Abstract: [Object] To improve step coverage of a coating film [Solving Means] A deposition apparatus that includes a first electrode, a second electrode, a first power supply source, a second power supply source, and a phase adjuster is used. The first power supply source includes a first high-frequency power source and a first matching circuit, the first high-frequency power source outputting first high-frequency power, the first matching circuit being connected between the first high-frequency power source and the first electrode. The second power supply source includes a second matching circuit that outputs second high-frequency power, the second high-frequency power having the same period as the first high-frequency power and being lower than the first high-frequency power.

Abstract: [Object] To improve step coverage of a coating film [Solving Means] A deposition apparatus that includes a first electrode, a second electrode, a first power supply source, a second power supply source, and a phase adjuster is used. The first power supply source includes a first high-frequency power source and a first matching circuit, the first high-frequency power source outputting first high-frequency power, the first matching circuit being connected between the first high-frequency power source and the first electrode. The second power supply source includes a second matching circuit that outputs second high-frequency power, the second high-frequency power having the same period as the first high-frequency power and being lower than the first high-frequency power.

Abstract: [SUMMARY] A sputtering method includes disposing a carbon target (Tg) and a film-forming object (Wf) inside a vacuum chamber (1); evacuating the vacuum chamber to a predetermined pressure by a vacuum pump (Vp); subsequently introducing a sputtering gas into the vacuum chamber; charging the target with electric power to form a plasma atmosphere such that the target gets sputtered by the ions of the sputtering gas in the plasma, whereby carbon particles splashed from the target are caused to be adhered to, and deposited on, a surface of the film-forming object, thereby forming a carbon film. The target is cooled by heat exchanging with a first refrigerant at least during the time when the target receives radiant heat from the plasma; wherein the temperature of the first refrigerant is controlled to keep the temperature of the first refrigerant below 263K.

Abstract: A sputtering device includes a vacuum chamber, a target, a substrate stage, and a deposition guard plate. The target is located in the vacuum chamber. The substrate stage is located in the vacuum char and includes a seat surface on which a substrate is placed. The substrate includes an outer circumferential portion extending beyond the seat surface. The deposition guard plate is located in the vacuum chamber and includes an annular inclined surface extending around the substrate stage. The annular inclined surface is faced toward the target and is a circumferential surface of a truncated cone including an inner edge opposing a rear surface of the outer circumferential portion. An angle between the annular inclined surface and a plane including the seat surface is greater than or equal to 10° and less than or equal to 50°.

Abstract: A target assembly is provided in which an abnormal discharging between a projected portion of a backing plate and a side surface of the target is prevented and also in which a bonding material to bond the target and the backing plate can be surely prevented from seeping to the outside and also which is easy in reusing the backing plate. The target assembly according to this invention having: a target made of an insulating material; and a backing plate bonded to one surface of the target via a bonding material, the backing plate having a projected portion which is projected outward beyond an outer peripheral edge of the target, further has an annular insulating plate. The annular insulating plate: encloses a circumference of the target while maintaining a predetermined clearance to a side surface of the target; and covers that surface of the projected portion.

Abstract: A target assembly is provided in which an abnormal discharging between a projected portion of a backing plate and a side surface of the target is prevented and also in which a bonding material to bond the target and the backing plate can be surely prevented from seeping to the outside and also which is easy in reusing the backing plate. The target assembly according to this invention having: a target made of an insulating material; and a backing plate bonded to one surface of the target via a bonding material, the backing plate having a projected portion which is projected outward beyond an outer peripheral edge of the target, further has an annular insulating plate. The annular insulating plate: encloses a circumference of the target while maintaining a predetermined clearance to a side surface of the target; and covers that surface of the projected portion.

Abstract: A manufacturing method of a device including: a first process in which a barrier film is formed on a substrate with a concave portion provided on one surface thereof so as to cover an inner wall surface of the concave portion; a second process in which a conductive film is formed so as to cover the barrier film; and a third process in which the conductive film is melted by a reflow method, wherein the method includes a process ? between the second process and the third process, in which the substrate with the barrier film and the conductive film laminated thereon in this order is exposed to an atmosphere under a pressure A for a time period B, and wherein in the process ?, control is carried out such that a product of the pressure A and the time period B is not greater than 6×10?4 [Pa·s].

Abstract: An apparatus for changing the direction of travel of a web-like material without inverting the front and rear surfaces of the web-like material is improved in that a plurality of guide rotors are disposed on each of a plurality of spiral curves along an imaginary conical surface so as to be rotatable about axes intersecting at right angles with the corresponding spiral curve on the imaginary conical surface, and a conical surface formed by an enveloping surface of these guide rotors is used as a traveling path of the web-like material, whereby shortcomings inherent in such apparatus in the prior art can be eliminated.

Abstract: A method of correcting distortions existing in a rolled strip product by using a tension leveling equipment including a leveling mill station for smoothing out distortions remained in the strip product by producing a permanent elongation through the repetition of bending procedures rendered upon the strip while passing under tension therethrough, a pair of bridle units disposed on the both input and output sides of the leveling mill station, and means for rendering a tension upon the strip from a predetermined rate of elongation under the effect of a difference in the feeding velocities of the bridle units, which comprises the steps of detecting the distortions in the shape of the strip product upon the delivery thereof from the output bridle unit, obtaining detection signals, and controlling the rate of intermeshing in the leveling mill station and the rate of elongation of the strip product to a required range in accordance with the detection signals.

Abstract: In a rolling mill in which at least one of paired work rolls for rolling metal strips is formed to have a small diameter and is backed up by a pair of first intermediate rolls which in turn are backed up either directly by a plurality of backup rolls or indirectly by a plurality of backup rolls through second intermediate rolls, the rolling mill of the present invention is characterized in that a bearing case containing bearings is provided to each end of the small diameter work roll and to each end of the pair of first intermediate rolls supporting the small diameter work roll so that these rolls are supported on the bearing cases through bearings, and hydraulic cylinders are provided for applying independent roll bending forces to the work roll bearing cases and the intermediate roll bearing cases.