Abstract: A semiconductor device according to the present invention includes a silicon carbide semiconductor substrate having a silicon carbide semiconductor layer; a p-type impurity region provided in the silicon carbide semiconductor layer and including a p-type impurity; a p-type ohmic electrode electrically connected to the p-type impurity region; an n-type impurity region provided in the silicon carbide semiconductor layer adjacent to the p-type impurity region, and including an n-type impurity; and an n-type ohmic electrode electrically connected to the n-type impurity region. The p-type ohmic electrode contains an alloy of nickel, aluminum, silicon and carbon, and the n-type ohmic electrode contains an alloy of titanium, silicon and carbon.