using a SEM can be implemented in the IC fabrication method.

Abstract: A region surrounded by two gate wiring and two drain wiring includes pixels and when there is a defect of short-circuit in adjacent pixel electrodes, the short-circuited portion is removed by irradiating a laser via a mask having a transmission pattern, which corresponds to a pattern of the gate wiring, drain wiring and pixel electrodes in the short-circuited portion. The above short-circuited portion is identified and removed in comparison to a normal pattern, by use of information from an inspection apparatus, and the pattern defect formed on the substrate is automatically repaired. By applying the above method to a manufacturing process of display apparatus, in particular, to a resist pattern forming process, a display apparatus having a highly qualified display property may be achieved.

Abstract: A circuit pattern inspection method and an apparatus therefor, in which the whole of a portion to be inspected of a sample to be inspected is made to be in a predetermined charged state, the portion to be inspected is irradiated with an image-forming high-density electron beam while scanning the electron beam, secondary charged particles are detected at a portion irradiated with the electron beam after a predetermined period of time from an instance when the electron beam is irradiated, an image is formed on the basis of the thus detected secondary charged particle signal, and the portion to be inspected is inspected by using the thus formed image.