Abstract: The suspension device for vehicles includes: an electric damper which operates by electricity; a fluid pressure damper which operates by hydraulic pressure; a road-surface state detector which detects a road-surface state ahead of a tire of a vehicle; and a controller which causes at least one to operate among the electric damper and the fluid pressure damper, based on a detection result of the road-surface state detector.

Abstract: Provided is a semiconductor device in which deterioration of electric characteristics which becomes more noticeable as the semiconductor device is miniaturized can be suppressed. The semiconductor device includes a first oxide film, an oxide semiconductor film over the first oxide film, a source electrode and a drain electrode in contact with the oxide semiconductor film, a second oxide film over the oxide semiconductor film, the source electrode, and the drain electrode, a gate insulating film over the second oxide film, and a gate electrode in contact with the gate insulating film. A top end portion of the oxide semiconductor film is curved when seen in a channel width direction.

Abstract: A preview road surface detector capable of discontinuing predictive control is provided, which suppresses the energy consumption required to determine whether predictive control should be discontinued. The preview road surface detector includes: a distance sensor provided on a vehicle body member, the distance sensor detecting a value related to a distance between the vehicle body member and a measurement point on a road surface ahead of a vehicle, the measurement point corresponding to at least part of a road surface contact portion of a wheel; and a distance calculator that calculates a road surface distance as the distance from the vehicle body member to the measurement point, based on a detection value detected by the distance sensor, in which the distance sensor is deactivated under a predetermined condition.

Abstract: The vehicular state estimation apparatus includes: a physical quantity detector configured to detect a physical quantity indicating behavior by the vehicle; a vehicle behavior estimator configured to estimate current behavior by the vehicle; a distance sensor that is configured to detect a value pertaining to a distance between the vehicle body member and a measurement point on a road surface in front of the vehicle and corresponding to at least a central section of a road surface contact section on a wheel; a distance calculator configured to calculate a road surface distance; a spring constant calculator configured to calculate at least one of spring constants, in a vehicle stopped state; and a suspension controller configured to control operation of the active suspension apparatus based on the spring constants, the road surface distance, and vehicle behavior information.

Abstract: A preview road surface detector is provided, which is capable of suppressing the crosstalk of received detection waves. A preview road surface detector, including: a distance sensor including a plurality of transmitters and at least one receiver installed on a vehicle body member and arranged in a direction intersecting a travel direction of a vehicle, the distance sensor detecting a value related to a distance between the vehicle body member and a measurement point on a road surface ahead of a vehicle, the measurement point corresponding to at least part of a road surface contact portion of a wheel; and a distance calculator that calculates a road surface distance as the distance from the vehicle body member to the measurement point, based on a detection value detected by the distance sensor, in which the transmitters transmit detection waves with a time difference between the adjacent transmitters.

Abstract: An electrically powered suspension system includes: an actuator that is provided between a vehicle body and a wheel of a vehicle and generates a load for damping vibration of the vehicle body; an information acquisition part that acquires information on a sprung state amount and a road surface state; a target load calculation part that calculates a first target load related to skyhook control based on the sprung state amount and calculates a second target load related to preview control based on the road surface state; and a load control part. The target load calculation part calculates a third target load related to roll generation control based on a target roll angle and calculates a combined target load into which the first target load, second target load, and third target load have been combined. The load control part performs load control of the actuator using the combined target load.

Abstract: A rotary operating device includes a case, a rotating shaft member, an operation member, and a sensor. The case has a cavity having an annular shape with an opening at a top. The rotating shaft member is rotatable with respect to the case. The operation member rotates together with the rotating shaft member. The sensor is disposed within the cavity to detect rotation of the rotating shaft member. The case has an inner peripheral wall. The operation member has an inner cylindrical portion. The rotating shaft member has a peripheral wall that extends downward and along an outer peripheral surface of the inner peripheral wall. A first gap between the inner peripheral wall of the case and the peripheral wall of the rotating shaft member is smaller than a second gap between an inner peripheral surface of the rotating shaft member and the inner cylindrical portion of the operation member.

