Abstract: A fast atom beam source used e.g., for sputtering, includes an ion source that emits an ion beam and an electron gun that emits an electron beam at a speed substantially equal to the speed of the ions in the ion beam emitted from the ion source and in the same direction as that of the ion beam. The fast atom beam source may also include a speed control for regulating the speed of the electrons in the electron beam emitted from said electron gun to a level substantially equal to that of the speed of the ions in the ion beam, and a deflector which aligns the electron beam with the ion beam.

Abstract: A fast atom beam source is capable of emitting a fast atom beam with low energy efficiently and is compact. A reaction gas mixed with a halogen or a halide is introduced into a fast atom beam source casing through a plate-shaped anode, and gas ions that are produced by a plasma discharge induced at a relatively low discharge voltage are converted into a fast atom beam, which is emitted from fast atom beam emitting holes provided in a plate-shaped cathode that is disposed opposite the anode.

Abstract: A fast atom beam source comprises a evacuated cylinder, an anode set at one end or an intermediate portion of the cylinder, a cathode with fast atom emission orifices on it, and set at the other end of the cylinder, and a DC high voltage power supply for generating gas discharge by applying a high voltage between the anode and the cathode. A slit is provided on inside wall of the cylinder and a reservoir for oil or low-melting point metal is connected to the slit. A heater is set on the resevoir for vapourizing the oil or low-melting point metal. It supplies vapor of oil or low-melting point metal into the cylinder. Many ions of oil or low melting point metal are generated in glow through gas (the oil, vapor or the metal vapor) discharge by high voltage applying. They are accelerated towards the cathode. Then, they are neutralized after collision with the vapor of oil or low-melting point metal remaining near the cathode and are emitted from the orifices on the cathode. They constitute a fast atom beam.

Abstract: A sanitary cleaning apparatus is disclosed, which comprises a cleaning water discharge device, a functional device including another cleaning water discharge device or a private parts dryer, a member for turning on and off the cleaning water discharge device, and a human body (presence or absence) detector. Only while the human body detector produces a human body detection signal, the on-off member for the cleaning water discharge device or the functional device is turned on, thereby selectively actuating a corresponding device. One of the devices thus turned on as selected above is de-energized by (a) the turning off of the on-off member of the selected device, (b) the turning on of the on-off member of the other device not selected, or (c) extinction of the human body detection signal of the human body detector.

Abstract: A sanitary cleaning apparatus includes a cleaning water discharger and an additional apparatus (such as a drier) having a sanitary function, and a set of switches operatively connected to the cleaning water discharger and the additional apparatus, respectively. When a switch is manually operated, a first setting control sets the energization amount of the cleaning water discharger and/or the additional apparatus to a first set value. When a second setting control is manually operated, the energization amount is changed to a second set value set by the second setting control. When a human body detector is turned off, the energization amount is returned from the second value to the first value.