Abstract: This invention facilitates monitoring operation for checking whether or not quality of a substrate deteriorates as well as operation for identifying a cause of deterioration in quality. Identification information of constituent elements related to measurement target sections (pads) on a component-mounted substrate is arranged into hierarchal structure data. A first axis is arranged with the measurement target sections associated with this arrangement. A second axis is arranged with information (identification information of lots and squeegees) representing production conditions of the substrates according to an order of the substrates being processed. A two-dimensional area defined by the first axis and the second axis is set. A color map is generated, in which measured data of the measurement target sections on the substrates are arranged in colors at corresponding positions within the two-dimensional area.

Abstract: A factor estimation apparatus which can appropriately estimate a factor without increase in the cost, the factor estimation apparatus includes a characteristic quantity determination unit which determines the characteristic quantity; a user input unit which accepts an input from a user as data for the characteristic quantity determined by the characteristic quantity determination unit; an apparatus-data input unit to which data is inputted from a data obtaining device as the data for the characteristic quantity determined by the characteristic quantity determination unit; an input source defining unit which previously determines that the data for the characteristic quantity is inputted from which one of the user input unit and the apparatus-data input unit; and an estimation unit which estimates the factor using the data inputted from the input unit determined by the input source defining unit.

Abstract: An information processing device stores an extracted feature of each inspection item of the process inspection, and a determination result of a final inspection in a memory device, calculates a separation degree between a distribution of features of products which were determined as good products at the final inspection and a distribution of features of products which were determined as defective products at the final inspection for every inspection item or every combination of inspection items based on data of the products stored in the memory device, selects an inspection item whose inspection standard is to be reset from the inspection items or the combinations of the inspection items based on a value of the separation degree. Thus providing a method of appropriately setting an inspection standard for detecting a defect sign during process inspection. Further a process inspection device and inspection standard setting device which implements the same.

Abstract: An inspection apparatus includes a discrimination function determination unit which determines whether or not a discrimination function forms an area including a discrimination sample. The discrimination function is used in non-parametric one-class discrimination. The discrimination sample is discriminated into a class as a single area in an input space where learning samples are plotted.

Abstract: This invention facilitates monitoring operation for checking whether or not quality of a substrate deteriorates as well as operation for identifying a cause of deterioration in quality. Identification information of constituent elements related to measurement target sections (pads) on a component-mounted substrate is arranged into hierarchal structure data. A first axis is arranged with the measurement target sections associated with this arrangement. A second axis is arranged with information (identification information of lots and squeegees) representing production conditions of the substrates according to an order of the substrates being processed. A two-dimensional area defined by the first axis and the second axis is set. A color map is generated, in which measured data of the measurement target sections on the substrates are arranged in colors at corresponding positions within the two-dimensional area.

Abstract: A factor estimating support device supports estimation of factor from a result generated in a production system. In the factor estimating support device, material/environment history data and test history data acquired from the production system, and the causality structure data indicating causality between the plurality of variables are stored in the storage unit, where when determined that the final quality characteristic is abnormal in the final quality abnormal detecting part, determination is made on whether each variable other than the final quality characteristic is abnormal in the variable abnormality detecting part, and the determination result is reflected on a visible image in which the causality structure data is visualized in the visible image creating part.

Abstract: An inspection apparatus includes a discrimination function determination unit which determines whether or not a discrimination function forms an area including a discrimination sample. The discrimination function is used in non-parametric one-class discrimination. The discrimination sample is discriminated into a class as a single area in an input space where learning samples are plotted.

Abstract: A factor estimation apparatus which can appropriately estimate a factor without increase in the cost, the factor estimation apparatus includes a characteristic quantity determination unit which determines the characteristic quantity; a user input unit which accepts an input from a user as data for the characteristic quantity determined by the characteristic quantity determination unit; an apparatus-data input unit to which data is inputted from a data obtaining device as the data for the characteristic quantity determined by the characteristic quantity determination unit; an input source defining unit which previously determines that the data for the characteristic quantity is inputted from which one of the user input unit and the apparatus-data input unit; and an estimation unit which estimates the factor using the data inputted from the input unit determined by the input source defining unit.

Abstract: An information processing device stores an extracted feature of each inspection item of the process inspection, and a determination result of a final inspection in a memory device, calculates a separation degree between a distribution of features of products which were determined as good products at the final inspection and a distribution of features of products which were determined as defective products at the final inspection for every inspection item or every combination of inspection items based on data of the products stored in the memory device, selects an inspection item whose inspection standard is to be reset from the inspection items or the combinations of the inspection items based on a value of the separation degree. Thus providing a method of appropriately setting an inspection standard for detecting a defect sign during process inspection. Further a process inspection device and inspection standard setting device which implements the same.

Abstract: An inspection method and an inspection apparatus are disclosed, wherein the appropriate inspection can be conducted in accordance with the situation change of a nonconforming product from an initial stage, an adjust stage and a stable stage. The conformity/nonconformity is discriminated according to a MTS model and a one class SVM model based on the normal data obtained from a conforming product. The conformity/nonconformity is discriminated by both the MTS and the one class SVM in an adjust stage where a sufficient amount of sample data cannot be acquired or the shape of the conforming product distribution in the feature space and the shape of the normal area are unstable, and only by the MTS in a stable stage where a sufficient amount of sample data can be acquired and the shape of the conforming product distribution and the shape of the normal area are stable.

Abstract: A device that is capable of easily determining discrimination knowledge suitable for recognizing a normal/abnormal state of an object to be inspected in an inspecting and diagnosing apparatus is provided with: a parameter-retrieving unit that retrieves various parameter sets used for calculating feature amounts, a feature-amount operation unit that calculates a plurality of feature amounts based upon the respective parameter sets that have been retrieved by the retrieving unit in association with learning data that includes given normal data and abnormal data, a primary evaluation unit that outputs the effectiveness of each of the parameter sets as evaluated values based upon the results of the operation of the feature amounts calculated by the feature-amount operation unit, an optimal solution candidate output unit that, based upon the results of the primary evaluation found by the primary evaluation unit, outputs the results of a plurality of parameter sets having a high primary evaluated value as a plurali