Patents by Inventor Kazuya KOSHIISHI

Kazuya KOSHIISHI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Teaching method of transfer device
    Patent number: 10840122
    Abstract: A teaching method according to an embodiment is for a transfer device including a substrate holding unit including a suction port for holding a substrate by applying suction, an actuation mechanism for moving the substrate holding unit, and a pressure detecting unit for detecting a pressure in a suction path communicating with the suction port. The method includes: moving the substrate holding unit under the substrate; moving the substrate holding unit upward toward the substrate, while applying suction to the suction path and detecting the pressure in the suction path; determining whether or not the substrate holding unit has touched the substrate, based on the pressure in the suction path; and storing, as a standard position, a position of the substrate holding unit at a time of determining that the substrate holding unit has touched the substrate.
    Type: Grant
    Filed: December 5, 2018
    Date of Patent: November 17, 2020
    Assignee: Tokyo Electron Limited
    Inventors: Toshiyuki Kobayashi, Ryu Kitahara, Kazuya Koshiishi, Junya Sato, Shun Suto, Toshimitsu Chiba
  • TEACHING METHOD OF TRANSFER DEVICE
    Publication number: 20190181031
    Abstract: A teaching method according to an embodiment is for a transfer device including a substrate holding unit including a suction port for holding a substrate by applying suction, an actuation mechanism for moving the substrate holding unit, and a pressure detecting unit for detecting a pressure in a suction path communicating with the suction port. The method includes: moving the substrate holding unit under the substrate; moving the substrate holding unit upward toward the substrate, while applying suction to the suction path and detecting the pressure in the suction path; determining whether or not the substrate holding unit has touched the substrate, based on the pressure in the suction path; and storing, as a standard position, a position of the substrate holding unit at a time of determining that the substrate holding unit has touched the substrate.
    Type: Application
    Filed: December 5, 2018
    Publication date: June 13, 2019
    Inventors: Toshiyuki KOBAYASHI, Ryu KITAHARA, Kazuya KOSHIISHI, Junya SATO, Shun SUTO, Toshimitsu CHIBA