Abstract: A film thickness measuring apparatus measures a film thickness of a sample during a manufacturing step. The film thickness measuring apparatus includes a lens focusing light (plasma light) generated in the manufacturing step and reflected by one surface of the sample, an inclined dichroic mirror having a transmissivity and a reflectivity changing in accordance with a wavelength in a predetermined wavelength region and separating light focused by the lens through transmission and reflection, an area sensor capturing an image of light separated by the inclined dichroic mirror, and a control apparatus estimating the film thickness of the sample on the basis of a signal from the area sensor capturing an image of light and obtaining a film thickness distribution on the one surface of the sample. Light reflected by the sample includes light having a wavelength included in the predetermined wavelength region of the inclined dichroic mirror.

Abstract: A spectroscopic measurement apparatus includes an optical system, a photodetector, and an analysis unit. The optical system guides measurement target light from an object to a light receiving surface of the photodetector, and forms a spectral image of the measurement target light on the light receiving. The photodetector includes the light receiving surface on which a plurality of pixels are arranged respectively on a plurality of rows. The photodetector receives the spectral image for a first exposure time by a plurality of pixels in a first region on the light receiving surface, and outputs first spectrum data. The photodetector receives the spectral image for a second exposure time by a plurality of pixels in a second region on the light receiving surface, and outputs second spectrum data. The second exposure time is longer than the first exposure time.

Abstract: A spectroscopic measurement apparatus includes an optical system, a photodetector, and an analysis unit. The optical system guides measurement target light from an object to a light receiving surface of the photodetector, and forms a spectral image of the measurement target light on the light receiving surface of the photodetector. The photodetector includes the light receiving surface on which a plurality of pixels are arranged respectively on a plurality of rows. The photodetector receives the spectral image for a first exposure time by a plurality of pixels in a first region on the light receiving surface, and outputs first spectrum data. The photodetector receives the spectral image for a second exposure time by a plurality of pixels in a second region on the light receiving surface, and outputs second spectrum data. The second exposure time is longer than the first exposure time.

Abstract: A spectroscopic measurement apparatus includes an optical system, a photodetector, and an analysis unit. The optical system guides measurement target light from an object to a light receiving surface of the photodetector, and forms a spectral image of the measurement target light on the light receiving surface of the photodetector. The photodetector includes the light receiving surface on which a plurality of pixels are arranged respectively on a plurality of rows. The photodetector receives the spectral image for a first exposure time by a plurality of pixels in a first region on the light receiving surface, and outputs first spectrum data. The photodetector receives the spectral image for a second exposure time by a plurality of pixels in a second region on the light receiving surface, and outputs second spectrum data. The second exposure time is longer than the first exposure time.

Abstract: A spectroscopic measurement apparatus includes an optical system, a photodetector, and an analysis unit. The optical system guides measurement target light from an object to a light receiving surface of the photodetector, and forms a spectral image of the measurement target light on the light receiving. The photodetector includes the light receiving surface on which a plurality of pixels are arranged respectively on a plurality of rows. The photodetector receives the spectral image for a first exposure time by a plurality of pixels in a first region on the light receiving surface, and outputs first spectrum data. The photodetector receives the spectral image for a second exposure time by a plurality of pixels in a second region on the light receiving surface, and outputs second spectrum data. The second exposure time is longer than the first exposure time.

Abstract: A spectrometry device includes a light source, an integrator configured to have an internal space in which a long afterglow emission material is disposed and output detection light from the internal space, a spectroscopic detector, an analysis unit configured to analyze a photoluminescence quantum yield of the long afterglow emission material, and a control unit configured to control switching between presence and absence of input of excitation light to the internal space and an exposure time in the spectroscopic detector. The control unit controls the light source so that the input of the excitation light to the internal space is maintained in a first period and the input of the excitation light to the internal space is stopped in a second period, and controls the spectroscopic detector so that an exposure time in the second period becomes longer than an exposure time in the first period.