Abstract: An electrically powered suspension system performs an accurate vibration damping of a vehicle with low power consumption even if a linear motor of an electromagnetic actuator strokes to reach an irregular region and includes an electromagnetic actuator generating a driving force for the vibration damping. A linear motor of the actuator includes a cylindrical rod member provided with a plurality of on-rod armature coils along its axis and a housing surrounding the rod member, mounted movable back and forth along the axis with respect to the rod member, and provided with a plurality of permanent magnets along the axis. The on-rod armature coils located on ends of the rod member are provided with short-circuit parts b suppressing the rod member and the housing from moving back and forth with respect to each other.

Abstract: A suspension device includes: a hydraulic damper including a rod provided with a valve for generating a hydraulic pressure when the rod is displaced between a first liquid chamber and a second liquid chamber; and an electric damper configured to electrically displace the rod by an actuator. The electric damper includes: an outer cylinder; an inner cylinder; a piston provided on the rod and configured to stroke in the inner cylinder; and a communication passage disposed inside the inner cylinder at a central portion where the piston strokes. The communication passage establishes communication between the first liquid chamber at one axial end side of the piston and the second liquid chamber at another axial end side of the piston.

Abstract: A charged particle apparatus includes: a specimen chamber which is maintained at vacuum and in which a specimen is disposed; a preliminary exhaust chamber that is connected to the specimen chamber via a vacuum gate valve; an exhaust device that exhausts the preliminary exhaust chamber; charged particle beam source an optical system; a detector; a transporting device that transports the specimen from the preliminary exhaust chamber to the specimen chamber; and a control unit. The control unit performs: adjustment processing in which at least one of the optical system and the detector is adjusted in a state where the specimen is housed in the preliminary exhaust chamber; and transporting processing which is performed after the adjustment processing and in which the vacuum gate valve is opened and the transporting device transports the specimen to the specimen chamber.

Abstract: A charged particle beam device includes: a charged particle source; an optical system which acts on a charged particle beam emitted from the charged particle source; a control unit which controls the optical system; and a storage unit which stores previous setting values of the optical system. The optical system includes a first optical element and a second optical element for controlling a state of the charged particle beam to be incident on the first optical element. The control unit obtains an initial value of a setting value of the second optical element based on previous setting values of the second optical element; and changes a state of the charged particle beam by changing the setting value of the second optical element from the obtained initial value and obtains the setting value of the second optical element based on the change in the state of the charged particle beam.

Abstract: A charged particle apparatus includes: a specimen chamber which is maintained at vacuum and in which a specimen is disposed; a preliminary exhaust chamber that is connected to the specimen chamber via a vacuum gate valve; an exhaust device that exhausts the preliminary exhaust chamber; charged particle beam source an optical system; a detector; a transporting device that transports the specimen from the preliminary exhaust chamber to the specimen chamber; and a control unit. The control unit performs: adjustment processing in which at least one of the optical system and the detector is adjusted in a state where the specimen is housed in the preliminary exhaust chamber; and transporting processing which is performed after the adjustment processing and in which the vacuum gate valve is opened and the transporting device transports the specimen to the specimen chamber.

Abstract: A charged particle beam device includes: a charged particle source; an optical system which acts on a charged particle beam emitted from the charged particle source; a control unit which controls the optical system; and a storage unit which stores previous setting values of the optical system. The optical system includes a first optical element and a second optical element for controlling a state of the charged particle beam to be incident on the first optical element. The control unit obtains an initial value of a setting value of the second optical element based on previous setting values of the second optical element; and changes a state of the charged particle beam by changing the setting value of the second optical element from the obtained initial value and obtains the setting value of the second optical element based on the change in the state of the charged particle beam.

Abstract: There is provided a charged particle system (100) that has: illumination optics (104) for illuminating a sample with charged particles; an imaging deflector system (112) disposed behind an objective lens (110); a detector (116) having a detection surface (115), imaging optics (114) disposed behind the imaging deflector system (112) and operative to focus the charged particles as diffraction discs (2) onto the detection surface (115); a storage unit (120) for storing intensity information detected by the detector (116); and a controller (130) for controlling the imaging deflector system (112). The controller (130) controls the imaging deflector system (112) to cause the charged particles passing through a given position of particle impingement on the sample to be deflected under successively different sets of deflection conditions and to bring the diffraction discs (2) into focus onto successively different regions of the detection surface (115).

