Patents by Inventor Kazushige Takeshi

Kazushige Takeshi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus for etching substrate and method of fabricating thin-glass substrate
    Patent number: 8409451
    Abstract: An apparatus for etching a substrate includes (a) a nozzle system including at least one nozzle through which acid solution containing at least hydrofluoric acid is sprayed onto the substrate, (b) a mover which moves at least one of the nozzle system and the substrate relative to the other in a predetermined direction in such a condition that the substrate and the nozzle system face each other, (c) a filter system which filters off particles out of the acid solution having been sprayed onto the substrate, and (d) a circulation system which circulates the acid solution having been sprayed onto the substrate, to the filter system, and further, to the nozzle system from the filter system.
    Type: Grant
    Filed: September 14, 2010
    Date of Patent: April 2, 2013
    Assignee: NEC Corporation
    Inventor: Kazushige Takeshi