Abstract: A spectroscopic measurement apparatus includes an optical system, a photodetector, and an analysis unit. The optical system guides measurement target light from an object to a light receiving surface of the photodetector, and forms a spectral image of the measurement target light on the light receiving. The photodetector includes the light receiving surface on which a plurality of pixels are arranged respectively on a plurality of rows. The photodetector receives the spectral image for a first exposure time by a plurality of pixels in a first region on the light receiving surface, and outputs first spectrum data. The photodetector receives the spectral image for a second exposure time by a plurality of pixels in a second region on the light receiving surface, and outputs second spectrum data. The second exposure time is longer than the first exposure time.

Abstract: In a spectrometry device, a control unit controls a light source so that input of excitation light to an internal space is maintained in a first period, and that the input of the excitation light to the internal space is stopped in a second period, and the analysis unit calculates the photoluminescence quantum yield of a long afterglow emission material on the basis of the number of absorbed photons of the long afterglow emission material obtained on the basis of excitation light spectral data in the first period and the number of light emission photons of the long afterglow emission material obtained on the basis of light emission spectral data in any of the first period, the second period, and a total period of the first period and the second period.

Abstract: A spectroscopic measurement apparatus includes an optical system, a photodetector, and an analysis unit. The optical system guides measurement target light from an object to a light receiving surface of the photodetector, and forms a spectral image of the measurement target light on the light receiving. The photodetector includes the light receiving surface on which a plurality of pixels are arranged respectively on a plurality of rows. The photodetector receives the spectral image for a first exposure time by a plurality of pixels in a first region on the light receiving surface, and outputs first spectrum data. The photodetector receives the spectral image for a second exposure time by a plurality of pixels in a second region on the light receiving surface, and outputs second spectrum data. The second exposure time is longer than the first exposure time.

Abstract: A sample-container holding member is detachably attached to an integrator via a fixing member and holds a sample container, which comprises a cell containing a sample and a cap, in a state where the sample container is placed in the integrator. The sample-container holding member comprises a pillar-shaped support portion fixed to the fixing member and a container attaching portion which is provided at an end of the support portion in the axial direction and to which the sample container is attached. The container attaching portion comprises a housing portion housing a cap and a holding portion having contact with at least three points on an outer surface of the cell and holding the sample container.

Abstract: A sample-container holding member is detachably attached to an integrator via a fixing member and holds a sample container, which comprises a cell containing a sample and a cap, in a state where the sample container is placed in the integrator. The sample-container holding member comprises a pillar-shaped support portion fixed to the fixing member and a container attaching portion which is provided at an end of the support portion in the axial direction and to which the sample container is attached. The container attaching portion comprises a housing portion housing a cap and a holding portion having contact with at least three points on an outer surface of the cell and holding the sample container.

Abstract: An optical measuring device includes an integrator formed with an incident opening on which excitation light is to be incident and an exit opening from which measurement light is to exit, a light guide unit for guiding the measurement light that exits from the exit opening, and a light detecting unit for detecting the measurement light guided by the light guide unit. The light guide unit includes a plurality of light guide members arranged so that incident end surfaces of the light guide members face the inside of the integrator through the exit opening. The light detecting unit detects the measurement light that is guided by at least one of the plurality of light guide members. Light-receiving regions of the plurality of light guide members on the incident end surface side overlap with each other in the integrator.

Abstract: A spectrometry device includes a light source, an integrator configured to have an internal space in which a long afterglow emission material is disposed and output detection light from the internal space, a spectroscopic detector, an analysis unit configured to analyze a photoluminescence quantum yield of the long afterglow emission material, and a control unit configured to control switching between presence and absence of input of excitation light to the internal space and an exposure time in the spectroscopic detector. The control unit controls the light source so that the input of the excitation light to the internal space is maintained in a first period and the input of the excitation light to the internal space is stopped in a second period, and controls the spectroscopic detector so that an exposure time in the second period becomes longer than an exposure time in the first period.

