Patents by Inventor Kazuya UOYAMA

Kazuya UOYAMA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9810905
    Abstract: A support information display method is provided with an acquiring process for acquiring a first image by photographing, via a camera provided in a head mount display, a predetermined part of a substrate processing apparatus as a maintenance object, an estimating process for estimating the support information related to the predetermined part in the first image from information stored in a database, an image creating process for creating a second image by converting the support information estimated in the estimating process into an image, and a displaying process for displaying the second image on the head mount display in order for the operator to visually recognize the support information.
    Type: Grant
    Filed: February 6, 2014
    Date of Patent: November 7, 2017
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Toshiaki Kodama, Toru Yamauchi, Sensho Kobayashi, Hiroshi Nakamura, Gaku Ikeda, Kazuya Uoyama
  • Patent number: 9704367
    Abstract: A clean-room monitoring device for monitoring the interior of a clean-room having a floor in which a removable cover such as a grating or a non-porous cover is disposed, includes: a monitoring camera which captures an image of the removable cover; a monitor which detects the existence of an opening exposed when the removable cover is removed, based on an image signal obtained from the monitoring camera, detects the presence of a workman approaching the opening if it is detected that the opening exists, and outputs a warning signal if the workman is detected; and a warning generator which receives the warning signal from monitor and issues a warning.
    Type: Grant
    Filed: January 6, 2015
    Date of Patent: July 11, 2017
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Atsushi Suzuki, Kazuya Uoyama, Yoshitaka Konishi, Daisuke Oku, Yoshitada Honda
  • Publication number: 20150201167
    Abstract: A fabrication equipment monitoring device which monitors, by a server and a portable terminal capable of communicating with the server, specifies the fabrication equipment toward which image capture element is faced, extracts the fabrication equipment information of the specified fabrication equipment from the storage unit based on the location information acquired by the location information acquisition unit, a direction information detected by the direction detection unit, an angle of view of the image capture element and the layout information when the image capture element is faced toward the fabrication equipment and displays at least a portion of the extracted fabrication equipment information on the display unit.
    Type: Application
    Filed: July 2, 2013
    Publication date: July 16, 2015
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Kaname Yamaji, Kazuya Uoyama, Yasuyuki Morita, Hiroaki Miyatake
  • Publication number: 20150124092
    Abstract: A clean-room monitoring device for monitoring the interior of a clean-room having a floor in which a removable cover such as a grating or a non-porous cover is disposed, includes: a monitoring camera which captures an image of the removable cover; a monitor which detects the existence of an opening exposed when the removable cover is removed, based on an image signal obtained from the monitoring camera, detects the presence of a workman approaching the opening if it is detected that the opening exists, and outputs a warning signal if the workman is detected; and a warning generator which receives the warning signal from monitor and issues a warning.
    Type: Application
    Filed: January 6, 2015
    Publication date: May 7, 2015
    Inventors: Atsushi SUZUKI, Kazuya UOYAMA, Yoshitaka KONISHI, Daisuke OKU, Yoshitada HONDA
  • Publication number: 20140240484
    Abstract: A support information display method is provided with an acquiring process for acquiring a first image by photographing, via a camera provided in a head mount display, a predetermined part of a substrate processing apparatus as a maintenance object, an estimating process for estimating the support information related to the predetermined part in the first image from information stored in a database, an image creating process for creating a second image by converting the support information estimated in the estimating process into an image, and a displaying process for displaying the second image on the head mount display in order for the operator to visually recognize the support information.
    Type: Application
    Filed: February 6, 2014
    Publication date: August 28, 2014
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Toshiaki KODAMA, Toru YAMAUCHI, Sensho KOBAYASHI, Hiroshi NAKAMURA, Gaku IKEDA, Kazuya UOYAMA