Patents by Inventor Kazuya Okuda

Kazuya Okuda has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 5577610
    Abstract: Proposed is a novel casing for frame-supported pellicle used for dustproof protection of a photomask in the photolithographic patterning process for the manufacture of fine electronic devices. Different from conventional casings made from a plastic resin, the casing of the invention is characterized by the use of a unique permanently antistatic resin composition which is a resin blend consisting of 80-95% by weight of an ABS or acrylic resin and 20-5% by weight of a specific hydrophilic polymer. By virtue of the excellent antistatic behavior of the resin composition, the frame-supported pellicle encased in the casing is safe from the troubles due to deposition of dust particles during transportation and from contamination by the vaporized matter from the casing.
    Type: Grant
    Filed: September 26, 1995
    Date of Patent: November 26, 1996
    Assignees: Shin-Etsu Polymer Co., Ltd., Shin-Etsu Chemical Co., Ltd.
    Inventors: Kazuya Okuda, Satoshi Kawakami