Abstract: In a spectrometry device, a control unit controls a light source so that input of excitation light to an internal space is maintained in a first period, and that the input of the excitation light to the internal space is stopped in a second period, and the analysis unit calculates the photoluminescence quantum yield of a long afterglow emission material on the basis of the number of absorbed photons of the long afterglow emission material obtained on the basis of excitation light spectral data in the first period and the number of light emission photons of the long afterglow emission material obtained on the basis of light emission spectral data in any of the first period, the second period, and a total period of the first period and the second period.

Abstract: A spectrometry device includes: an integrating sphere which includes an inner wall surface and an attachment hole; an adapter which includes a guide hole guiding the measurement target light and is disposed in the integrating sphere; a plate which includes a first surface covering the guide hole from the outside of the integrating sphere and allowing a sample to be mounted thereon and a second surface and through which the measurement target light is transmitted; a holder which includes a concave portion mounting the plate thereon and is attached to the attachment hole; and a spectral detector configured to detect the measurement target light. The concave portion includes a bottom surface facing the second surface and a side surface surrounding the periphery of the plate. The bottom surface and the side surface are coated with a reflective material reflecting the measurement target light.

Abstract: An optical measuring device includes an integrator formed with an incident opening on which excitation light is to be incident and an exit opening from which measurement light is to exit, a light guide unit for guiding the measurement light that exits from the exit opening, and a light detecting unit for detecting the measurement light guided by the light guide unit. The light guide unit includes a plurality of light guide members arranged so that incident end surfaces of the light guide members face the inside of the integrator through the exit opening. The light detecting unit detects the measurement light that is guided by at least one of the plurality of light guide members. Light-receiving regions of the plurality of light guide members on the incident end surface side overlap with each other in the integrator.

Abstract: A spectrometry device includes: an integrating sphere which includes an inner wall surface and an attachment hole; an adapter which includes a guide hole guiding the measurement target light and is disposed in the integrating sphere; a plate which includes a first surface covering the guide hole from the outside of the integrating sphere and allowing a sample to be mounted thereon and a second surface and through which the measurement target light is transmitted; a holder which includes a concave portion mounting the plate thereon and is attached to the attachment hole; and a spectral detector configured to detect the measurement target light. The concave portion includes a bottom surface facing the second surface and a side surface surrounding the periphery of the plate. The bottom surface and the side surface are coated with a reflective material reflecting the measurement target light.

Abstract: A spectroscopic measurement apparatus includes a light source, an integrator, a spectroscopic detector, and an analysis unit. The integrator includes an internal space in which a measurement object is disposed, a light input portion for inputting light to the internal space, a light output portion for outputting light from the internal space, a sample attachment portion for attaching the measurement object, and a filter attachment portion for attaching a filter unit. The filter unit has a transmission spectrum in which an attenuation rate for excitation light is larger than an attenuation rate for up-conversion light, and attenuates the light output from the light output portion. The analysis unit analyzes luminous efficiency of the measurement object on the basis of the transmission spectrum data and the spectroscopic spectrum data acquired by the spectroscopic detector.

Abstract: A spectral measurement apparatus for irradiating a sample as a measurement object with excitation light and detecting light to be measured includes a light source generating the excitation light; an integrator having an input opening portion through which the excitation light is input, and an output opening portion from which the light to be measured is output; a housing portion arranged in the integrator and housing the sample; an incidence optical system making the excitation light incident to the sample; a photodetector detecting the light to be measured output from the output opening portion; and an analysis device calculating a quantum yield of the sample, based on a detection value detected by the photodetector, and the excitation light is applied to the sample so as to include the sample.

Abstract: A spectroscopic measurement apparatus includes a light source, an integrator, a spectroscopic detector, and an analysis unit. The integrator includes an internal space in which a measurement object is disposed, a light input portion for inputting light to the internal space, a light output portion for outputting light from the internal space, a sample attachment portion for attaching the measurement object, and a filter attachment portion for attaching a filter unit. The filter unit has a transmission spectrum in which an attenuation rate for excitation light is larger than an attenuation rate for up-conversion light, and attenuates the light output from the light output portion. The analysis unit analyzes luminous efficiency of the measurement object on the basis of the transmission spectrum data and the spectroscopic spectrum data acquired by the spectroscopic detector.