Abstract: There is provided a beam alignment method capable of easily aligning an electron beam with a coma-free axis in an electron microscope. The method starts with tilting the electron beam (EB) in a first direction (+X) relative to a reference axis (A) and obtaining a first TEM (transmission electron microscope) image. Then, the beam is tilted in a second direction (?X) relative to the reference axis, the second direction (?X) being on the opposite side of the reference axis (A) from the first direction (+X), and a second TEM image is obtained. The reference axis is incrementally varied so as to reduce the brightness of the differential image between a power spectrum of the first TEM image and a power spectrum of the second TEM image.

Abstract: There is provided a beam alignment method capable of easily aligning an electron beam with a coma-free axis in an electron microscope. The method starts with tilting the electron beam (EB) in a first direction (+X) relative to a reference axis (A) and obtaining a first TEM (transmission electron microscope) image. Then, the beam is tilted in a second direction (?X) relative to the reference axis, the second direction (?X) being on the opposite side of the reference axis (A) from the first direction (+X), and a second TEM image is obtained. The reference axis is incrementally varied so as to reduce the brightness of the differential image between a power spectrum of the first TEM image and a power spectrum of the second TEM image.

Abstract: There is provided an electron microscope capable of easily achieving power saving. The electron microscope (100) includes a controller (60) for switching the mode of operation of the microscope from a first mode where electron lenses (12, 14, 18, 20) are activated to a second mode where the electron lenses (12, 14, 18, 20) are not activated. During this operation for making a switch from the first mode to the second mode, the controller (60) performs the steps of: closing a first vacuum gate valve (50), opening a second vacuum gate valve (52), and vacuum pumping the interior of the electron optical column (2) of the microscope by the second vacuum pumping unit (40); then controlling a heating section (26) to heat an adsorptive member (242); then opening the first vacuum gate valve (50), closing the second vacuum gate valve (52), and vacuum pumping the interior of the electron optical column (2) by the first vacuum pumping unit (30); and turning off the electron lenses (12, 14, 18, 20).

Abstract: There is provided a charged particle system capable of measuring deflection fields in a sample without using a segmented detector. The charged particle system (100) has: illumination optics (104) for illuminating the sample with charged particles; an imaging deflector system (112) disposed behind an objective lens (110) and operative to deflect the charged particles; a detector (116) having a detection surface (115) and operative to detect the charged particles incident thereon, imaging optics (114) disposed behind the imaging deflector system (112) and operative to focus the charged particles as diffraction discs (2) onto the detection surface (115); a storage unit (120) for storing intensity information detected by the detector (116); and a controller (130) for controlling the imaging deflector system (112).

Abstract: A transmission electron microscope (100) capable of reducing the effects of stray magnetic fields includes an electron beam source (2), an illumination lens system (4) for causing the electron beam to impinge on a sample (S), a sample stage (6) for holding the sample (S), a first objective lens (8), a second objective lens (10) disposed behind the first objective lens (8), an imaging lens system (16) disposed behind the second objective lens (10), and a controller (22) configured or programmed for controlling the first objective lens (8) and the second objective lens (10). The first objective lens (8) has upper and lower polepieces disposed on opposite sides of the sample (S). The upper and lower polepieces together produce a magnetic field. The controller (22) performs an operation for controlling the second objective lens (10) to construct a TEM (transmission electron microscope) image of the sample (S) out of the electron beam transmitted through the sample (S).

Abstract: There is provided an electron microscope capable of easily achieving power saving. The electron microscope (100) includes a controller (60) for switching the mode of operation of the microscope from a first mode where electron lenses (12, 14, 18, 20) are activated to a second mode where the electron lenses (12, 14, 18, 20) are not activated. During this operation for making a switch from the first mode to the second mode, the controller (60) performs the steps of: closing a first vacuum gate valve (50), opening a second vacuum gate valve (52), and vacuum pumping the interior of the electron optical column (2) of the microscope by the second vacuum pumping unit (40); then controlling a heating section (26) to heat an adsorptive member (242); then opening the first vacuum gate valve (50), closing the second vacuum gate valve (52), and vacuum pumping the interior of the electron optical column (2) by the first vacuum pumping unit (30); and turning off the electron lenses (12, 14, 18, 20).