Patents by Inventor Kazutomo Hatano

Kazutomo Hatano has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Processing machine
    Patent number: 6250997
    Abstract: A lapping or polishing machine which processes the surface of silicon wafer or other work piece by rotating a platen with constant supply of lapping or polishing compound. Said platen of the lapping or polishing machine is connected directly to a direct drive motor and driven by the direct drive motor, and the point to point control of said platen is carried out by a rotary encoder.
    Type: Grant
    Filed: October 26, 1999
    Date of Patent: June 26, 2001
    Assignee: Speedfam-Ipec Co LTD
    Inventors: Kazutomo Hatano, Mitsuru Maruya