Abstract: Fingers for holding a target project from shift members, and shift in accordance with the movement of the shift members shifted in predetermined axial directions by a shift mechanism to hold the target. Sliding members for shifting the shift members in the predetermined axial directions project from the shift members, and guide the shift members by sliding. According to this structure, a robot hand becomes smaller in size by decreasing the clearances between the fingers (moving the shift members closer to each other). Thus, the robot hand can hold a small target object within a small work space even though the robot hand conducts a parallel shift of the fingers.

Abstract: Fingers for holding a target project from shift members, and shift in accordance with the movement of the shift members shifted in predetermined axial directions by a shift mechanism to hold the target. Sliding members for shifting the shift members in the predetermined axial directions project from the shift members, and guide the shift members by sliding. According to this structure, a robot hand becomes smaller in size by decreasing the clearances between the fingers (moving the shift members closer to each other). Thus, the robot hand can hold a small target object within a small work space even though the robot hand conducts a parallel shift of the fingers.

Abstract: An aspect of the invention provides a robot hand that performs an action for gripping an object between plural finger sections provided to be capable of changing a distance between the finger sections. Between the plural finger sections, a palm section movable along a direction in which a base side of the plural finger sections and a distal end side of the plural finger sections are connected is provided.

Abstract: Four fingers forming a first finger pair and a second finger pair are driven in such a way that the four fingers move closer to or away from an object simultaneously at the same speed to grip the object. This eliminates the need to drive the fingers independently, which makes it possible to simplify the structure and control of the robot hand. Moreover, one of the two fingers forming the second finger pair is a deformable finger. Therefore, even when the second finger pair grasps the object before the first finger pair grasps the object, the deformable finger is deformed, and eventually it is possible to grasp the object with the four fingers. This allows the robot hand to grip various objects even though the robot hand has a simple structure and is controlled with ease.

Abstract: A robot hand includes a palm section provided between a plurality of finger sections. The palm section may be brought into contact with an object while the object is gripped by the finger sections. The robot hand also includes a contact member that is detachably mounted on the palm section. The contact member may be brought into contact with the object instead of the palm section. Accordingly, even if an object is too small to be contacted by the palm section, it is possible to stably grip the small object since the contact member can be brought into contact with the object gripped by the finger sections instead of the palm section.

Abstract: A robot hand has a plurality of fingers including a contact sensing finger that senses contact with an object. A base provided with the fingers detects a resultant reaction force that is the combination of reaction forces from the fingers. When no resultant reaction force is detected, the plurality of fingers are moved toward the object, and when the contact sensing finger comes into contact with the object, a force that drives the fingers is switched to a force corresponding to a grasp force. When the contact sensing finger has not come into contact with the object but a resultant reaction force is detected, the driving of the fingers is terminated and the position of the base is corrected by moving the base in a direction in which the resultant reaction force having acted thereon is not detected any more.

Abstract: An aspect of the invention provides a robot hand that performs an action for gripping an object between plural finger sections provided to be capable of changing a distance between the finger sections. Between the plural finger sections, a palm section movable along a direction in which a base side of the plural finger sections and a distal end side of the plural finger sections are connected is provided.

Abstract: A method of manufacturing a member with concave portions includes preparing a base material, forming a mask formation film on the base material, forming a number of openings in the mask formation film by laser irradiation treatments using a branching filter, and etching the base material to form the concave portions in the base material. The branching filter branches laser light into first laser beams and second laser beams. Each of irradiation regions of the mask formation film sequentially is subjected to the laser irradiation treatment, so that first openings are formed by the first laser beams and second openings are formed by the second laser beams. Each of the irradiation regions has portions where no opening is formed by the first beams of the laser irradiation treatment for the irradiation region while openings will be formed by the second laser beams in one or more of the subsequent laser irradiation treatments.

Abstract: A method for manufacturing a piezoelectric resonator is provided including: forming a resonator element having a plate-like base and a plurality of arms extending laterally from the base on a substrate made of crystal; emitting laser light for irradiating one surface and the other surface of the arms with laser light and for removing a region irradiated with the laser light, so as to form a groove having a predetermined cross sectional shape perpendicular to the longitudinal direction of the groove; forming a driving electrode on the resonator element.

Abstract: A substrate processing method is provided including: shaping a laser beam emitted from a laser beam source into a beam having a focal depth larger than the maximum value of a variation in thickness of a processing area portion of a processed substrate and the maximum value of a variation in bend thereof by making the laser beam pass through an diffractive optical element; forming plural etching holes by irradiating the shaped beam onto a film formed on the substrate to remove the film; and forming plural recessed portions by etching the substrate through the plural etching holes.

Abstract: A method of manufacturing a member with concave portions includes preparing a base material, forming a mask formation film on the base material, forming a number of openings in the mask formation film by laser irradiation treatments using a branching filter, and etching the base material to form the concave portions in the base material. The branching filter branches laser light into first laser beams and second laser beams. Each of irradiation regions of the mask formation film sequentially is subjected to the laser irradiation treatment, so that first openings are formed by the first laser beams and second openings are formed by the second laser beams. Each of the irradiation regions has portions where no opening is formed by the first beams of the laser irradiation treatment for the irradiation region while openings will be formed by the second laser beams in one or more of the subsequent laser irradiation treatments.

Abstract: A method of manufacturing a substrate having recessed portions for microlenses, the substrate being provided with a plurality of recessed portions on a surface thereof and the microlenses being formed by supplying resin to each of the recessed portions, the method includes: forming an etching mask film; forming through holes in regions of the etching mask film where the recessed portions are formed by irradiating laser beams onto the regions and modifying the entire etching mask film by heating; and forming the recessed portions on the surface of the substrate by bringing an etchant into contact with the surface of the substrate exposed by the through holes.

Abstract: A substrate processing method is provided including: shaping a laser beam emitted from a laser beam source into a beam having a focal depth larger than the maximum value of a variation in thickness of a processing area portion of a processed substrate and the maximum value of a variation in bend thereof by making the laser beam pass through an diffractive optical element; forming plural etching holes by irradiating the shaped beam onto a film formed on the substrate to remove the film; and forming plural recessed portions by etching the substrate through the plural etching holes.

Abstract: A method for manufacturing a piezoelectric resonator is provided including: forming a resonator element having a plate-like base and a plurality of arms extending laterally from the base on a substrate made of crystal; emitting laser light for irradiating one surface and the other surface of the arms with laser light and for removing a region irradiated with the laser light, so as to form a groove having a predetermined cross sectional shape perpendicular to the longitudinal direction of the groove; forming a driving electrode on the resonator element.

Abstract: Scribe lines are formed in advance at cutting locations on both surfaces of a panel formed by bonding an upper substrate and a lower substrate to each other via a sealing material, and a laser beam is applied to each of the scribe lines on both surfaces, by which a liquid crystal panel having a product size is obtained.

Abstract: Scribe lines are formed in advance at cutting locations on both surfaces of a panel formed by bonding an upper substrate and a lower substrate to each other via a sealing material, and a laser beam is applied to each of the scribe lines on both surfaces, by which a liquid crystal panel having a product sized is obtained.