Abstract: A drawing method includes the steps of: moving a plurality of drawing heads relative to a drawing surface in a predetermined scanning direction, each of the drawing heads being equipped with a drawing point forming section, in which drawing elements for forming drawing points on the drawing surface are arranged two dimensionally; forming the drawing points on the drawing surface sequentially, corresponding to the movement; and performing drawing by the plurality of the drawing heads, which are arranged in a direction that intersects with the scanning direction. Reference points are formed on the drawing surface, by a reference point drawing element which is set in each of the drawing heads, and the drawing timing of each of the drawing heads is controlled such that the reference points formed thereby are arranged at predetermined positions along the scanning direction.

Abstract: A laser beam is detected by a photosensor and a changing quantity of the light quantity is calculated to correct the fluctuation of the status of an exposure apparatus due to lapse of time. The laser beam is also detected by a photosensor to calculate a changing quantity of a beam diameter, and based on the changing quantities, mask data is modified. Then exposure recording of an image by exposure heads is continued by using the modified mask data.

Abstract: A test pattern is formed on a substrate based on test data supplied from a test data memory and a line width of a test pattern is measured. Mask data is set to have a specified micromirror of a DMD, which constitutes exposure heads in an off state fixedly at a mask data setting section, so that a light quantity is corrected by a line width changing quality.

Abstract: According to test data supplied from a test data memory (80), a test pattern is formed on a substrate (F) and its line width is measured. Light source units (28a to 28j) are adjusted by a light source control unit (89) and the line width change amount between exposure heads (24a to 24j) is corrected so as to set the obtained light quantity. In a mask data setting unit (86), mask data is set so as to control a particular micro mirror of DMD constituting the exposure heads (24a to 24j) to OFF state. By using the mask data, the output data is corrected and a desired image is exposed/recorded on a substrate (F).

Abstract: The same test image pattern is projected onto different regions of a photosensitive material on a substrate by a projection head while one of a projection distance from the projection head to the photosensitive material and a focus position is changed. Accordingly, each of the regions of the photosensitive material is exposed to light. The photosensitive material which has been exposed to light is developed. Then, the focus position of the projection head is obtained based on a relationship between a projection distance or focus position corresponding to a region in which the photosensitive material has been removed from the substrate by development and a projection distance or focus position corresponding to a region in which the photosensitive material has not been removed from the substrate by development among the regions of the photosensitive material.

Abstract: In an image drawing apparatus and an image drawing method for multiple-overlay image drawing, uneven density and resolution caused by an error of installation angle of an image drawing head and by pattern distortion can be reduced. A rectangular two-dimensional pixel array is installed in each of exposure heads in an exposure apparatus (image drawing apparatus) so as to make a predetermined angle with the scanning direction, facing an exposure surface. Slits and photo detectors detect in the exposure surface an actual installation angle of a representative light-spot column near the center of the pixel array. Active pixels in the pixel array are selected so as to realize multiple-overlay exposure ideally by causing overexposure and underexposure to be minimal in an area near the representative light-spot column, based on the measured angle. Exposure is carried out by causing only the active pixels to operate.

Abstract: A temperature control method of the heat developing apparatus to develop the heated developing sheet on which a latent image by the exposure is formed while the sheet is conveyed in the heat processing section 13, wherein the temperature detection is conducted by the first sensor 71 which is provided on the opening and closing cover, and exposed toward the outside of the apparatus when the opening and closing cover is opened. Simultaneously, the temperature detection is conducted by the second sensor 73 provided at a portion of the heat processing section 13 which is not exposed toward the outside of the apparatus even when the opening and closing cover is opened. Then, according to the optimum control variable corresponding to respective combinations of the temperature lowering amount detected by the previously stored first sensor 71 and second sensor 73, the temperature control of the heat processing section 13 is conducted at the time of the start of apparatus operation.

Abstract: A temperature control method of the heat developing apparatus to develop the heated developing sheet on which a latent image by the exposure is formed while the sheet is conveyed in the heat processing section 13, wherein the temperature detection is conducted by the first sensor 71 which is provided on the opening and closing cover, and exposed toward the outside of the apparatus when the opening and closing cover is opened. Simultaneously, the temperature detection is conducted by the second sensor 73 provided at a portion of the heat processing section 13 which is not exposed toward the outside of the apparatus even when the opening and closing cover is opened. Then, according to the optimum control variable corresponding to respective combinations of the temperature lowering amount detected by the previously stored first sensor 71 and second sensor 73, the temperature control of the heat processing section 13 is conducted at the time of the start of apparatus operation.

Abstract: An image is read by moving a line sensor relative to the image in a subsidiary scanning direction perpendicular to the direction of a pixels array of the line sensor. An image processor receives image signals from the sensor and produces an output image magnified relative to the image in accordance with a magnification ratio. The magnification ratio falls into one of n contiguous magnification ratio ranges between a reference magnification ratio and a minimum magnification ratio.